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1. 发明公开

KR1020050049695A 스퍼터링 설비 및 방법 无效
标题翻译：溅射设备和方法
公开(公告)号：KR1020050049695A
公开(公告)日：2005-05-27
申请号：KR1020030083393
申请日：2003-11-22
申请人： 삼성전자주식회사
发明人： 한종우 , 조정온 , 김영주 , 이상일 , 김보현 , 박태찬
IPC分类号： C23C14/34
CPC分类号： H01J37/3479 , G05B19/128
摘要： 스퍼터링 설비 및 방법은 공정이 진행되는 공간을 갖으며 일측에 공정가스를 공급하는 가스공급관이 설치된 진공챔버와, 진공챔버의 하측에 설치되어 웨이퍼를 안착시키는 웨이퍼 척과, 진공챔버의 측벽을 커버하도록 설치되며 전류가 공급되어 애노드가 되는 쉴드와, 진공챔버의 상측에 설치된 타겟과, 타겟에 결합되며 전류가 공급되는 캐소드와, 쉴드와 상기 캐소드에 전류를 공급하는 전원 및 타겟의 소모정도를 측정하는 타겟소모측정기를 포함한다.

2. 发明公开

KR1020000039842A 정렬 노광 장치의 초점 흔들림 감지 회로 无效
标题翻译：传感器在步进过程中的重点感应电路
公开(公告)号：KR1020000039842A
公开(公告)日：2000-07-05
申请号：KR1019980055304
申请日：1998-12-16
申请人： 삼성전자주식회사
发明人： 권오현 , 김성일 , 이상훈 , 김보현
IPC分类号： H01L21/027
CPC分类号： G03F7/70483
摘要： PURPOSE: A circuit is provided to sense a misalignment of focus in a stepper and thereby to prevent inferiority of a semiconductor device. CONSTITUTION: A stepper which is a kind of an exposure equipment is for transcribing an image of a reticle into circuit pattern of a wafer placed on a wafer stage. In a sensing circuit(10), a first input terminal(11) receives a shutter driving pulse signal, and a second input terminal(12) receives a stage driving pulse signal. When the wafer is subjected to an exposure process, the shutter driving pulse signal is high and the stage driving pulse signal is low. Further, when the wafer stage is moved to align the wafer, the shutter signal is low and the stage signal is high. Accordingly, such normal pulse signals become a low signal via an AND gate(15). However, if the wafer stage is vibrated while the shutter is opened, a certain high signal is generated in the low stage driving pulse signal. Therefore, two pulse signals are all in high level, and an output signal of the AND gate(15) is also in high level, so that a display part(16) indicates a poor operation.
摘要翻译：目的：提供一种电路来感测步进器中的焦点偏移，从而防止半导体器件的劣化。构成：作为一种曝光设备的步进器，用于将掩模版的图像转印成放置在晶片台上的晶片的电路图案。在感测电路（10）中，第一输入端子（11）接收快门驱动脉冲信号，第二输入端子（12）接收载物台驱动脉冲信号。当晶片经受曝光处理时，快门驱动脉冲信号为高，并且级驱动脉冲信号为低。此外，当晶片载物台移动以对准晶片时，快门信号为低并且平台信号为高。因此，这种正常脉冲信号通过与门（15）变成低信号。然而，如果在快门打开时晶片台振动，则在低级驱动脉冲信号中产生一定的高信号。因此，两个脉冲信号都处于高电平，AND门（15）的输出信号也处于高电平，因此显示部分（16）指示操作不良。

3. 发明公开

KR1020050030364A 반도체 제조설비의 웨이퍼 고정척 无效
标题翻译：半导体制造设备的切割机
公开(公告)号：KR1020050030364A
公开(公告)日：2005-03-30
申请号：KR1020030066678
申请日：2003-09-25
申请人： 삼성전자주식회사
发明人： 김보현
IPC分类号： H01L21/68
摘要： A wafer fixing chuck of semiconductor manufacturing equipment is provided to prevent local focus failure by reducing contact surface between a wafer and the chuck using a wafer supporting part. A wafer fixing chuck(30) of semiconductor manufacturing equipment includes a circular chuck body(20), a plurality of wafer supporting parts and a suction portion. The plurality of wafer supporting parts(40) for supporting a predetermined wafer are protruded from the chuck body. The suction portion for adsorbing the predetermined wafer is formed within each wafer supporting part.
摘要翻译：提供半导体制造设备的晶片固定卡盘，以通过使用晶片支撑部件减小晶片和卡盘之间的接触面来防止局部聚焦故障。半导体制造设备的晶片固定卡盘（30）包括圆形卡盘体（20），多个晶片支撑部分和抽吸部分。用于支撑预定晶片的多个晶片支撑部件（40）从卡盘体突出。用于吸附预定晶片的吸引部分形成在每个晶片支撑部分内。

4. 实用新型

KR2020000014436U 모터 지지용 블록 无效
标题翻译：电机支撑块
公开(公告)号：KR2020000014436U
公开(公告)日：2000-07-25
申请号：KR2019980027742
申请日：1998-12-30
申请人： 삼성전자주식회사
发明人： 권오현 , 김보현
IPC分类号： H01L21/027
摘要： 본 고안은 모터 지지용 블록(Motor supporting block)에 관한 것으로, 더욱 구체적으로는 노광장치(Stepper)의 웨이퍼 공급부 몸체(Wafer loader housing) 내부에 설치되어 있는 모터를 웨이퍼 공급부 몸체 외부에 설치할 수 있도록 함으로써 모터에 대한 정비를 손쉽게 하기 위한 모터 지지용 블록에 관한 것이며, 이를 위하여 웨이퍼 공급부 몸체 내부에서 고정되는 수평블록과 웨이퍼 공급부 몸체 외부에서 수평블록에 결합되는 수직블록 및 모터와 가이드 사이를 연결하는 커플링 블록을 포함하는 모터 지지용 블록의 구조를 개시하고, 수평블록과 수직블록에 각각 장홈들이 형성된 구조를 개시하며, 이러한 구조들을 통하여 모터가 웨이퍼 공급부 몸체의 외부에서 돌출 되어 고정됨으로써 소모품인 모터가 교체될 때 모터를 분리하기 위하여 웨이퍼 공급부 몸체를 분 해하는 등의 작업자의 과도한 작업량을 줄일 수 있고, 모터가 각 장홈들의 길이 범위 내에서 자유도를 가지고 설치됨으로써 모터와 가이드가 어긋남을 쉽게 보정할 수 있다.

5. 发明公开

KR1020000025699A 무한 루프를 이용한 다중 처리 방법 无效
标题翻译：使用无限循环的多处理方法
公开(公告)号：KR1020000025699A
公开(公告)日：2000-05-06
申请号：KR1019980042863
申请日：1998-10-13
申请人： 삼성전자주식회사
发明人： 김보현
IPC分类号： G06F11/30
摘要： PURPOSE: A multi processing method using the infinite loop is provided to be applied to a variety of programs without being limited to a certain module. CONSTITUTION: A multi processing method using the infinite loop comprises a step of starting the operation of the infinite loop(201); a step of carrying out the command word(203); a step of finishing the operation of the command word(205). The method further comprises a step of delaying the process for a certain time period and a step of repeating the above steps to complete the whole procedure. The delay of time carries out the function of reducing occupancy ratio of the multi processor.
摘要翻译：目的：使用无限循环的多处理方法被应用于各种程序，而不限于某个模块。构成：使用无限循环的多处理方法包括启动无限循环（201）的操作的步骤; 执行命令字（203）的一个步骤; 完成命令字（205）的操作的步骤。该方法还包括将处理延迟一段时间的步骤和重复上述步骤以完成整个过程的步骤。时间延迟实现了降低多处理器占用率的功能。

6. 发明公开

KR1019970078790A 플랫 케이블 장착 받침대 无效
标题翻译：扁平电缆安装支架
公开(公告)号：KR1019970078790A
公开(公告)日：1997-12-12
申请号：KR1019960015551
申请日：1996-05-11
申请人： 삼성전자주식회사
发明人： 김보현 , 이상훈
IPC分类号： H05K5/02

7. 发明公开

KR1020080086100A 밀폐형 압축기 失效
标题翻译： HERMETIC型压缩机
公开(公告)号：KR1020080086100A
公开(公告)日：2008-09-25
申请号：KR1020070027787
申请日：2007-03-21
申请人： 삼성전자주식회사
发明人： 김보현
IPC分类号： F04B39/00
摘要： A hermetic compressor is provided to guide the refrigerant which is guided into a hermetic container to a suction muffler directly by fixing a guiding member which is made of rubber between an inlet of the muffler and a fixed member, thereby preventing the guiding member from deviating. A guiding member(60), which is made of rubber, is connected to an inlet(52). A flange part(61) is formed at one end of the guiding member to increase a contact area with an inner surface of a closed container. An insertion part(62), which is inserted in the inlet, is formed at the other end of the guiding member. The insertion part is arranged through a plurality of insertion ribs(62a-62d) which are mutually separated. Each rib extends toward the inlet while curved enough to contact the inlet. The front end of a body part is formed with a support part(64) supported by an outer peripheral surface of the inlet. The guiding member is fixed between the inlet and a fixed member(70). The fixed member includes a body(71) and a plurality of extended parts(72) which extend toward the inlet. The body has a refrigerant flowing hole(71a) and is supported by an inner surface through first catching parts(71b). Second catching parts(72a) are arranged at the rear ends of the extended parts. Guide projections(73) are arranged at the upper center of the body.
摘要翻译：提供一种封闭式压缩机，通过将由橡胶制成的引导构件固定在消声器的入口与固定构件之间，将被引导到密封容器中的制冷剂引导到吸入消声器，从而防止引导构件偏离。由橡胶制成的引导构件（60）连接到入口（52）。凸缘部分（61）形成在引导构件的一端，以增加与密封容器的内表面的接触面积。插入在入口中的插入部分62形成在引导构件的另一端。插入部分通过相互分离的多个插入肋（62a-62d）布置。每个肋朝向入口延伸，同时足够弯曲以接触入口。主体部分的前端形成有由入口的外周表面支撑的支撑部分（64）。引导构件固定在入口和固定构件（70）之间。固定构件包括主体（71）和朝向入口延伸的多个延伸部分（72）。主体具有制冷剂流通孔（71a），并且通过第一捕获部件（71b）由内表面支撑。第二抓钩部件（72a）布置在延伸部分的后端。引导突起（73）布置在身体的上部中心。

8. 发明公开

KR1020000043447A 레이저 광축보정 장치 无效
标题翻译：激光束轴补偿装置
公开(公告)号：KR1020000043447A
公开(公告)日：2000-07-15
申请号：KR1019980059826
申请日：1998-12-29
申请人： 삼성전자주식회사
发明人： 정인순 , 이상훈 , 김보현 , 이형우
IPC分类号： H01S3/10
摘要： PURPOSE: A laser beam axis compensating apparatus is provided to extend the life span of facilities and to reduce the product cost by automatically replacing with a new laser source with the detection of the beam amount. CONSTITUTION: A support(11) supports a laser source(11) to slant the laser source(11) at a certain angle by a deviation between a laser beam axis and a reference position in order to compensate the dislocation of the laser beam axis. A reflecting mirror(15) changes a laser beam path. A laser beam is finally focused on a reference marker(17). A laser beam reflected through the reflecting mirror(15) is irradiated on the reference marker(17) to measure the deviation from a position set as a reference. The support(13) automatically moves by the deviation to change the slant of the laser source(11).
摘要翻译：目的：提供激光束轴补偿装置，延长设备的使用寿命，并通过检测光束量自动更换新的激光源，降低产品成本。构成：支撑件（11）支撑激光源（11）以通过激光束轴线和参考位置之间的偏差以一定角度倾斜激光源（11），以补偿激光束轴线的位错。反射镜（15）改变激光束路径。激光束最终聚焦在参考标记（17）上。通过反射镜（15）反射的激光束被照射在基准标记（17）上，以测量与设定为基准的位置的偏差。支撑件（13）自动移动偏移以改变激光源（11）的倾斜。

9. 发明授权

KR101263432B1 밀폐형 압축기 失效
标题翻译：密封式压缩机
公开(公告)号：KR101263432B1
公开(公告)日：2013-05-10
申请号：KR1020070027787
申请日：2007-03-21
申请人： 삼성전자주식회사
发明人： 김보현
IPC分类号： F04B39/00
摘要： 이를위해본 발명에따른밀폐형압축기는밀폐용기와. 외부의냉매를상기밀폐용기내부로안내하도록상기밀폐용기에결합된흡입관과, 상기밀폐용기내부로안내된냉매를압축하도록마련된압축유닛과, 상기압축유닛으로흡입되는냉매의유동소음을저감시키도록상기압축유닛에연결되는흡입머플러와, 상기흡입관을통해상기밀폐용기내부로안내된냉매를상기흡입머플러내부로직접안내하기위해고무재질로형성되고양단이개방된중공의통형상으로마련되어일단내주가상기흡입관의출구쪽 상기밀폐용기내면을덮게되고타단을통해상기흡입머플러의입구에연결되는안내부재를구비하되, 상기안내부재에는상기흡입머플러의입구와의사이에상기안내부재를고정시키도록마련된고정부재가삽입되고, 상기고정부재는상기입구바깥쪽 상기안내부재내면에걸려지지되는제1걸림부와, 상기입구안쪽흡입머플러의내면에걸려지지되는제2걸림부를포함하여구성된다.
摘要翻译：为此，根据本发明的封闭式压缩机包括密封容器。以便减少吸入管的流动噪声，并且与压缩单元，用于压缩制冷剂引导到密闭容器中，制冷剂吸入到压缩单元，耦合到所述密封容器，以便引导所述外部制冷剂向密闭容器并且形成联接到所述压缩机单元，通过吸入管的吸入消音器的制冷剂引导到橡胶材料的密闭容器中，以便直接引导到所述开口的中空端内的两端的管状形状提供的吸入消声器的内部固定在吸入管出口侧盖的上述密闭容器内表面上的入口和之间，而是通过设置有被连接到吸入消音器的入口的引导部件的另一端，所述引导部件具有设置于固定导向部件吸入消音器构件被插入时，固定构件被悬挂在第一卡合部的内表面上被支撑挂在入口外的入口的引导部件的内表面到所述吸入消音器的内部它被配置为包括第二接合部是没有的。

10. 发明公开

KR1020080022249A 밀폐형 압축기 无效
标题翻译： HERMETIC型压缩机
公开(公告)号：KR1020080022249A
公开(公告)日：2008-03-11
申请号：KR1020060085424
申请日：2006-09-06
申请人： 삼성전자주식회사
发明人： 김보현
IPC分类号： F04B39/00 , F04B53/00 , F04B53/20
摘要： A hermetic type compressor is provided to facilitate flow of refrigerant while filtering foreign substances through a suction port made of a plurality of minute holes that are densely disposed. A hermetic type compressor comprises a suction muffler reducing pressure pulsation of refrigerant transferred into a hermetic vessel and guiding it to a compression chamber. The suction muffler has a suction port(60) on its one side with a plurality of minute holes(61) that are densely disposed penetrating a sidewall of the suction muffler to perform filtering of foreign substances and allow refrigerant to flow in therethrough. The minute holes are formed by punching.
摘要翻译：设置密封型压缩机以便于通过密集设置的多个微孔构成的吸入口过滤异物而使制冷剂流动。密封式压缩机包括吸入消声器，其减少转移到密封容器中并将其引导到压缩室的制冷剂的压力脉动。吸气消声器在其一侧具有吸入口（60），其具有多个微小孔（61），其密集地穿过吸入消声器的侧壁以进行异物过滤并允许制冷剂流入其中。小孔通过冲孔形成。

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