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    • 3. 发明公开
    • 진공 증착장치 및 방법 그리고 유기 전자 발광장치
    • 真空蒸发沉积和有机电致发光器件的装置和方法
    • KR1020020001555A
    • 2002-01-09
    • KR1020010035352
    • 2001-06-21
    • 파나소닉 전공 주식회사키도 준지
    • 쓰바키겐지키도준지기시가미야스히사곤도유키히로
    • H05B33/10
    • C23C14/541C23C14/12C23C14/24
    • PURPOSE: Apparatus for and method of vacuum vapor deposition and organic electroluminescent device are provided to deposit the organic material at a high deposition rate to a uniform film thickness and at a high yield. CONSTITUTION: A vacuum vapor deposition apparatus comprises a vacuum chamber(1) having a plurality of vapor sources and a heater for heating the vapor sources to achieve vacuum vapor deposition on a surface of at least one substrate within the vacuum chamber, at least one of the vapor sources(2) utilizing an organic material, a hot wall(4) heated to a temperature at which the organic material is neither deposited nor decomposed, the hot wall enclosing a space in which the vapor sources and the substrate confront each other, and the organic material being vapor deposited on the surface of the substrate, by heating the vapor sources while the vapor sources and the substrate are moved relative to each other.
    • 目的:提供真空气相沉积的设备和方法以及有机电致发光器件,以高沉积速率将有机材料沉积到均匀的膜厚度和高产率。 构成:真空气相沉积装置包括具有多个蒸汽源的真空室(1)和用于加热蒸气源以在真空室内的至少一个基板的表面上实现真空气相沉积的加热器,至少一个 蒸气源(2)利用有机材料,加热到有机材料既不沉积也不分解的温度的热壁(4),热壁包围蒸气源和基板彼此面对的空间, 并且通过在蒸气源和基板相对于彼此移动的同时加热蒸气源,气相沉积在基板的表面上的有机材料。