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1. 发明授权

KR101084997B1 캐리어 기체에 의한 화합물 기화용 버블러 有权
标题翻译：用于运输气体蒸发物质的燃烧器
公开(公告)号：KR101084997B1
公开(公告)日：2011-11-18
申请号：KR1020110064788
申请日：2011-06-30
申请人： (주)그랜드 텍
发明人： 박영균 , 이병현 , 정태희 , 전병주
IPC分类号： H01L21/205
CPC分类号： C23C16/4482 , C23C16/4483
摘要： PURPOSE: A bubbler for evaporating compound by carrier gas is provided to constantly maintain the density and pressure of a reaction material and carrier gas by widely dispersing bubbles and constantly maintaining the bubble volume of the carrier gas. CONSTITUTION: A container(10) receives reaction materials. A valve device(20) is formed on the upper side of the container. The valve device includes a carrier gas supply line(210) and a liquid reaction material supply valve(220). An exhaust valve(230) discharges the evaporated reaction material and carrier gas. A jacket(240) controls the temperature of the liquid reaction material in the container.
摘要翻译：目的：提供用于通过载气蒸发化合物的起泡器，以通过广泛分散气泡并恒定地保持载气的气泡体积来恒定地保持反应材料和载气的密度和压力。构成：容器（10）接收反应物质。在容器的上侧形成有阀装置（20）。阀装置包括载气供应管线（210）和液体反应材料供应阀（220）。排气阀（230）排出蒸发的反应物质和载气。护套（240）控制容器中液体反应物质的温度。

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