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    • 1. 发明公开
    • 전기화학적 산화를 이용한 고경도, 취성 재료의 기계적 가공장치 및 방법
    • 电化学氧化辅助机械加工设备及工艺
    • KR1020130078510A
    • 2013-07-10
    • KR1020110147496
    • 2011-12-30
    • 연세대학교 산학협력단
    • 민병권이원균장경인이상조
    • C25F3/16B24B7/22
    • B24B7/242C25D17/00C25F3/16C25F7/00
    • PURPOSE: An apparatus for mechanically processing a high hardness and softness material using the electrochemical oxidation and a method therefor are provided to oxidize and emulsify the surface of material by using the electrochemical oxidation by the electrolysis by applying an electric field between the process material and the counter electrode in the electrolyte, and to mechanically process the surface of material. CONSTITUTION: A method for mechanically processing a high hardness and softness material using the electrochemical oxidation comprises the following steps. The surface of material is mechanically processed by using a tool (150) while the surface of material is oxidized and emulsified by the electrochemical oxidation by the electrolysis by applying an electric field between a high hardness and softness material, which is a process object (102), and electrode in the electrolyte. In the process of the material using the electrochemical oxidation, the location of Z axis direction of tool is controlled in real time so that the critical process force does not exceed, such that the material is processed to have even depth without the surface shape of material. [Reference numerals] (112) Potentiostat; (160) Controller; (170) Motordrives
    • 目的:提供一种使用电化学氧化机械处理高硬度和柔软材料的设备及其方法,用于通过在处理材料和处理材料之间施加电场而通过电解使用电化学氧化来氧化和乳化材料的表面 电解液中的对电极,并对材料的表面进行机械处理。 构成:使用电化学氧化机械加工高硬度和柔软性材料的方法包括以下步骤。 通过使用工具(150)对材料的表面进行机械加工,同时通过在作为加工对象(102)的高硬度和柔软性材料之间施加电场,通过电解进行电化学氧化来氧化和乳化材料的表面 )和电极中的电极。 在使用电化学氧化的材料的过程中,实时控制刀具的Z轴方向的位置,使得临界加工力不超过,使得材料被加工成具有均匀的深度而没有材料的表面形状 。 (112)恒电位仪 (160)控制器; (170)Motordrives
    • 2. 发明公开
    • 자기유변유체를 이용한 3차원 롤 금형 연마장치 및 방법
    • 使用流纹流体的磨损装置和辊模的方法
    • KR1020120061203A
    • 2012-06-13
    • KR1020100122400
    • 2010-12-03
    • 연세대학교 산학협력단
    • 민병권이상조장경인김두연
    • B24B37/00B24B5/04B24B57/00
    • B24B37/02B24B5/37B24B9/04B24B37/11B24B37/34B24B41/06B24B47/02B24B55/12
    • PURPOSE: A grinding apparatus for a three-dimensional roll mold using magneto-rheological fluid and a method thereof are provided to effectively remove burr on the surface of workpieces by using working fluid generated by mixing nonmagnetic abrasives or/and chemical abrasives into magneto-rheological fluid. CONSTITUTION: A grinding apparatus for a three-dimensional roll mold using magneto-rheological fluid comprises a stage(10), a grinding device, and a working fluid feeding unit(30). The stage comprises a base(12). A workpiece(1) is rotatably installed in the stage. The grinding device comprises an electromagnet and is mounted on the base adjacently to the workpiece mounted on the stage. The grinding device generates a magnetic filed by external power. The working fluid feeding unit supplies working fluid between the grinding device and the workpiece. The working fluid contains magneto-rheological fluid.
    • 目的:提供一种用于使用磁流变流体的三维辊模的研磨装置及其方法,其通过使用通过将非磁性研磨剂或/和化学研磨剂混合到磁流变学中而产生的工作流体来有效地去除工件表面上的毛刺 流体。 构成:用于使用磁流变流体的三维辊模的研磨装置包括工作台(10),研磨装置和工作流体供给单元(30)。 舞台包括底座(12)。 工件(1)可旋转地安装在工作台中。 研磨装置包括电磁体,并且安装在基座上,与安装在平台上的工件相邻。 研磨装置通过外部电力产生磁场。 工作流体供给单元在研磨装置和工件之间提供工作流体。 工作流体包含磁流变流体。
    • 7. 发明公开
    • 자기유변유체를 이용한 피가공물의 연마장치 및 그 연마방법
    • 使用磁流变液体抛光工件的装置和方法)
    • KR1020110136206A
    • 2011-12-21
    • KR1020100056056
    • 2010-06-14
    • 연세대학교 산학협력단
    • 이상조민병권장경인이승호
    • B24B31/112B24B5/00
    • B24B31/112B24B5/00
    • PURPOSE: A workpiece grinding device, using magnetorheological fluid, and a grinding method thereof are provided to flatly grind a surface of a three-dimensional structure without a curved part. CONSTITUTION: A workpiece grinding device comprises an electromagnet(110), magnetorheological fluid, a slip ring(150), and a power supply device(160). A processing window(W) for processing workpiece is formed between N-pole and S-pole of an electromagnet. The electromagnet is magnetized with the current applied in a coil(120) in order to form parallel lines of magnetic force between north and south poles. The magnetorheological fluid is located between N pole and S pole of the electromagnet. The magnetorheological fluid is rotated with the magnetized electromagnet and grinds the surface of workpiece. The slip ring supplies current to a coil of the electromagnet.
    • 目的:提供使用磁流变流体的工件研磨装置及其研磨方法,以平坦地研磨没有弯曲部分的三维结构的表面。 构成:工件研磨装置包括电磁体(110),磁流变流体,滑环(150)和电源装置(160)。 在电磁体的N极和S极之间形成用于加工工件的加工窗口(W)。 电磁体被施加在线圈(120)中的电流磁化,以在北极和南极之间形成平行的磁力线。 磁流变流体位于电磁铁的N极和S极之间。 磁流变流体与磁化电磁铁一起旋转,研磨工件表面。 滑环向电磁铁的线圈提供电流。
    • 10. 发明公开
    • 다이아몬드-폴리머 복합패드의 제조방법, 다이아몬드-폴리머 복합패드를 이용한 실리콘 웨이퍼 연마방법 및 장치
    • 金刚石 - 高分子复合垫,其制造方法,使用由其制造的金刚石 - 高分子复合垫的硅晶片的抛光方法和装置
    • KR1020110045988A
    • 2011-05-04
    • KR1020090102776
    • 2009-10-28
    • 연세대학교 산학협력단
    • 이상조민병권석종원장경인
    • H01L21/304
    • PURPOSE: A diamond-polymer compound pad and manufacturing method thereof, and a silicon wafer polishing method and device thereof are provided to polish a silicon wafer, thereby accurately polishing the silicon wafer by reducing stress concentration on the silicon wafer. CONSTITUTION: A diamond-polymer dispersing object is generated by dispersing and mixing diamond particles with polymer particles. The diamond-polymer dispersing object is formed in a fixed shape to generate a diamond-polymer compound pad(113). A polishing groove(114) is formed on a side of the diamond-polymer compound pad so that the diamond-polymer compound pad is engaged with a silicon wafer(120). The section of the polishing groove has a shape corresponding to the section of the side of the silicon wafer.
    • 目的:提供一种金刚石 - 高分子复合衬垫及其制造方法以及硅晶片抛光方法及其装置,以抛光硅晶片,从而通过降低硅晶片上的应力集中度来精确地抛光硅晶片。 构成:通过将金刚石颗粒与聚合物颗粒分散和混合来产生金刚石聚合物分散体。 金刚石 - 聚合物分散体形成为固定形状以产生金刚石 - 高分子化合物垫(113)。 在金刚石 - 高分子复合垫的一侧上形成抛光槽(114),使得金刚石 - 高分子复合垫与硅晶片(120)接合。 抛光槽的截面具有对应于硅晶片侧面截面的形状。