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    • 4. 发明公开
    • 기판 합착 장치
    • 基板连接装置
    • KR1020070093196A
    • 2007-09-18
    • KR1020060023013
    • 2006-03-13
    • 인베니아 주식회사
    • 황재석정동환
    • G02F1/1339
    • G02F1/1303G02F2001/133354H01L21/67011H01L2224/75102
    • A substrate bonding apparatus is provided to reduce time required to form vacuum necessary for substrate bonding by reducing a vacuum forming space necessary for the substrate bonding, thereby reducing process time required for the substrate bonding. A substrate bonding apparatus comprises the followings: a chamber; upper and lower plates(110,120) which are installed to relatively move as facing each other within the chamber; a sealant(230) which is formed along an edge of the upper and lower plates in order to form a seal space between the upper and lower plates; and vacuum forming units(160,200) connected to the seal space between the upper and lower plates. The substrate bonding apparatus further comprises a second vacuum forming unit connected with the inside of the chamber. The vacuum forming units are pumps for higher vacuum than the second vacuum forming unit.
    • 提供了一种基板接合装置,通过减少基板接合所需的真空形成空间来减少形成基板粘合所必需的真空所需的时间,从而减少基板接合所需的处理时间。 一种基板接合装置,包括:一个室; 上部和下部板(110,120),其安装成在所述腔室内相对地相对移动; 密封剂(230),其沿着所述上板和下板的边缘形成,以便在所述上板和下板之间形成密封空间; 以及连接到上板和下板之间的密封空间的真空成形单元(160,200)。 基板接合装置还包括与室内连接的第二真空成形单元。 真空成型单元是比第二真空成型单元更高真空的泵。
    • 5. 发明公开
    • 기판 합착기
    • 基板接合装置
    • KR1020070093195A
    • 2007-09-18
    • KR1020060023012
    • 2006-03-13
    • 인베니아 주식회사
    • 황재석정동환
    • G02F1/13
    • G02F1/1303B32B37/18B32B2457/202G02F2001/133354
    • A substrate bonding device is provided to enable a controller to uniformly maintain difference between pressure within a chamber unit and pressure of a suction hole, thereby uniformly sucking a substrate in an upper onto lower stage. A substrate bonding device comprises the followings: a chamber unit(110) having an internal space where bonding of a substrate is performed; upper and lower stages(120,121) which are installed within the chamber unit so as to face each other; a first vacuum unit for forming first pressure in a suction hole in order to suck the substrate; a second vacuum unit for forming the internal space of the chamber unit through second pressure; at least one pressure measuring sensor for sensing the second pressure; and a controller(300) for uniformly maintaining difference between the first and second pressures.
    • 提供了一种基板接合装置,使得控制器能够均匀地保持室单元内的压力和吸入孔的压力之间的差异,从而将上部的基板均匀地吸入下层。 基板接合装置包括:具有进行基板的接合的内部空间的室单元(110); 上部和下部台阶(120,121),其安装在所述室单元内以便彼此面对; 第一真空单元,用于在吸入孔中形成第一压力以吸引基板; 第二真空单元,用于通过第二压力形成所述室单元的内部空间; 用于感测第二压力的至少一个压力测量传感器; 以及用于均匀地保持第一和第二压力之间的差异的控制器(300)。
    • 6. 发明公开
    • 로딩/언로딩 장치
    • 装载/卸载装置
    • KR1020060131501A
    • 2006-12-20
    • KR1020050052002
    • 2005-06-16
    • 인베니아 주식회사
    • 이영종최준영정동환김필종
    • G02F1/13
    • G02F1/1303B65G49/061G02F1/1313
    • A loading/unloading apparatus is provided to reduce a manufacturing cost and provide an easy maintenance/repair by absorbing and fixing an upper substrate of upper and lower substrates introduced into a manufacturing apparatus of a flat display device using a string. A substrate receiving unit(140) is provided at an upper side within a manufacturing device of a flat display device, descends to a predetermined height, and supports an upper substrate by vacuum absorption. The substrate receiving unit includes a moving piece(142), strings(146), a plurality of string flexibility controllers(144), a vacuum lines(152), a plurality of absorption modules (154), a plurality of driving units(148), and a bellows(150). The moving piece is formed as a frame of a rectangular shape, and reciprocates in a vertical direction. The plurality of strings are arranged in a plurality of rows in a longitudinal direction of the moving piece. The plurality of string flexibility controllers fix both ends of the strings, and face each other at both sides of the strings. The vacuum line is connected between the facing string flexibility controllers at a lower side of the string, and communicates with an external vacuum pump to form a vacuum pressure therein. The plurality of absorption modules are arranged at each string, and communicate with the vacuum line in a fixed state to vacuum-absorb a substrate by the vacuum line. The plurality of driving units are coupled at a lower surface of the moving piece, and provide a driving force to collectively or partially move the moving piece in a vertical direction. The bellows are formed at an exposed edge region of the driving unit in a space where the moving piece and a ceiling within the manufacturing apparatus of the flat display device face each other.
    • 提供了一种装载/卸载装置,以减少制造成本,并通过吸收和固定引入到平板显示装置的制造装置中的上基板和下基板使用一根绳子来提供容易的维护/修理。 基板接收单元(140)设置在平面显示装置的制造装置的上侧,下降到预定高度,并通过真空吸附支撑上基板。 基板接收单元包括移动片(142),弦(146),多个弦乐灵控制器(144),真空线(152),多个吸收模块(154),多个驱动单元 )和波纹管(150)。 移动件形成为矩形框架,并且在垂直方向上往复运动。 多个弦沿移动片的长度方向排成多行。 多个弦乐器柔性控制器固定琴弦的两端,并且在弦的两侧相互面对。 真空管线连接在串的下侧的面对串柔性控制器之间,并与外部真空泵连通以在其中形成真空压力。 多个吸收模块被布置在每个串上,并且以固定状态与真空管线连通,以通过真空管线吸收基板。 多个驱动单元联接在移动件的下表面处,并提供在垂直方向上共同地或部分地移动移动件的驱动力。 波纹管在平面显示装置的制造装置内的移动片和天花板的空间中形成在驱动单元的露出边缘区域。