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    • 1. 发明公开
    • 전자 부품 세정 방법 및 장치
    • 用于清洁电子元件以减少成本和能源的方法和装置
    • KR1020040060735A
    • 2004-07-06
    • KR1020030088972
    • 2003-12-09
    • 에이에스엠 어쌤블리 오토메이션 리미티드
    • 쳉치와웡위코막팀와이
    • H01L21/304
    • B08B3/12B08B3/123H01L21/481H01L21/67051
    • PURPOSE: A method and apparatus for cleaning electronic components are provided to reduce cost, water usage, and energy consumption in cleaning process of an electronic component. CONSTITUTION: A electronic components cleaning apparatus includes a tank(20) for containing a cleaning agent, an ultrasonic transducer(26A), a support flatform(14), and a cleaning agent supply system(28). The ultrasonic oscillator is implemented in communication with the cleaning agent so as to charge an ultrasonic energy in the cleaning agent. The support flatform supports the electronic component so that the component is in contact with a surface of the cleaning agent. The cleaning agent supply system generates a continuous vortex of the cleaning agent into the tank thereby the cleaning agent contacts the electronic component and performs cleaning the electronic component.
    • 目的:提供一种用于清洁电子部件的方法和设备,以减少电子部件清洁过程中的成本,用水量和能量消耗。 构成:电子元件清洁装置包括用于容纳清洁剂的容器(20),超声波换能器(26A),支撑平台(14)和清洁剂供给系统(28)。 超声波振荡器与清洗剂连通,以便在清洗剂中充入超声波能量。 支撑平板支撑电子部件,使得部件与清洁剂的表面接触。 清洁剂供给系统产生清洁剂到罐中的连续涡流,由此清洁剂与电子部件接触并执行清洁电子部件。