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    • 4. 发明公开
    • 테이프 연마기
    • 胶带抛光机
    • KR1020100060608A
    • 2010-06-07
    • KR1020080119267
    • 2008-11-28
    • 에스케이실트론 주식회사
    • 최창석최원구김근태
    • H01L21/302
    • PURPOSE: A tape polisher is provided to prevent damage to a tape polisher by stopping the operation of a winder and a driver when a driving force is not properly transferred to a winder. CONSTITUTION: Winders(231, 232) are formed into a disc shape is rotatable, and has a polisher tape wound on the circumference of the winder. A driving unit offers a driving force to rotate the winder. A winder detection sensor senses the rotational of the winder. The driving unit detection sensor senses the operation of the driving unit.
    • 目的:当驱动力未正确转移到卷绕机时,通过停止卷绕器和驱动器的操作,提供带式抛光机以防止损坏磁带抛光机。 构成:卷绕器(231,232)形成为可旋转的盘形,并且在卷绕机的圆周上具有卷绕带。 驱动单元提供旋转卷绕机的驱动力。 卷绕机检测传感器检测卷绕机的旋转。 驱动单元检测传感器感测驱动单元的操作。
    • 6. 发明公开
    • 웨이퍼 슬라이싱 장치
    • 装置摆放的装置
    • KR1020100036809A
    • 2010-04-08
    • KR1020080096198
    • 2008-09-30
    • 에스케이실트론 주식회사
    • 김성호김근태최원구
    • H01L21/301H01L21/78
    • B28D5/045B28D5/0082
    • PURPOSE: An apparatus for slicing a wafer is provided to prevent foreign materials from flowing through a gap between roller shafts and a spindle shaft by sealing the gap between the roller shafts and the spindle shaft. CONSTITUTION: The both ends of a plurality of roller shafts(22) are combined to a pair of support frames. A plurality of spindles(30) includes a spindle body(31), a spindle shaft(32) and a bearing(33). The spindle shaft is combined to the roller shafts and is inserted into the hollow part of the spindle body. The bearing is interposed between the spindle body and the spindle shaft and supports the spindle shaft to be rotatable. An o-ring is interposed between the roller shafts and the spindle shaft.
    • 目的:提供一种用于切片晶片的设备,以通过密封辊轴和主轴之间的间隙来防止异物流过辊轴和主轴之间的间隙。 构成:多个辊轴(22)的两端组合成一对支撑框架。 多个主轴(30)包括主轴主体(31),主轴(32)和轴承(33)。 主轴与滚子轴组合,插入主轴主体的中空部分。 轴承插入在主轴主体和主轴之间,并支撑主轴可转动。 O形圈插入辊轴和主轴之间。