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    • 1. 发明公开
    • 밸브 기구 및 유로 기판
    • 阀门结构和通风基板
    • KR1020070106916A
    • 2007-11-06
    • KR1020060126841
    • 2006-12-13
    • 가부시키가이샤 시마쓰세사쿠쇼
    • 카지,토루
    • F16K31/02B81B3/00
    • F15C5/00F16K99/0001F16K99/0011F16K99/0026F16K99/0046Y10T137/86879
    • A valve structure and a passage substrate are provided to integrate a plurality of fluid passages with the valve structure to perform high integration of the passage substrate. A passage substrate includes a fluid passage(16). The passage substrate is formed by overlapping a PDMS substrate(14) on a glass substrate(12). A spherical valve chamber(18) is formed at the fluid passage. The valve chamber is formed by the PDMS substrate. The PDMS substrate corresponding to the valve chamber has a smaller thickness than other parts thereof. The small thickness part of the PDMS substrate forms one side wall(22) of the valve chamber. The one side wall can be resiliently bent toward the glass substrate. A magnetic body(20) is buried in a portion of the PDMS substrate for constituting the one side wall.
    • 提供阀结构和通道基板以将多个流体通道与阀结构集成,以实现通道基板的高度集成。 通道基底包括流体通道(16)。 通道基板通过在玻璃基板(12)上重叠PDMS基板(14)而形成。 在流体通道处形成球形阀室(18)。 阀室由PDMS基板形成。 对应于阀室的PDMS基板的厚度比其它部分的厚度小。 PDMS基板的小厚度部分形成阀室的一个侧壁(22)。 单侧壁可以朝向玻璃基板弹性弯曲。 磁性体(20)被埋在PDMS衬底的一部分中,用于构成一个侧壁。