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    • 6. 发明公开
    • 나노입자를 이용한 저항성 메모리 및 그 제조 방법
    • 电阻记忆,包括纳米颗粒及其形成方法
    • KR1020090083094A
    • 2009-08-03
    • KR1020080009062
    • 2008-01-29
    • 삼성전자주식회사
    • 임은경정재관박주철백인규심현준조금석
    • H01L27/115B82Y10/00
    • H01L45/06B82Y10/00G11C13/0004H01L45/1233
    • A resistive memory including nanoparticle and formation method of the same are provided to control location and density of the conductive pathway changing the resistance of the dielectric layer by controlling the size, location and density of conductive nano particles. The resistivity memory comprises the switching element and storage cell. The storage cell is the lower electrode(110). The dielectric layer(120) including a plurality of conductivity nano particles(122) is formed on the lower electrode, and stores the information according to the change of the resistive state. The upper electrode(130) is formed on the dielectric layer. A plurality of conductivity nano particles is formed in an interface between the upper electrode and the dielectric layer and between the lower electrode and dielectric layer. The dielectric layer comprises the transition metal oxide. A plurality of conductivity nano particles has the size of 10Š ~ 200Š.
    • 提供包括纳米颗粒的电阻式存储器及其形成方法,以通过控制导电纳米颗粒的尺寸,位置和密度来控制导电通路的位置和密度来改变电介质层的电阻。 电阻率存储器包括开关元件和存储单元。 存储单元是下电极(110)。 在下电极上形成包含多个导电性纳米粒子(122)的电介质层(120),根据电阻状态的变化来存储信息。 上电极(130)形成在电介质层上。 在上电极和电介质层之间以及下电极和电介质层之间的界面中形成多个导电纳米颗粒。 电介质层包含过渡金属氧化物。 多种导电纳米颗粒的尺寸为10〜200μ。
    • 8. 发明公开
    • 폴리이미드 경화오븐
    • 聚酰亚胺烤箱
    • KR1020000024897A
    • 2000-05-06
    • KR1019980041696
    • 1998-10-02
    • 삼성전자주식회사
    • 이흥복정재관
    • H01L21/00
    • PURPOSE: A polyimide baking oven is provided to bake a polyimide uniformly even in a wafer having TPIX deviation by generating a deviation of a thermal distribution on a front of the wafer. CONSTITUTION: A polyimide baking oven is constituted with: a top heat plate(11) where a wafer is placed; a bottom heat plate(12) installed below the top heat plate; a heater holder(14) which applies heat to the bottom heat plate, being installed below the bottom heat plate; and a heater(13a,13b) which emits heat, being attached to the heater holder. The heater comprises a first heater and a second heater. A polyimide is baked by controlling the temperature in order for the temperature distribution to be nonuniform.
    • 目的:提供聚酰亚胺烘烤炉,通过产生晶片前面的热分布偏差,均匀地均匀地在具有TPIX偏差的晶片中均匀地烘烤聚酰亚胺。 构成:聚酰亚胺烘烤炉由:放置晶片的顶部加热板(11)构成; 安装在顶部加热板下方的底部加热板(12); 加热器保持器(14),其向底部加热板施加热量,安装在底部加热板的下方; 和发热的加热器(13a,13b),附着在加热器支架上。 加热器包括第一加热器和第二加热器。 通过控制温度来烘烤聚酰亚胺以使温度分布不均匀。