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1. 发明公开

KR1020080011633A 척장치 有权
标题翻译： CHUCK装置
公开(公告)号：KR1020080011633A
公开(公告)日：2008-02-05
申请号：KR1020070077006
申请日：2007-07-31
申请人： 에스엠씨 가부시키 가이샤
发明人： 토미타세이지 , 소토메모토히로
IPC分类号： H01L21/687
CPC分类号： B23B31/16004 , B23B31/1622 , B23B2260/004 , B23B2260/062 , B25B1/08 , B25B1/18 , B25J15/026 , B25J15/028 , B25J15/10 , Y10T279/1291 , Y10T279/17495 , Y10T279/1926 , Y10T279/1941 , Y10T279/27 , Y10T279/29
摘要： A chuck apparatus is provided to securely enable gripping of various types of workpieces by controlling a grip unit according to the type of the workpiece. A body(12) has a pair of ports(32,34) to which pressure fluid is supplied. A piston is capable of being displaced in an axial direction under the action of the pressure fluid supplied through the ports, installed in the body. A driving part(24) is rotated by an electrical signal, connected to the body. A grip unit(22) includes a pair of first grip parts(20a,20b) connected to the piston and a pair of second grip parts(93a,93b) capable of opening/closing under the action of the driving part. The first grip parts are capable of opening/closing under the displacement action of the piston. The second grip parts opens/closes in a direction almost perpendicular to the open/close direction of the first grip parts. A conversion unit(28) can be positioned between the driving part and the second grip parts, converting the rotation force of the driving part into a straight line motion of the second grip parts. The conversion unit includes a rotation shaft(84) rotated with the driving part, rotation members(120a) rotated with the rotation shaft, and guide grooves into which a coupling part(100) of the second grip parts is inserted. The rotation members have arc-type grooves(128a,128b) to which the coupling part is coupled. The guide grooves are installed in an almost horizontal direction with respect to the rotation shaft.
摘要翻译：提供一种卡盘装置，用于通过根据工件的类型控制夹持单元来牢固地夹持各种类型的工件。主体（12）具有供给压力流体的一对端口（32,34）。在通过安装在体内的端口供应的压力流体的作用下，活塞能够在轴向方向上移位。驱动部件（24）通过与主体连接的电信号旋转。夹持单元（22）包括连接到活塞的一对第一握持部分（20a，20b）和能够在驱动部分的作用下打开/关闭的一对第二抓握部分（93a，93b）。第一把持部件能够在活塞的位移作用下打开/关闭。第二夹持部沿与第一夹持部的开闭方向大致垂直的方向开闭。转换单元（28）可以位于驱动部分和第二把手部分之间，将驱动部分的旋转力转换成第二把持部分的直线运动。转换单元包括随着驱动部旋转的旋转轴（84），旋转轴旋转的旋转构件（120a）和插入第二把手部的联接部（100）的导向槽。旋转构件具有联接部分联接到其上的弧形槽（128a，128b）。引导槽相对于旋转轴安装在几乎水平的方向上。

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