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    • 2. 发明公开
    • 코팅 시스템, 코팅 방법 및 코팅된 물품
    • 涂层系统和涂层方法,作为涂层制品
    • KR1020080042753A
    • 2008-05-15
    • KR1020070114462
    • 2007-11-09
    • 쇼오트 아게
    • 묄레크리스토프베비그라아스퀴퍼토마스
    • B05B12/02B05D3/14
    • C23C16/515C23C16/45512C23C16/45523C23C16/45591
    • A coating system, a coating method, and coated articles are provided to supply the proper amount of processing gas that does not contain impurities, for a layer system at right time. A coating system(1) for coating articles comprising plural alternating layers is composed of: a device for forming at least one reaction chamber(7) in which articles to be coated are aligned, or the reaction chamber together with the articles; a feeder for processing gas used during coating; a source of electromagnetic energy operated in a pulse type to ignite plasma in a reactor; and a controller for controlling the source to output electromagnetic energy pulse so that the source generates pulse type plasma in the reactor during a process. The controller controls the source so that the source outputs pulses separated from each other according to the time and generates plasma pulses with maintenance time length and pulse pause length. A pulse pause of a unit of millimeter second between two pulses close to each other is longer than a value of the following formula, Pmin[ms]=2.5+0.05*V, desirably Pmin[ms]=2.5+0.055*V. V indicates coating volume in the reaction chamber of a unit of millimeter. Pmin[ms] indicates maintenance time of a unit of millimeter.
    • 提供涂布系统,涂布方法和涂布制品,以在适当的时间为层系统提供适量的不含杂质的处理气体。 用于涂覆包含多个交替层的制品的涂布系统(1)由以下部件组成:用于形成至少一个反应室(7)的装置,其中待涂覆的物品对准,或者反应室与物品一起形成; 用于处理涂布过程中使用的气体的进料器; 以脉冲型操作的电磁能源,以在反应器中点燃等离子体; 以及控制器,用于控制源输出电磁能脉冲,使得源在过程期间在反应器中产生脉冲型等离子体。 控制器控制源,使得源根据时间彼此分离脉冲,并产生具有维持时间长度和脉冲暂停长度的等离子体脉冲。 在彼此接近的两个脉冲之间的毫秒级的脉冲间隔比以下公式的值长,Pmin [ms] = 2.5 + 0.05 * V,期望Pmin [ms] = 2.5 + 0.055 * V。 V表示反应室中的涂层体积,单位为毫米。 Pmin [ms]表示单位毫米的维护时间。