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    • 10. 发明授权
    • 광 스위치
    • 광스위치
    • KR100401104B1
    • 2003-10-10
    • KR1020010077186
    • 2001-12-07
    • 삼성전기주식회사
    • 홍윤식강준석윤상기정성천이정현이현기
    • G02B26/00
    • G02B6/358B81B3/0054B81B2201/045B81B2203/053G02B6/3514G02B6/3546G02B6/357G02B6/3584G02B26/0841H02N1/006
    • Disclosed herein is an optical switch. The optical switch includes an electrostatic actuator and a substrate. The electrostatic actuator includes an electrostatic actuator, the electrostatic actuator comprising, a reciprocating mass located in the center of the electrostatic actuator, first rotating axes located symmetrically at the left and right sides of the reciprocating mass, first rotating masses rotatably connected to the first rotating axes, first rotating springs for supporting the first rotating masses, linear springs connected to the first rotating masses, second rotating masses connected to the linear springs, second rotating springs for supporting the second rotating masses, second rotating axes connected to the second rotating masses, structural anchors at the side ends of the actuator, drive electrodes, and a micro mirror movable by the same displacement as the reciprocating mass.
    • 这里公开了一种光学开关。 光开关包括静电致动器和基板。 所述静电致动器包括静电致动器,所述静电致动器包括位于所述静电致动器的中心的往复运动质量块,所述往复运动质量块的左侧和右侧对称地定位的第一旋转轴,可旋转地连接至所述第一旋转件的第一旋转质量块, 用于支撑第一旋转质量的第一旋转弹簧,连接到第一旋转质量的线性弹簧,连接到线性弹簧的第二旋转质量,用于支撑第二旋转质量的第二旋转弹簧,连接到第二旋转质量的第二旋转轴, 位于致动器侧端的结构锚定件,驱动电极以及可通过与往复运动质量相同位移移动的微镜。