专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

2. 发明授权

KR100675064B1 기판 건조장치 有权
标题翻译： 기판건조장치
公开(公告)号：KR100675064B1
公开(公告)日：2007-01-30
申请号：KR1020060009378
申请日：2006-01-31
申请人： (주)에스엠텍
发明人： 김영준 , 김현성
IPC分类号： F26B13/20 , G02F1/13
摘要： A substrate desiccator is provided to prevent contamination and defects of a substrate during manufacture of the substrate by quickly and effectively desiccating substrates processed with a liquid. A substrate desiccator(1) comprises a lower conveyor(30) having a first mesh belt(32) for conveying a substrate loaded on the first mesh belt; a plurality of air knives(10) arranged at one side of the first mesh belt so that the air knives inject air to the substrate; a desiccator body(40) for supporting the lower conveyor and the air knives; and an upper conveyor(20) arranged on the lower conveyor and opposed to the first mesh belt with the substrate interposed between the first mesh belt and the second mesh belt so as to prevent escape of the substrate.
摘要翻译：提供衬底干燥器以通过快速和有效干燥用液体处理的衬底来防止在制造衬底期间衬底的污染和缺陷。基板干燥器（1）包括具有第一网带（32）的下部输送机（30），用于输送装载在第一网带上的基板; 多个气刀（10），布置在所述第一网带的一侧，以便所述气刀向所述基板注入空气; 一个用于支撑下传送器和气刀的干燥器主体（40）以及布置在下部输送机上并且与第一网状带相对的上部输送机（20），其中基板插入第一网状带和第二网状带之间以防止基板逸出。

IPRDB

热门服务

关于我们

友情链接

联系方式