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    • 10. 发明公开
    • 탄탈 화합물, 그 제조 방법, 탄탈 함유 박막 및 그 형성방법
    • 钛化合物,其制造方法,含有薄膜的薄膜及其形成方法
    • KR1020070101352A
    • 2007-10-16
    • KR1020077019471
    • 2006-01-25
    • 토소가부시키가이샤코우에키자이단호오징 사가미 츄오 카가쿠겡큐쇼
    • 세키모토켄이치타다켄이치타카모리마유미야마카와테츠후루카와타이시오시마노리아키
    • C07F9/00C07F19/00C23C16/00H01L21/44
    • C23C16/18C07F17/00
    • Disclosed is a novel tantalum compound which enables to selectively form a tantalum-containing film which does not include a halogen or the like, or a tantalum-containing film which includes a desired element. Also disclosed are a method for producing such a tantalum compound, and a method for forming a tantalum-containing film which includes a desired element. Specifically disclosed is a tantalum compound represented by the general formula (1) or (2) below. [Chemical formula 1] (1) (In the formula (1), R1 represents a straight-chain alkyl group having 2-6 carbon atoms.) [Chemical formula 2] (2) (In the formula (2), R 2 represents a straight-chain alkyl group having 2-6 carbon atoms.) Also specifically disclosed is a method for forming a tantalum-containing film by using a tantalum compound represented by the general formula (6) below as a raw material. [Chemical formula 3] (6) (In the formula (6), j, k, m and n respectively represent an integer of 1-4 satisfying j + k = 5 and m + n = 5; and R3-R6 respectively represent a hydrogen atom, an alkyl group having 1-6 carbon atoms or the like.)
    • 公开了一种能够选择性地形成不含卤素等的含钽膜或包含所需元素的含钽膜的新型钽化合物。 还公开了制造这种钽化合物的方法,以及包含所需元素的含钽膜的形成方法。 具体公开了由下述通式(1)或(2)表示的钽化合物。 [化学式1](1)(式(1)中,R 1表示碳原子数为2〜6的直链烷基。)[化学式2](2)(式(2)中,R 2 代表具有2-6个碳原子的直链烷基。)还具体公开了通过使用由下述通式(6)表示的钽化合物作为原料来形成含钽膜的方法。 [化学式3](6)(式(6)中,j,k,m和n分别表示满足j + k = 5且m + n = 5的整数1-4,R3-R6分别表示 氢原子,具有1-6个碳原子的烷基等)