专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

KR1020050109495A 상이한 개스 압력의 영역을 격리시키는 개스 게이트 失效
标题翻译：用于隔离不同气压区域的气门
公开(公告)号：KR1020050109495A
公开(公告)日：2005-11-21
申请号：KR1020057015210
申请日：2004-02-04
申请人： 에너지 컨버젼 디바이시즈, 아이엔씨.
发明人： 될러요하임 , 카넬라빈센트
IPC分类号： H01L21/02
CPC分类号： B01J3/02 , B01J19/22 , C23C14/562 , C23C14/564 , C23C16/545 , F16J15/3452
摘要： Disclosed herein is an improved gas gate for interconnecting regions of differing gaseous composition and/or pressure, more particularly between atmosphere and a vacuum. The gas gate includes a cylinder within a housing situated between the regions of differing gaseous pressure. A web of substrate material is adapted to move between the regions with at least one roller in the first region and at least one roller in the second region. The rollers are positioned to create sufficient tension as the web advances over the top peripheral portion of the cylinder between the two regions or under the bottom peripheral portion of the cylinder between the two regions. In an exemplary embodiment, the gas gate is characterized by the height of the passageway between the top plate of the housing and web of substrate advancing over the top peripheral portion of the cylinder and the height of the passageway between the bottom plate of the housing and the bottom peripheral portion of the cylinder. The flow rate of the gas therethrough provides for transonic flow of the gas between the cylinder inlets and at least one of the two interconnected regions, thereby effectively isolating one region, characterized by one composition and pressure, from another region, having a differing composition and/or pressure, by decreasing the mean-free-path length between collisions of diffusing species within the transonic flow region.
摘要翻译：本文公开了一种改进的气门，用于互连不同气体成分和/或压力的区域，更特别地在大气和真空之间。气门包括位于不同气体压力的区域之间的壳体内的气缸。衬底材料的网状物适于在第一区域中的至少一个辊和第二区域中的至少一个辊之间在区域之间移动。当纸幅在两个区域之间的两个区域之间或在圆筒的底部周边部分之间在两个区域之间前进到圆柱体的顶部周边部分时，辊被定位成产生足够的张力。在一个示例性实施例中，气门的特征在于壳体的顶板和衬套的腹板之间的通道高度高于气缸的顶部周边部分，并且在壳体的底板之间的通道的高度和气缸的底部周边部分。通过这些气体的流量提供气体在气缸入口和两个相互连接的区域中的至少一个之间的跨音速流动，从而有效地将一个区域（其特征在于一个组成和压力）从具有不同组成的另一个区域隔开， /或压力，通过减少跨音速流动区域内扩散物质的碰撞之间的平均自由程长度。

IPRDB

热门服务

关于我们

友情链接

联系方式