会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • 가압 처리 장치
    • 가압처리장치
    • KR100414723B1
    • 2004-01-13
    • KR1020000050990
    • 2000-08-31
    • 가부시키가이샤 고베 세이코쇼
    • 우에하라가츠히로사카시타요시히코간다다케시니시모토다케오
    • H01L21/304
    • H01L21/67057B08B7/0021Y10S134/902
    • A pressure processing device including a vessel having a body and an opening/closing member. A seal member is provided on a joining surface between the body and the opening/closing member, and a non-sliding joining surface is provided which is not slidably moved when the member is opened and closed. A device is provided including a diaphragm for housing an object to be processed, and a fluid introducing passage to the vessel provided so that a greater part of a fluid flowing into the vessel flows into the diaphragm. The diaphragm can be formed of heat insulating material, and a filter can be provided for removing particles installed on the side of the diaphragm into which a fluid flows. A plate having a labyrinth construction can be provided for trapping particles by parts on a surface thereof. A pressure processing device in which an object may be washed is also provided.
    • 一种压力处理装置,其包括具有主体和开闭部件的容器。 密封构件设置在本体与开闭构件之间的接合表面上,并且设置有当构件打开和关闭时不滑动移动的非滑动接合表面。 提供一种装置,其包括用于容纳待处理物体的隔膜以及通向所述容器的流体引入通道,从而使得流入容器的大部分流体流入隔膜。 隔膜可以由隔热材料形成,并且可以设置过滤器以去除安装在流体流入其中的隔膜侧上的颗粒。 可以提供具有迷宫结构的板用于通过其表面上的部件捕获粒子。 还提供了其中可以清洗物体的压力处理装置。
    • 5. 发明公开
    • 가압 처리 장치
    • 压力处理设备
    • KR1020010050280A
    • 2001-06-15
    • KR1020000050990
    • 2000-08-31
    • 가부시키가이샤 고베 세이코쇼
    • 우에하라가츠히로사카시타요시히코간다다케시니시모토다케오
    • H01L21/304
    • H01L21/67057B08B7/0021Y10S134/902
    • PURPOSE: A pressure treatment apparatus is provided to enable particle-free treatment and to enhance temperature control accuracy and temperature control response indispensable to the enhancement of productivity. CONSTITUTION: A pressure container(1) is equipped with a cylinder(6) closed at one end thereof and the lid member(4) for closing the opening of the other end of the cylinder(6) and a pressure means for pressing the lid member(4) to the cylinder(6) in the axial direction of the cylinder(6) is provided to the pressure container(1) and a seal member(13) is provided between the opening end surface of the cylinder(6) and the end surface opposed to the opening end surface of the cylinder(6) of the lid member(4). A partition wall housing an object to be treated is provided in the pressure container(1) and a fluid introducing passage is provided to the pressure container(1) so as to allow the greater part of the fluid flowing in the pressure container(1) to flow in the partition wall. A partition wall comprising a heat insulating material is provided between the object to be treated and the pressure container(1) and a filter for catching ultrafine particles is arranged on the inflow side of the fluid of the partition wall.
    • 目的:提供一种压力处理设备,以实现无颗粒处理,并提高温度控制精度和温度控制响应,提高生产率不可或缺。 构成:压力容器(1)配备有在其一端封闭的气缸(6)和用于封闭气缸(6)的另一端的开口的盖构件(4),以及用于按压盖 在气缸(6)的轴向上的气缸(6)的构件(4)设置在压力容器(1)上,密封构件(13)设置在气缸(6)的开口端面与 与盖构件(4)的气缸(6)的开口端面相对的端面。 在压力容器(1)中设置有容纳待处理物体的分隔壁,并且在压力容器(1)上设置有流体导入通路,使得流入压力容器(1)的大部分流体, 流入隔墙。 在分隔壁的流体的流入侧,在被处理物和压力容器(1)之间设置有隔热材料的分隔壁,并且配置有用于捕捉超微粒子的过滤器。