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1. 发明公开

KR1020070063355A 금속 세정용 조성물 无效
标题翻译：用于清洁金属的组合物
公开(公告)号：KR1020070063355A
公开(公告)日：2007-06-19
申请号：KR1020050123489
申请日：2005-12-14
申请人： 동우 화인켐 주식회사
发明人： 송선영 , 이혁진 , 마사유키타카시마
IPC分类号： C23G1/00 , C23G5/00
CPC分类号： C23G1/14 , C23G1/19
摘要： A composition for cleaning a metal to which an Si-containing inorganic compound is adhered without corroding the metal is provided. As a metal cleaning composition used to remove an Si-containing inorganic compound on a metal, a metal cleaning composition comprises 0.1 to 80 wt.% of an alkaline compound and the balance of water. The alkaline compound is selected from the group consisting of KOH, NaOH, TMAH(tetramethyl ammonium hydroxide), carbide, phosphate, ammonia, amine, and mixtures thereof. The metal cleaning composition further comprises 0.001 to 10 wt.% of a surfactant based on the total weight of the metal cleaning composition. The surfactant is a cationic surfactant, a nonionic surfactant, a fluorine-based surfactant, or mixtures thereof. The Si-containing inorganic compound is an inorganic insulation film formed from SiO2, SiNx, or SiON. The metal is selected from the group consisting of stainless steel, Ni simple substance, Fe-Ni alloy, Cu, and silicon.
摘要翻译：提供了一种用于清洁附着有含Si无机化合物而不腐蚀金属的金属的组合物。作为用于除去金属上含Si的无机化合物的金属清洗组合物，金属清洗组合物含有0.1-80重量％的碱性化合物和余量的水。碱性化合物选自KOH，NaOH，TMAH（四甲基氢氧化铵），碳化物，磷酸盐，氨，胺及其混合物。金属清洁组合物还包含0.001至10重量％的表面活性剂，基于金属清洁组合物的总重量。表面活性剂是阳离子表面活性剂，非离子表面活性剂，氟基表面活性剂或其混合物。含Si的无机化合物是由SiO 2，SiN x或SiON形成的无机绝缘膜。金属选自不锈钢，Ni单体，Fe-Ni合金，Cu和硅。

2. 发明公开

KR1020070101971A 금속용 세정제 有权
标题翻译：金属清洁剂
公开(公告)号：KR1020070101971A
公开(公告)日：2007-10-18
申请号：KR1020060033503
申请日：2006-04-13
申请人： 동우 화인켐 주식회사
发明人： 송선영 , 마사유키타카시마
IPC分类号： C11D3/02 , C11D3/00 , C11D1/02 , C11D11/00
CPC分类号： C11D3/02 , C11D1/02 , C11D3/0073 , C11D11/0029
摘要： A cleaner for metals is provided to remove the oxide layer and/or nitride layer deposed on a substrate without the corrosion of metals and the deformation or twisting of metals at a room temperature. A cleaner for metals comprises 0.1-5 wt% of a compound containing a fluorine atom; 0.01-2 wt% of an anticorrosive; and the balance of water. Preferably the compound containing a fluorine atom is selected from the group consisting of hydrogen fluoride, perfluoric acid, ammonium fluoride, tetramethylammonium fluoride, ammonium bifluoride, diethylene triammonium trifluoride and their mixture; and the anticorrosive is selected from the group consisting of a phosphate-based chelating agent, an anticorrosive surfactant and their mixture.
摘要翻译：提供用于金属的清洁剂以去除沉积在基底上的氧化物层和/或氮化物层，而不会有金属的腐蚀和金属在室温下的变形或扭曲。金属清洁剂含有0.1-5重量％的含氟原子的化合物; 0.01〜2wt％的防腐蚀剂; 和水的平衡。优选含有氟原子的化合物选自氟化氢，全氟酸，氟化铵，四甲基氟化铵，氟化氢铵，二乙烯三氟化铵及其混合物; 防腐蚀剂选自磷酸盐类螯合剂，防腐表面活性剂及其混合物。

3. 发明公开

KR1020070063356A 금속용 세정제 有权
标题翻译：金属清洁剂
公开(公告)号：KR1020070063356A
公开(公告)日：2007-06-19
申请号：KR1020050123490
申请日：2005-12-14
申请人： 동우 화인켐 주식회사
发明人： 송선영 , 이혁진 , 마사유키타카시마
IPC分类号： C23G1/00 , C23G5/00
CPC分类号： C23G1/08 , C23F11/16 , C23G1/086
摘要： A metal cleaner for removing an oxide film and/or a nitride film adhered onto a metal without corroding the metal is provided. A metal cleaner comprises 0.1 to 5 wt.% of a fluorine-containing compound, 0.01 to 1 wt.% of a corrosion inhibitor, and the balance of water. The fluorine-containing compound is selected from the group consisting of hydrogen fluoride, hydrogen perfluoride, ammonium fluoride, tetramethyl ammonium fluoride, ammonium bifluoride, diethylenetriammonium trifluoride, and mixtures thereof. The corrosion inhibitor is selected from the group consisting of thioglycol, thioglycerol, thioglycolic acid, thiodiacetic acid, thioacetic acid, thiodiethanol, and mixtures thereof. The metal cleaner further comprises 1 to 10 wt.% of an oxidizer or 0.001 to 1 wt.% of a surfactant based on the total cleaner weight. The oxidizer is selected from the group consisting of hydrogen peroxide, ammonium peroxodisulfate, oxone, hypochlorous acid, ammonium persulfate, and mixtures thereof. The surfactant is a cationic surfactant, a nonionic surfactant, a fluorine-based surfactant, or mixtures thereof.
摘要翻译：提供了用于除去附着在金属上而不会腐蚀金属的氧化物膜和/或氮化物膜的金属清洁剂。金属清洗剂包含0.1〜5重量％的含氟化合物，0.01〜1重量％的缓蚀剂，余量为水。含氟化合物选自氟化氢，全氟化氢，氟化铵，四甲基氟化铵，氟化氢铵，二亚乙基三氟化铵及其混合物。腐蚀抑制剂选自巯基乙醇，硫代甘油，巯基乙酸，硫代二乙酸，硫代乙酸，硫代二乙醇及其混合物。基于总清洁剂重量，金属清洁剂还包含1-10重量％的氧化剂或0.001-1重量％的表面活性剂。氧化剂选自过氧化氢，过二硫酸铵，过氧化氢，次氯酸，过硫酸铵及其混合物。表面活性剂是阳离子表面活性剂，非离子表面活性剂，氟基表面活性剂或其混合物。

4. 发明授权

KR101319113B1 금속용 세정제 有权
标题翻译：金属清洁剂
公开(公告)号：KR101319113B1
公开(公告)日：2013-10-17
申请号：KR1020060033503
申请日：2006-04-13
申请人： 동우 화인켐 주식회사
发明人： 송선영 , 마사유키타카시마
IPC分类号： C11D3/02 , C11D3/00 , C11D1/02 , C11D11/00
摘要： 본 발명은 금속용 세정제에 관한 것으로, 상세하게는 불소 함유 화합물, 부식 방지제 및 물을 포함하는 금속용 세정제에 관한 것이다.
본 발명에 따른 세정제는, 세정공정 중 원하는 부분의 막 증착을 위해 사용된 금속 마스크의 세정에 특히 유효한 것으로 기판에 증착된 산화막 및/또는 질화막을 깨끗하게 제거할 뿐만 아니라 금속막의 부식을 발생시키지 않는다. 또한, 본 발명에 따른 세정제는, 실온에서 세정하는 것이 가능하기 때문에 금속의 뒤틀림이나 변형이 생기지 않고 반복 사용이 가능하다.
세정제, 금속용 세정제, 불소 화합물
摘要翻译：金属清洗剂技术领域本发明涉及金属清洗剂，特别涉及含有氟化合物，腐蚀抑制剂和水的金属清洗剂。

5. 发明授权

KR101264420B1 금속용 세정제 有权
标题翻译：金属清洁剂
公开(公告)号：KR101264420B1
公开(公告)日：2013-05-14
申请号：KR1020050123490
申请日：2005-12-14
申请人： 동우 화인켐 주식회사
发明人： 송선영 , 이혁진 , 마사유키타카시마
IPC分类号： C23G1/00 , C23G5/00
摘要： 본발명에따른세정제는, 세정공정중 원하는부분의막증착을위해사용된금속마스크및 금속기판에증착된산화막및/또는질화막을깨끗하게제거할뿐만아니라금속막의부식을발생시키지않는다. 또한, 본발명에따른세정제는, 실온에서세정하는것이가능하기때문에금속의뒤틀림이나변형이생기지않고반복사용이가능하다.

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