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    • 3. 发明公开
    • 표면 처리 장치
    • 表面处理装置
    • KR1020140027876A
    • 2014-03-07
    • KR1020130090624
    • 2013-07-31
    • 우에무라 고교 가부시키가이샤
    • 호타테루유키야마모토히사미츠우츠미마사유키이시자키타카히로
    • C23C18/16C23C18/31
    • B05C3/09B05B16/20B05C3/00B05C5/002B05C11/11B08B3/041C23C18/1619Y10T137/8593
    • The present invention is related to a surface treatment apparatus for simplifying and miniaturizing a surface treatment apparatus, improving the plating quality and reducing the plating solution amount. A bath unit (100) comprises a receiving portion (2) for receiving a processing solution (Q) which has moved along a plane-shaped work piece (10) and falls down; a solution detention unit (4) for detaining the processing solution (Q) to be applied to the plane-shaped work piece (10); and a solution discharge unit (6) for discharging the processing solution (Q) overflowing from the solution detention unit (4) toward the plane-shaped work piece (10). The solution discharge unit (6) is configured by projecting the front end (6a) from the connection part (5) to the side wall (4a) of the solution detention unit (4) (or the side wall (2a) of the solution receiving portion (2)).
    • 本发明涉及一种表面处理装置,用于简化和小型化表面处理装置,提高电镀质量并减少电镀液量。 洗澡单元(100)包括:接收部(2),用于接收沿着平面状工件(10)移动并落下的处理液(Q); 用于扣留要施加到所述平面状工件(10)上的处理液(Q)的解决方案滞留单元(4)。 以及用于将从溶液滞留单元(4)溢出的处理溶液(Q)朝向平面状工件(10)排出的溶液排出单元(6)。 溶液排出单元(6)通过将前端(6a)从连接部(5)突出到溶液滞留单元(4)的侧壁(4a)或溶液的侧壁(2a) 接收部分(2))。
    • 4. 发明公开
    • 전해 재생 처리 장치
    • 电解再生处理装置
    • KR1020120042639A
    • 2012-05-03
    • KR1020110085725
    • 2011-08-26
    • 우에무라 고교 가부시키가이샤
    • 사이조요시카즈야마모토히사미츠이시자키타카히로
    • H05K3/26B08B3/10H05K3/08
    • C25B1/28C25B15/08H05K3/0055
    • PURPOSE: An electrolytic regeneration processing device is provided to control the generation of fault including poor quality of processing liquid by controlling the rising of temperature of the processing liquid. CONSTITUTION: A regeneration processing part(19) comprises a cylindrical form part(23) having an inner circumferential face functioning as an anode. The regeneration processing part comprises a cathode which is arranged within the cylindrical form part and is extended according to an extension direction of the cylindrical form part while being separated from the inner circumferential face. Processing liquid which is used for de-smear treatment is transmitted through a gap of the cathode and the inner circumferential face of the cylindrical form part. The processing liquid discharged from a de-smear treatment tub is induced to the regeneration processing part. The processing liquid discharged from the regeneration processing part is induced to the de-smear treatment tub.
    • 目的:提供一种电解再生处理装置,通过控制处理液的温度升高来控制处理液质量差的故障的产生。 构成:再生处理部件(19)包括具有作为阳极的内周面的圆筒形部件(23)。 再生处理部包括阴极,该阴极配置在圆筒形部分内,并且在与内周面分离的同时根据圆筒形部分的延伸方向延伸。 用于去污处理的处理液通过阴极和圆筒形部分的内圆周面的间隙传递。 从脱模处理槽排出的处理液被诱导到再生处理部。 从再生处理部排出的处理液被诱导到去污处理槽。