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1. 发明公开

KR1020130031441A 기화기 无效
标题翻译：喷雾器
公开(公告)号：KR1020130031441A
公开(公告)日：2013-03-29
申请号：KR1020110095008
申请日：2011-09-21
申请人： 최우열 , 김오수
发明人： 최우열 , 김오수 , 국존호
IPC分类号： C23C16/448 , C23C16/455
摘要： PURPOSE: A vaporizer is provided to improve vaporizing efficiency by increasing the section of a vaporizing passage. CONSTITUTION: A vaporizer comprises a vaporizer body part(10) and a heater(42). A vaporizing passage having an internal vaporizing passage and an external vaporizing passage is formed in the vaporizer body part. One end of the vaporizer body part is connected to the vaporizer body part, and a material input passage is formed in the other side thereof to be exposed to the outside. One end of the vaporizer body part is connected to the vaporizer body part, and a material output passage is formed in the other side thereof to be exposed to the outside. The heater is installed in the vaporizer body part to heat the vaporizing passage.
摘要翻译：目的：提供蒸发器以通过增加蒸发通道的截面来提高蒸发效率。构成：蒸发器包括蒸发器主体部分（10）和加热器（42）。在蒸发器主体部分中形成有具有内部蒸发通道和外部蒸发通道的气化通道。蒸发器主体部分的一端连接到蒸发器主体部分，并且在另一侧形成材料输入通道以暴露于外部。蒸发器主体部分的一端连接到蒸发器主体部分，并且在另一侧形成材料输出通道以暴露于外部。加热器安装在蒸发器主体部分中以加热蒸发通道。

2. 发明公开

KR1020130025628A 로터리 조인트 및 이를 구비하는 연마 장치 有权
标题翻译：旋转接头和抛光装置
公开(公告)号：KR1020130025628A
公开(公告)日：2013-03-12
申请号：KR1020110089052
申请日：2011-09-02
申请人： 김오수
发明人： 김오수 , 국존호
IPC分类号： B24B37/04 , H01L21/304 , F16L27/00 , F16L41/18
CPC分类号： B24B37/04 , B24B37/27 , B24B47/12
摘要： PURPOSE: A rotary joint and a polishing device including the same are provided to rotate a zone defense ring and a rotor together when a shaft rotates by fixing the zone defense ring and the rotor to the shaft with a fixing key. CONSTITUTION: A rotary joint comprises a shaft(210), a plurality of zone defense rings(230), a plurality of rotors(250a,250b), and a fixing key(290). The shaft includes a plurality of first grooves in a side. The zone defense rings warp the shaft and individually include second grooves. The rotors are installed between the zone defense rings and individually include third grooves. The fixing key is inserted in the first groove through the second groove and the third groove in order to fix the zone defense ring and the rotor to the shaft.
摘要翻译：目的：提供一种旋转接头和包括该旋转接头的抛光装置，通过用固定键将防护环和转子固定到轴上，当轴旋转时，将防区环和转子一起旋转。构成：旋转接头包括轴（210），多个防区环（230），多个转子（250a，250b）和固定键（290）。轴包括在一侧的多个第一凹槽。区域防御环经轴转动并且分别包括第二凹槽。转子安装在防区环之间，并分别包括第三槽。固定键通过第二槽和第三槽插入第一槽中，以将防区环和转子固定在轴上。

3. 发明授权

KR101280331B1 로터리 조인트 및 이를 구비하는 연마 장치 有权
标题翻译：具有相同的旋转接头和抛光装置
公开(公告)号：KR101280331B1
公开(公告)日：2013-07-02
申请号：KR1020110089052
申请日：2011-09-02
申请人： 김오수
发明人： 김오수 , 국존호
IPC分类号： B24B37/04 , H01L21/304 , F16L27/00 , F16L41/18
摘要： 본 발명은 측면에 복수의 제 1 홈이 형성된 샤프트와, 샤프트를 감싸며 제 2 홈이 각각 형성된 복수의 존 디펜스 링고, 존 디펜스 링들 사이에 마련되고 샤프트를 감싸며, 제 3 홈이 각각 형성된 복수의 로터와, 존 디펜스 링 및 로터가 샤프트에 고정되도록 제 2 홈 및 제 3 홈을 통해 제 1 홈에 삽입되는 고정 키를 포함하는 로터리 조인트 및 이를 구비하는 연마 장치를 제시한다.

4. 发明授权

KR101104824B1 캐리어 헤드 및 캐리어 헤드 유닛 有权
标题翻译：承运人头和承运人头单位
公开(公告)号：KR101104824B1
公开(公告)日：2012-01-16
申请号：KR1020110005496
申请日：2011-01-19
申请人： 김오수
发明人： 김오수 , 국존호
IPC分类号： H01L21/304 , B24B37/04
CPC分类号： B24B37/30 , B24B37/32
摘要： PURPOSE: A carrier head and a carrier head unit are provided to prevent damage and malfunction of equipment by sensing the leakage of pneumatic pressure which is created in a separate space between a head main body and a retaining ring. CONSTITUTION: A head main body(100) supports a wafer using the adhesion of air. A connection passage which links a plurality of sub-passages is formed in the head main body. The upper side of the connection passage is closed by a cover(400). A membrane assembly fixes the wafer to the head main body. A manifold assembly distributes the suction of the air at every wafer region with the proper pressure. A connection hole(140) securely fixes the head main body and a retaining ring(200). The retaining ring is combined with the bottom surface of housing and closes a lower region of the connection hole.
摘要翻译：目的：提供载体头和载体头单元，以通过感测在头主体和保持环之间的单独空间中产生的气压的泄漏来防止设备的损坏和故障。构成：头主体（100）使用空气的粘附来支撑晶片。连接多个副通路的连接通道形成在头主体中。连接通道的上侧由盖（400）封闭。膜组件将晶片固定到头主体。歧管组件在适当的压力下在每个晶片区域分配空气的吸力。连接孔（140）牢固地固定头主体和固定环（200）。保持环与壳体的底表面组合并且封闭连接孔的下部区域。

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