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1. 发明授权

KR101545004B1 유연한 시트와 기판을 접촉시키기 위한 방법 및 시스템 有权
标题翻译：用于接触柔性片和基片的方法和系统
公开(公告)号：KR101545004B1
公开(公告)日：2015-08-18
申请号：KR1020097014606
申请日：2008-01-11
申请人： 코닌클리케 필립스 엔.브이.
发明人： 베르스추렌,마르쿠스,아. , 메겐스,미스차
IPC分类号： B05D1/28 , B05D7/04 , B32B39/00
CPC分类号： G03F7/0002 , B05D1/28 , B82Y10/00 , B82Y40/00 , Y10S438/973 , Y10S438/976
摘要： 본발명은측면정렬이향상된제 1 요소와유연한시트를접촉시키기위한방법에관한것이다. 이방법은유연한시트와, 제 1 요소나제 1 스테이지에서앵커라고부르는시트파킹표면중 하나사이의제 1 접촉을확립한후 제 1 측면오정렬을측정하는단계를포함한다. 5개의오정렬이미리결정된임계값을넘게되면, 유연한시트가제 1 요소와접촉하지않도록앵커에서파킹되고, 제 1 요소와앵커의상대적인위치가이러한방법의다음단계내에서확립될제 1 요소와유연한시트사이의접촉시오정렬을정정하기위한제 2 스테이지동안바뀐다. 제 2 스테이지(10)를얻기위해접촉점을이동시키는단계동안, 접촉하는프로세스는초기접촉을확립하기위한프로세스보다더 정확하고재현가능하다. 본발명은또한그러한방법을실행하기위한장치, 그러한방법의사용, 및디바이스들을제작하기위한장치에관한것이다.

2. 发明公开

KR1020090099557A 유연한 시트와 기판을 접촉시키기 위한 방법 및 시스템 有权
标题翻译：用于接触柔性片和基底的方法和系统
公开(公告)号：KR1020090099557A
公开(公告)日：2009-09-22
申请号：KR1020097014606
申请日：2008-01-11
申请人： 코닌클리케 필립스 엔.브이.
发明人： 베르스추렌,마르쿠스,아. , 메겐스,미스차
IPC分类号： B05D1/28 , B05D7/04 , B32B39/00
CPC分类号： G03F7/0002 , B05D1/28 , B82Y10/00 , B82Y40/00 , Y10S438/973 , Y10S438/976
摘要： The invention relates to a method for contacting a flexible sheet to a first element with improved lateral alignment. The method includes a step of measuring a first lateral misalignment after establishing a first contact between the flexible sheet and either of the first element and a sheet parking surface called anchor in the first stage. If the 5 misalignment exceeds a predetermined threshold the flexible sheet is parked at the anchor such that it is not in contact with the first element, and the relative position of the first element and the anchor is altered during the second stage for correcting the mismatch during a contact between the flexible sheet and the first element to be established within the next step of the method. During the steps of shifting the contact point to obtain the second stage 10 the contacting process is more accurate and reproducible than the process for establishing the init ial contact. The invention also relates to an apparatus for executing the method, and the use of the method and apparatus for the manufacture of devices.
摘要翻译：本发明涉及一种使柔性片与第一元件接触的方法，该方法具有改进的横向对准。该方法包括在第一阶段中建立柔性片与第一元件中的任一个和称为锚的片材停车面之间的第一接触之后，测量第一侧向偏移的步骤。如果5个未对准超过预定阈值，则柔性片材停放在锚固件处，使得其不与第一元件接触，并且在第二阶段期间改变第一元件和锚的相对位置以纠正不匹配在该方法的下一步骤中在柔性片和要建立的第一元件之间的接触。在移动接触点以获得第二阶段10的步骤期间，接触过程比建立初始接触的过程更准确和可重现。本发明还涉及一种用于执行该方法的装置，以及用于制造装置的方法和装置的使用。

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