专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

KR100847520B1 기판의 엣지노광장치 有权
标题翻译：用于边缘边缘的接触装置
公开(公告)号：KR100847520B1
公开(公告)日：2008-07-22
申请号：KR1020070026691
申请日：2007-03-19
申请人： 주식회사 코디엠 , 김재순
发明人： 강흥석 , 이경규 , 김재순
IPC分类号： H01L21/027
CPC分类号： G03F7/2028 , G03F7/70016
摘要： An exposure apparatus for edge of a substrate is provided to expose both edge parts of the substrate easily by forming two linear light source regions with one lamp. A chamber(100) includes a reflective plate(120) for reflecting light of a lamp(110). A cooling chamber maintains constant temperature by suppressing a temperature increase due to the lamp and the reflective plate. A pair of first reflective mirrors(310a,310b) are installed on the left side of the cooling chamber in order to reflect the light of the reflective plate to both sides thereof. A pair of second reflective mirrors(320a,320b) are formed to reflect the light of the first reflective mirrors to the lower side. A pair of lenses(330a,330b) are formed to condense the light of the second reflective mirrors. A light source control unit(350) is installed on the lower side of the lenses in order to control the condensed light region and to irradiate the light to edge of a substrate. The lamp is a linear lamp having a shape of bar installed in a longitudinal direction.
摘要翻译：提供一种用于基板边缘的曝光装置，通过用一个灯形成两个线性光源区域，容易地露出基板的两个边缘部分。室（100）包括用于反射灯（110）的光的反射板（120）。通过抑制由于灯和反射板引起的温度上升，冷却室保持恒定的温度。一对第一反射镜（310a，310b）安装在冷却室的左侧，以将反射板的光反射到其两侧。形成一对第二反射镜（320a，320b）以将第一反射镜的光反射到下侧。形成一对透镜（330a，330b）以冷凝第二反射镜的光。光源控制单元（350）安装在透镜的下侧，以便控制聚光区域并将光照射到基板的边缘。该灯是沿长度方向安装的条状的线状灯。

IPRDB

热门服务

关于我们

友情链接

联系方式