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    • 6. 发明公开
    • 증착설비 및 이를 이용한 박막 증착방법
    • 沉积装置和使用其沉积薄层的方法
    • KR1020140062565A
    • 2014-05-26
    • KR1020120127687
    • 2012-11-12
    • 삼성디스플레이 주식회사
    • 임자현전병훈이관희
    • C23C14/24
    • C23C14/24B05D1/02B05D1/36
    • A deposition apparatus includes: a deposition chamber; a deposition source of a first group; and a deposition source of the second group. The deposition chamber includes: a first standby zone; a deposition zone; and a second standby zone. The deposition zone can be arranged between the first standby zone and the second standby zone. The deposition source of the first group can be moved to the deposition zone from the first standby zone, and provides the deposition source of the first group to a base member arranged on the deposition zone. The deposition source of the second group can be moved to the deposition zone from the second standby zone, and provides the deposition source of the second group to a base member arranged on the deposition zone.
    • 沉积设备包括:沉积室; 第一组的沉积源; 和第二组的沉积源。 沉积室包括:第一备用区; 沉积区; 和第二备用区。 沉积区可以布置在第一备用区和第二备用区之间。 第一组的沉积源可以从第一备用区移动到沉积区,并且将第一组的沉积源提供到布置在沉积区上的基底构件。 第二组的沉积源可以从第二备用区移动到沉积区,并将第二组的沉积源提供到布置在沉积区上的基底构件。
    • 8. 发明公开
    • 디스플레이 패널의 테스트 모듈
    • 显示面板的测试模块
    • KR1020140045196A
    • 2014-04-16
    • KR1020120111426
    • 2012-10-08
    • 삼성디스플레이 주식회사
    • 성태광임자현
    • G01R31/01
    • Disclosed is a test module for a display panel. The disclosed test module for the display panel includes a module body on which the display panel to be test is mounted and a heat blocking member mounted between the module body and the display panel to block heat to be diffused to the display panel from the module body. If using the test module of the configuration, the present invention can significantly reduce the risk of a light emitting device of the display panel damaged by heat during the test, thus guarantee the reliability of the test and also reduce the production of defective products.
    • 公开了一种用于显示面板的测试模块。 所公开的用于显示面板的测试模块包括:待安装显示面板的模块主体;以及安装在模块体和显示面板之间的隔热构件,以阻挡从模块主体扩散到显示面板的热量 。 如果使用该配置的测试模块,则本发明可以显着降低在测试期间受热损坏的显示面板的发光装置的风险,从而保证测试的可靠性并且还减少缺陷产品的生产。
    • 9. 发明公开
    • 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법
    • 用于制造有机发光二极管显示器的沉积装置和方法
    • KR1020130141188A
    • 2013-12-26
    • KR1020120064403
    • 2012-06-15
    • 삼성디스플레이 주식회사
    • 임자현전병훈
    • H01L51/56C23C14/24
    • B05C5/00C23C14/044C23C14/12C23C14/24H05B33/10
    • A depositing apparatus according to the present invention includes: a deposition source which discharges deposition materials; and an angle limiting member which limits the discharge direction angle of the deposition material. The angle limiting member includes a housing which includes an inner space which is opened in the discharge direction of the deposition material and a sliding member which moves backward and forward in the discharge direction of the deposition material along the inner space. Wherein, one end of the sliding member is inserted into the inner space and the other end thereof is arranged on the discharge path of the deposition material. The thickness of a thin film is uniformly formed according to the embodiments of the present invention. Also, the uniform thin film is formed by correcting a deposition angle even though the deposition angle is changed according as processing time increases. Also, the brightness uniformity of each pixel is improved by uniformly depositing an organic thin film on each pixel of an organic light emitting display device.
    • 根据本发明的沉积设备包括:放电沉积材料的沉积源; 以及限制沉积材料的排出方向角度的角度限制构件。 角度限制部件包括壳体,该壳体包括沿着沉积材料的排出方向打开的内部空间和沿着内部空间在沉积材料的排出方向上向前和向前移动的滑动构件。 其中,滑动构件的一端插入内部空间中,另一端设置在沉积材料的排出路径上。 根据本发明的实施例,薄膜的厚度均匀地形成。 此外,即使随着处理时间增加而改变沉积角度,也可以通过校正沉积角来形成均匀的薄膜。 此外,通过在有机发光显示装置的每个像素上均匀沉积有机薄膜来提高每个像素的亮度均匀性。