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    • 4. 发明公开
    • MAX 상 박막의 제조방법
    • 最大相薄膜制造方法
    • KR1020140090754A
    • 2014-07-18
    • KR1020130002743
    • 2013-01-10
    • 부산대학교 산학협력단
    • 강명창김광호허재영성진우
    • C23C14/34
    • C23C14/0641C23C14/3471C23C14/3485C23C14/5806
    • The present invention relates to a Ti2AIN MAX phase thin film and provides a method to manufacture a crystalline thin film directly from an amorphous Ti2AIN MAX thin film while depositing the thin film at relatively low temperatures, which is different from a conventional technology crystallizing by treating the amorphous Ti2AIN MAX thin film, which is formed by sputtering, with post heat at 800°C. According to the present invention, the method provides a wide choice of base materials since the method is capable of manufacturing an excellent crystalline thin film at the relatively low temperature of 400-500°C by manufacturing and using a Ti2AIN target, and ionizing metal particles escaping from the target by using plasma discharged by supplying impulse voltage, thereby extending the limit of application of the Ti2AIN MAX phase thin film.
    • 本发明涉及Ti2AIN MAX相薄膜,并且提供了一种从非晶Ti2AIN MAX薄膜直接制造晶体薄膜的方法,同时在相对低的温度下沉积薄膜,这与传统技术结晶不同, 非晶Ti2AIN MAX薄膜,其通过溅射形成,在800℃下后热。 根据本发明,该方法提供了广泛的基材选择,因为该方法能够通过制造和使用Ti2AIN靶而在400-500℃的较低温度下制造优异的结晶薄膜,并且电离金属颗粒 通过使用通过提供脉冲电压的等离子体放电,从目标逃逸,从而延长了Ti2AIN MAX相薄膜的应用极限。