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    • 3. 发明公开
    • 가스 배기장치
    • 排气装置
    • KR1020090018506A
    • 2009-02-20
    • KR1020070082991
    • 2007-08-17
    • 삼성전자주식회사
    • 유진우김국윤배해수하종현
    • H01L21/02
    • A gas exhausting apparatus is provided to exhaust the air around a connector through an exhausting unit by forming a negative pressure inside an adapter. A gas exhausting apparatus includes an adapter(200) and an exhausting unit. An adapter surrounds a part of a gas supply line(140) and a connector(150). The adapter is composed of an upper adapter(210) and a lower adapter(220). The upper adapter and the lower adapter include a corresponding flange. The upper adapter and the lower adapter are combined by the flange. A fitting(230) is formed in one side of the upper adapter. The exhausting unit is connected to the adapter by the fitting. The exhausting unit includes a flexible pipe(251) and a vacuum unit. The flexible pip is connected to the fitting. The vacuum unit forms the negative pressure in the flexible pipe. A gap is formed between the adapter and the connector. The air passing through the gap with the gas around the connector is exhausted through the exhausting unit.
    • 提供排气装置,通过在适配器内形成负压,通过排气单元排出连接器周围的空气。 排气装置包括适配器(200)和排气单元。 适配器围绕气体供应管线(140)和连接器(150)的一部分。 适配器由上适配器(210)和下适配器(220)组成。 上适配器和下适配器包括相应的凸缘。 上部适配器和下部适配器由法兰组合。 在上适配器的一侧形成有配件(230)。 排气单元通过接头连接到适配器。 排气单元包括柔性管(251)和真空单元。 柔性点连接到配件上。 真空单元在柔性管中形成负压。 在适配器和连接器之间形成间隙。 通过连接器周围的气体与空气通过的空气通过排气单元排出。