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    • 1. 发明授权
    • 온도 제어 장치 및 그 방법
    • 温度控制装置及其方法
    • KR101273897B1
    • 2013-06-17
    • KR1020130013353
    • 2013-02-06
    • 주식회사 썬닉스
    • 김재민김재현이정호이상신박규성
    • G05D23/19
    • G05D23/1917H01L35/28
    • PURPOSE: A temperature control device and a method thereof are provided to calculate the temperature of an object or the temperature of a Peltier part without a separate temperature sensor. CONSTITUTION: A temperature control device(10) is composed of a power supply part(11), a Peltier part(12), a measurement part(13), and a control part(14). The power supply part supplies power. The Peltier part is operated based on the power supplied from the power supply unit and provides counter electromotive force to the power supply unit. The measurement part measures the counter electromotive force. The control part calculates the temperature difference of the Peltier part based on the measured counter electromotive force and calculates the temperature of the Peltier part or an object adjacent to the Peltier part based on the calculated temperature difference and the temperature of a preset coolant. [Reference numerals] (11) Power supply part; (12) Peltier part; (13) Measurement part; (14) Control part
    • 目的:提供一种温度控制装置及其方法来计算物体的温度或没有单独的温度传感器的珀耳帖部件的温度。 构成:温度控制装置(10)由电源部(11),珀耳帖部(12),测量部(13)和控制部(14)构成。 电源部分供电。 珀耳帖部分基于从电源单元提供的电力来操作,并向电源单元提供反电动势。 测量部件测量反电动势。 控制部分根据测得的反电动势计算珀耳帖部分的温差,并根据计算出的温度差和预设冷却液的温度,计算珀尔帖部件或邻近珀尔帖部件的物体的温度。 (附图标记)(11)供电部; (12)珀耳帖部分; (13)测量部件; (14)控制部
    • 2. 发明授权
    • 열전소자를 이용한 콜드트랩
    • 使用温度的冷藏
    • KR101258826B1
    • 2013-05-06
    • KR1020120136572
    • 2012-11-28
    • 주식회사 썬닉스
    • 김재민김재현이정호이상신박규성박근배
    • H01L21/20H01L27/16
    • F25B21/02F25B2321/0251
    • PURPOSE: A cold trap using a thermoelectric element is provided to cool the local region of a cold housing by using a thermoelectric element for a peltier effect. CONSTITUTION: A supplying line(20) supplies gas into a cold housing(10). A discharge pipe(30) ejects gas discharged from the cold housing to the outside. A cooling module(50) cools the gas of the cold housing to condense the byproduct of the gas. The cooling module includes a thermoelectric element(70), a cooling housing(71), a heat radiation housing(73), and a heat radiation pin(76). Power is supplied to the thermoelectric element to generate a peltier effect. The heat radiation pin diffuses the heat of the heat radiation housing by heat conduction.
    • 目的:提供使用热电元件的冷阱,通过使用用于珀耳帖效应的热电元件来冷却冷室的局部区域。 构成:供应管线(20)将气体供应到冷的外壳(10)中。 排出管(30)将从冷室排出的气体喷射到外部。 冷却模块(50)冷却冷室的气体以冷凝气体的副产物。 冷却模块包括热电元件(70),冷却壳体(71),散热壳体(73)和散热销(76)。 电力供应到热电元件以产生珀尔帖效应。 散热针通过热传导扩散散热壳体的热量。
    • 3. 发明授权
    • 벨로우즈
    • 波纹管
    • KR101397087B1
    • 2014-05-19
    • KR1020130100626
    • 2013-08-23
    • 주식회사 썬닉스
    • 김재민김재현이상신박규성박근배
    • H01L21/02H01L21/205H01L21/3065
    • F16L51/025F16K51/02H01L21/67207
    • The present invention relates to a bellows. The bellows according to one embodiment of the present invention comprises a first bellows pipe (10) and a second bellows pipe (20) in which a flow path is formed. According to one embodiment of the present invention, the first bellows pipe (10) includes a stretchable first bellows part (12); and a connection part (14) which is arranged in one side of the first bellows part (12). The second bellows pipe (20) includes a stretchable second bellows part (22) and a second connection part (24) which is fixed to the first connection part (14).
    • 波纹管本发明涉及一种波纹管。 根据本发明的一个实施例的波纹管包括形成流路的第一波纹管(10)和第二波纹管(20)。 根据本发明的一个实施例,第一波纹管(10)包括可拉伸的第一波纹管部分(12); 以及布置在第一波纹管部分(12)的一侧的连接部分(14)。 第二波纹管(20)包括可拉伸的第二波纹管部分(22)和固定到第一连接部分(14)的第二连接部分(24)。
    • 5. 发明授权
    • 배관연결체의 수명 예측 시스템 및 그 방법
    • 用于评估管道连接器残留寿命的系统和方法
    • KR101324323B1
    • 2013-11-01
    • KR1020130025866
    • 2013-03-11
    • 주식회사 썬닉스
    • 김재민김재현
    • F17D5/06G01M3/24
    • F17D5/06G01M3/243G06F19/00
    • PURPOSE: A service life assessment system of a pipe connection unit and a method thereof are provided to deal with damage due to fluid leakage by accurately predicting the replacement time of the pipe connection unit and by performing a repair work or a replacement work at a proper time. CONSTITUTION: A service life assessment system of a pipe connection unit comprises a microphone unit, a signal processing unit, a detection unit, and an assessment unit. The signal processing unit receives an acoustic signal which is output from the microphone unit, and process the acoustic signal by amplifying the acoustic signal to a signal corresponding to a leakage sound. The detection unit changes the signal corresponding to the leakage sound, which is output from the signal processing unit, into a wave form in a frequency domain, detects a frequency content and swing of the leakage sound, and provides the detected frequency content and swing as the frequency information. The assessment unit assesses the residual life of the pipe connection unit by coping with at least corresponding one between the frequency content and the frequency swing which are included in the frequency information based on a correlation graph which is predetermined according to the correlation of at least one between the frequency content and the frequency swing with the service life of the pipe connection unit. [Reference numerals] (AA,CC,HH) Amplitude; (BB) Time; (DD,FF) Frequency; (EE,GG) Lifetime
    • 目的:提供管道连接单元的使用寿命评估系统及其方法,通过准确预测管道连接单元的更换时间,并通过适当的维修工作或更换工作来处理由于流体泄漏造成的损坏 时间。 构成:管道连接单元的使用寿命评估系统包括麦克风单元,信号处理单元,检测单元和评估单元。 信号处理单元接收从麦克风单元输出的声信号,并通过将声信号放大到对应于泄漏声的信号来处理声信号。 检测单元将从信号处理单元输出的对应于泄漏声音的信号变更为频域中的波形,检测泄漏声音的频率内容和摆动,并将检测到的频率内容和摆动作为 频率信息。 所述评估单元基于根据至少一个所述频率信息的相关性预定的相关图来对应于包括在所述频率信息中的所述频率含量和所述频率摆动之间的至少相应的一个,来评估所述管道连接单元的剩余寿命 在频率含量和频率摆动之间,管道连接单元的使用寿命。 (附图标记)(AA,CC,HH)幅度; (BB)时间; (DD,FF)频率; (EE,GG)使用寿命
    • 7. 发明授权
    • 감시 장치 및 그 방법
    • 监测装置及其方法
    • KR101265535B1
    • 2013-05-20
    • KR1020130002358
    • 2013-01-09
    • 주식회사 썬닉스
    • 김재민김재현이정호이상신박규성
    • G01N29/14G01N29/44
    • G01N29/14G01N29/46
    • PURPOSE: A monitoring device and a monitoring method are provided to extend the service time of an expensive wafer transfer robot and to improve productivity. CONSTITUTION: A monitoring device comprises a measuring unit(100), a control unit(300), a display unit(400), and a communication unit. The measuring unit is directly attached to a wafer transfer robot or installed adjacent to the robot and measures sound signals generated when the robot is moved. The control unit sorts a band of signals generated by the movement of the robot among the measured sound signals, removes noise signals included in the sorted sound signals, calculates the similarity with reference signals recorded in advance corresponding to the sound signals in which the noise signals are removed and a position where the sound signals are measured, and confirms whether the malfunction of components of the robot corresponding to the position where the sound signals are measured is existed or not based on the calculated similarity. [Reference numerals] (100) Measuring unit; (200) Storage unit; (300) Control unit; (400) Display unit; (500) Voice output unit
    • 目的:提供监控设备和监控方法,以延长昂贵的晶片传送机器人的使用时间并提高生产率。 构成:监视装置包括测量单元(100),控制单元(300),显示单元(400)和通信单元。 测量单元直接连接到晶片传送机器人或安装在机器人附近,并测量机器人移动时产生的声音信号。 控制单元对由测量声音信号中的机器人的运动产生的信号的频带进行分类,去除分类声音信号中包含的噪声信号,并根据预先记录的参考信号计算与噪声信号 并且确定测量声音信号的位置,并且基于所计算的相似度确认是否存在与测量声音信号的位置相对应的机器人的部件的故障。 (附图标记)(100)测量单元; (200)存储单元; (300)控制单元; (400)显示单元; (500)语音输出单元
    • 8. 发明授权
    • 소구경 배관을 위한 코팅장치 및 그에 따른 코팅방법
    • 用于小管的涂装装置及其涂装方法
    • KR101262956B1
    • 2013-05-09
    • KR1020120136574
    • 2012-11-28
    • 주식회사 썬닉스
    • 김재민김재현이정호이상신박규성김현호
    • B05B13/06F16L58/02
    • B05C3/02B05C11/00
    • PURPOSE: A coating apparatus for a small diameter pipe and a coating method thereof are provided to forcibly flow a coating fluid into a small diameter pipe with a small section, thereby facilitating the coating of the inner circumferential surface of the small diameter pipe. CONSTITUTION: A coating apparatus for a small diameter pipe includes a chamber(10), a small diameter pipe(20), and a flow module(30). The flow module is combined with a hollow of the small diameter pipe and let a coating fluid(15) flow into the hollow inside the chamber. The flow module comprises a fan unit and a guide. The fan unit let the coating fluid inside the chamber flow into the small diameter pipe. The guide guides the flow which is generated in the fan unit to the inside of the small diameter pipe.
    • 目的:提供一种用于小直径管的涂布装置及其涂布方法,以将涂布液强制地流动到具有小截面的小直径管中,从而有助于小直径管的内周面的涂覆。 构成:用于小直径管的涂布装置包括室(10),小直径管(20)和流动模块(30)。 流动模块与小直径管的中空部分结合,并使涂层流体(15)流入腔室内部的中空部分。 流量模块包括风扇单元和引导件。 风扇单元使室内的涂层流体流入小直径管道。 引导件将风扇单元中产生的流量引导到小直径管道的内部。