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1. 发明公开

KR1020010062029A 유해가스의 정화방법 및 정화장치 失效
标题翻译：用于净化有害气体的方法和装置
公开(公告)号：KR1020010062029A
公开(公告)日：2001-07-07
申请号：KR1020000072135
申请日：2000-11-30
申请人： 니폰 파이오니쿠스 가부시키가이샤
发明人： 오츠카겐지 , 무라나가나오키 , 아라카와사토시 , 이케다도모히사
IPC分类号： B01D53/86
CPC分类号： B01D53/8668 , B01D2251/102
摘要： PURPOSE: Provided are a method and a device capable of purifying harmful components in the harmful gas discharged from a reaction process using an organometallic compound as a reaction raw material and uninvolving a post treatment without discharging any organic compound and a large amount of carbon dioxide after cleaning process. CONSTITUTION: The harmful gas is purified by bringing the harmful gas into contact with the catalyst at 100-800 deg.C by using a purification device having a harmful gas introducing pipe(16), an oxygen or air introducing pipe(15), a purification cylinder which is connected to two introducing pipes and in which a catalyst carrying noble metal on an inorganic carrier and a catalyst carrying a catalyst consisting of metal oxides such as vanadium oxide, chromium oxide, manganese oxide, iron oxide, copper oxide and silver oxide or a catalyst carrying these metal oxides are packed, a means for heating the purification cylinder and a discharge pipe(17) for the purified gas discharged from the purification cylinder.
摘要翻译：目的：提供一种方法和装置，其能够使用有机金属化合物作为反应原料净化从反应过程排出的有害成分中的有害成分，并且不污染后处理而不排出任何有机化合物和大量的二氧化碳清洗过程。构成：通过使用具有有害气体导入管（16），氧气或空气导入管（15）的净化装置，使有害气体在100〜800℃下与催化剂接触来净化有害气体，净化筒，其连接到两个导入管，其中载有无机载体上的贵金属的催化剂和载有由氧化钒，氧化铬，氧化锰，氧化铁，氧化铜和氧化银等金属氧化物组成的催化剂的催化剂或携带这些金属氧化物的催化剂被填充，用于加热净化筒的装置和用于从净化筒排出的净化气体的排出管（17）。

2. 发明公开

KR1020050023120A 유해 가스의 정화 장치 无效
标题翻译：用于使用燃烧排放燃气或燃烧燃烧的火焰从半导体制造工艺中排出的有害气体的纯化装置，净化有害气体
公开(公告)号：KR1020050023120A
公开(公告)日：2005-03-09
申请号：KR1020040064228
申请日：2004-08-16
申请人： 니폰 파이오니쿠스 가부시키가이샤
发明人： 시마다다카시 , 고이소야스히코 , 무라나가나오키 , 가사야다카시 , 이케다도모히사
IPC分类号： B01D53/34 , B01D53/81 , B01D53/82
摘要： PURPOSE: To provide a harmful gas purification apparatus capable of suppressing decomposition ratio drop of harmful gas to be treated and deposition of powder materials on the wall surface of decomposition chamber and safely and stably purifying the harmful gas over a long period of time without use of a large or complicated structure. CONSTITUTION: An apparatus for purification of harmful gas comprises: at least a harmful gas pyrolysis chamber(1); a nozzle(2) for introducing combustion exhaust gas or flame(7) into the pyrolysis chamber; a nozzle(3) for introducing harmful gas into the pyrolysis chamber; a means for introducing oxygen-containing gas into the pyrolysis chamber from the side through an air-permeable adiabatic wall; and an outlet(17) for exhausting pyrolyzed gas into the outside after pyrolyzing gas, wherein the means for introducing oxygen-containing gas into the pyrolysis chamber from the side through a air-permeable adiabatic wall(5) comprises oxygen-containing gas inlets(4) and an oxygen-containing gas channel(6), the oxygen-containing gas channel installed all over the outer circumference of the air-permeable adiabatic wall, wherein the nozzle for introducing harmful gas into the pyrolysis chamber is installed on the outer circumference of the nozzle for introducing combustion exhaust gas or flame into the pyrolysis chamber, and wherein the apparatus further comprises a powder material removal part and/or an acidic gas removal part installed at the output side of the pyrolysis chamber.
摘要翻译：目的：提供一种有害气体净化装置，能够抑制待处理的有害气体的分解率下降和粉末材料沉积在分解室的壁面上，并且长时间安全稳定地净化有害气体，而不使用一个大的或复杂的结构。构成：用于净化有害气体的装置包括：至少有害气体热解室（1）; 用于将燃烧废气或火焰（7）引入所述热解室中的喷嘴（2）; 用于将有害气体引入热解室的喷嘴（3）; 将含氧气体从侧面通过透气性绝热壁引入热解室的方法; 以及用于在热解气体之后将热解气体排出到外部的出口（17），其中从侧面通过透气绝热壁（5）将含氧气体引入热解室的装置包括含氧气体入口（ 4）和含氧气体通道（6），所述含氧气体通道安装在透气性绝热壁的整个外周，其中将有害气体引入热解室的喷嘴安装在外周所述喷嘴用于将燃烧废气或火焰引入所述热解室中，并且其中所述装置还包括安装在所述热解室输出侧的粉末材料去除部分和/或酸性气体去除部分。

3. 发明授权

KR100754088B1 유해가스의 정화방법 및 정화장치 失效
标题翻译：清洁有害气体和清洁装置的方法
公开(公告)号：KR100754088B1
公开(公告)日：2007-08-31
申请号：KR1020000072135
申请日：2000-11-30
申请人： 니폰 파이오니쿠스 가부시키가이샤
发明人： 오츠카겐지 , 무라나가나오키 , 아라카와사토시 , 이케다도모히사
IPC分类号： B01D53/86
CPC分类号： B01D53/8668 , B01D2251/102
摘要： 유기금속화합물을 반응원료로서 사용하는 반응공정으로부터 배출되는 유해가스를 산소 또는 공기와 혼합한 후 귀금속을 무기담체에 담지시켜서 수득된 촉매, 산화바나듐, 산화크롬, 산화망간, 산화철, 산화구리, 산화은, 산화코발트 및 산화니켈로부터 선택된 하나 이상의 금속 산화물을 포함하는 촉매, 또는 이들 금속산화물을 무기담체에 담지시켜 수득된 촉매와 100∼800℃의 온도에서 접촉시켜서 유해가스를 정화시키는 것을 포함하는 유해가스의 정화방법 및 그 방법에 사용되는 정화장치가 개시된다. 본 발명에 의해 유해가스의 정화 후에 유기화합물이나 대량의 이산화탄소를 방출시키는 일이 없고 후처리의 필요도 없이 유해성분을 효율적으로 정화시키는 것이 가능하게 된다.

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