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    • 4. 发明公开
    • 결정 성장 장비
    • 水晶生长单元
    • KR1020060104999A
    • 2006-10-09
    • KR1020067009551
    • 2004-10-25
    • 크리스탈 그로우잉 시스템즈 게엠베하
    • 뮈헤,안드레아스알텍뤼거,부르크하르트본호프,액셀
    • H01L21/20
    • C30B15/30C30B11/00C30B15/14Y10S117/90Y10T117/10
    • The invention relates to a crystal growing unit, generally provided with a resistance heater for heating the melt (13) and also with field coils (inductors), generating an alternating field in the crucible (11), by means of which currents are induced in the melt (13). According to the invention, the resuistance heater is also embodied as a field coil, in other words, is formed by a hollow cylindrical body (1) in which a helical, single-layer current path is formed by a peripheral slot (2). The above has the advantage that the current necessary for heating the unit is also used to generate a moving magnetic field. As a result, neither separate field coils nor a separate power supply for the field coils is necessary. The resistance heater also serving as field coil which is embodied as a coil arrangement, is high temperature resistant and directly encloses the hot core of the unit and hence the melt region. The volume in which the magnetic field must be generated is thus minimised. The magnetic field must not extend beyond the shell wall of the crystal growing unit, said shell wall can thus be embodied as a conventional steel shell.
    • 本发明涉及一种晶体生长单元,其通常设置有用于加热熔体(13)的电阻加热器,并且还具有励磁线圈(电感器),在坩埚(11)中产生交变电场,通过该电场加热电流 熔体(13)。 根据本发明,电阻加热器还被实施为场线圈,换句话说,由中空圆柱体(1)形成,其中螺旋形单层电流路径由外围槽(2)形成。 上述优点在于,加热单元所需的电流也用于产生移动磁场。 因此,不需要单独的励磁线圈和用于励磁线圈的单独的电源。 作为实现为线圈装置的励磁线圈的电阻加热器是耐高温的,并且直接包围该单元的热芯并因此包围熔融区域。 因此必须产生磁场的体积被最小化。 磁场不能超出晶体生长单元的壳壁,因此所述壳壁可以被实施为传统的钢壳。