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    • 7. 发明公开
    • 발광 소자의 제작 방법 및 성막 장치
    • 制造发光元件和沉积装置的方法
    • KR1020130124225A
    • 2013-11-13
    • KR1020130050083
    • 2013-05-03
    • 가부시키가이샤 한도오따이 에네루기 켄큐쇼
    • 요코야마고헤이이케다히사오히라사신이치진보야스히로다카세나츠코
    • H01L51/56H05B33/10
    • C23C14/24A63F13/327C23C14/54C23C14/564F21S6/002F21Y2115/20H01J49/004H01J49/42H01L51/001H01L51/56H05B33/10
    • The present invention provides an organic EL element having high reliability. The present invention provides a deposition device capable of fabricating the organic EL element having high reliability. A first process, which is evaporating by heating deposition materials in a deposition chamber under a decompression condition, and a second process, which is decomposing a layer included in an EL layer in the decomposition chamber, are implemented while measuring the partial pressure of the water inside the decomposition chamber using an exhaust and mass analyzing instrument. When the second process is initiated, the partial pressure of the water is less than the average value of the partial pressure of the water of the first process. Further, the decomposition chamber included in a decomposition device has a decomposition material chamber and an exhaust instrument is connected. The decomposition material chamber is separated from the decomposition chamber by a water valve, comprises a decomposition material maintaining part comprising a heating instrument and a mass analyzing instrument and the exhaust instrument are connected. The diffusion of water from decomposition materials in the decomposition chamber can be restricted, because impurities such as water included in the decomposition material can be sufficiently eliminated at the decomposition material chamber in advance. [Reference numerals] (AA) Pressure;(BB) Temperature;(CC) Water partial pressure;(DD) Temperature of a heating device;(EE) Time
    • 本发明提供了一种具有高可靠性的有机EL元件。 本发明提供能够制造高可靠性的有机EL元件的沉积装置。 通过在减压条件下通过在沉积室中加热沉积材料而蒸发的第一工艺和在分解室中包含在EL层中的层分解的第二工艺在测量水的分压 在分解室内使用废气和质量分析仪器。 当第二过程开始时,水的分压小于第一过程的水的分压的平均值。 此外,包含在分解装置中的分解室具有分解材料室和排气装置。 分解材料室通过水阀与分解室分离,包括分解材料保持部分,其包括加热仪器和质量分析仪器,并且排气装置连接。 由于可以预先在分解物质室充分除去分解物中所含的水分等杂质,因此可以限制分解室内的分解物质的扩散。 (参考号)(AA)压力;(BB)温度;(CC)水分压;(DD)加热装置的温度;(EE)时间