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1. 发明授权

KR101576573B1 오존 생성을 이용한 흑린 박막 제조 방법 및 이를 위한 제조 장치 有权
标题翻译：黑色薄膜制造方法和使用臭氧发生的制造装置
公开(公告)号：KR101576573B1
公开(公告)日：2015-12-10
申请号：KR20150074810
申请日：2015-05-28
申请人： KOREA RES INST OF STANDARDS
发明人： KWON HYUK SANG , SEO SUNG WON , KIM JEONG WON
IPC分类号： H01L21/02 , H01L21/70
摘要： 본발명은오존생성을이용한흑린박막제조방법및 이를위한제조장치에관한것으로서, 더욱상세하게는챔버내부에흑린을구비하고, 상기챔버내에자외선을조사하여오존을형성하는과정에서발생하는활성산소를이용하여흑린의식각을통해흑린박막을제조하는오존생성을이용한흑린박막제조방법및 이를위한제조장치에관한것이다.
摘要翻译：本发明涉及通过使用臭氧产生制造黑色磷薄膜的方法及其制造装置，更具体地，涉及一种通过使用在室中制备黑色磷的臭氧产生来制造黑色磷薄膜的方法，并通过在紫外线照射室内形成臭氧的过程中产生的活性氧来蚀刻黑色磷制造黑色磷薄膜及其制造装置。

2. 发明公开

KR20120048940A High-sensitive measuring method and apparatus for self-assembly monolayer on gold surface using infrared reflection and self-assembly substrate 有权
标题翻译：使用红外反射和自组装衬底的金表面自组装单层的高灵敏度测量方法和装置
公开(公告)号：KR20120048940A
公开(公告)日：2012-05-16
申请号：KR20100110439
申请日：2010-11-08
申请人： KOREA RES INST OF STANDARDS
发明人： YU HYUN UNG , PARK MIN GYU , CHOI SE BUM
IPC分类号： G01N21/3563 , G01N1/28
摘要： PURPOSE: A high-sensitive measuring method, a device for the same, a self-assembly monolayer used for the same in a process forming the self-assembly monolayer on a golden thin film using an infrared rays spectral device are provided to easily grow a self-assembly monolayer by forming a golden thin film less than 2 nano meter in both sides of a silicon. CONSTITUTION: A high-sensitive measuring method in a process forming the self-assembly monolayer on a golden thin film using an infrared rays spectral device is as follows. A silicon substrate in which golden thin film is formed in both surfaces is immersed in solution where organic molecules is melted so that a self-assembly monolayer is formed. The substrate where a monolayer is formed is taken out and installed in chamber where an infrared rays spectral device. Infrared ray is incident to one side end part of the silicon substrate where the monolayer is formed so that lights are successively reflected to both sides of the golden thin film. Lights projected by being reflected are incident to a detecting device by converting a progressive direction so that a light detection is performed.
摘要翻译：目的：提供一种高灵敏度测量方法及其装置，使用红外线光谱装置在金色薄膜上形成自组装单层的工艺中使用的自组装单层，以便容易地生长通过在硅的两面形成小于2纳米的金色薄膜，自组装单层。构成：使用红外线光谱装置在金色薄膜上形成自组装单层的工艺中的高灵敏度测量方法如下。将其中在两个表面上形成金色薄膜的硅衬底浸入有机分子熔化的溶液中，从而形成自组装单层。将形成单层的基板取出并安装在红外线光谱装置的室内。红外线入射到硅衬底的形成单层的一侧端部，使得光线被连续地反射到金色薄膜的两侧。被反射的光通过转换逐行方向入射到检测装置，从而进行光检测。

3. 发明公开

KR20120041304A The apparatus to passivate superconducting metal circuit on a mems device in wet chemical etching and the wet chemical etching using the apparatus 无效
标题翻译：通过使用设备对湿式化学蚀刻中的MEMS器件渗透超导金属电路的设备和使用设备的湿化学蚀刻
公开(公告)号：KR20120041304A
公开(公告)日：2012-05-02
申请号：KR20100102701
申请日：2010-10-21
申请人： KOREA RES INST OF STANDARDS
发明人： CHOI JAE HYUK , KIM JEE YOUNG , KIM YUN WON , CHOI HEON HWA , LEE KWANG CHEOL
IPC分类号： C23F1/08 , C23F1/02 , C23F1/24 , C23F17/00
CPC分类号： C23F1/08 , C23F1/02 , C23F1/30 , C23F17/00
摘要： PURPOSE: A cross section wet etching apparatus and method for protecting a superconducting metal circuit surface during the manufacture of a MEMS device using wet etching are provided to prevent damage to a superconductive metal of a MEMS substrate when depositing SiN on the MEMS substrate and to prevent direct exposure of a superconductive metal circuit on the MEMS device to an etching liquid. CONSTITUTION: A cross section wet etching apparatus for protecting a superconducting metal circuit surface comprises an etching protection plate(100) which is deposited with SiN or Si3N4 films on both sides thereof, a MEMS substrate(200) which is attached to one side of the etching protection plate to manufacture a device with a superconductive metal circuit, a first jig(300) which is attached to the other side of the MEMS substrate, and a second jig(400) which is coupled with the first jig by a fastening unit(310).
摘要翻译：目的：提供一种用于在使用湿蚀刻制造MEMS器件期间保护超导金属电路表面的横截面湿法蚀刻装置和方法，以防止在MEMS衬底上沉积SiN时对MEMS衬底的超导金属的损坏，并防止将超导金属电路直接暴露在MEMS器件上至蚀刻液体。构成：用于保护超导金属电路表面的横截面湿式蚀刻装置包括：蚀刻保护板（100），其两侧沉积有SiN或Si 3 N 4膜; MEMS基板（200），其连接到蚀刻保护板以制造具有超导金属电路的器件，附接到MEMS衬底的另一侧的第一夹具（300）和通过紧固单元与第一夹具联接的第二夹具（400） 310）。

4. 发明公开

KR20090061175A EVALUATION METHOD OF ORGANIC OR BIO- CONJUGATION ON NANOPARTICLES USING IMAGING OF TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY 无效
标题翻译：使用飞行时间二次离子质谱法成像制备纳米粒子有机或生物结合的评估方法
公开(公告)号：KR20090061175A
公开(公告)日：2009-06-16
申请号：KR20070128074
申请日：2007-12-11
申请人： KOREA RES INST OF STANDARDS
发明人： LEE TAE GEOL , MIN HYE GEUN , MOON DAE WON
IPC分类号： G01N33/53 , G01N33/48
CPC分类号： G01N33/54346 , G01N33/54353 , H01J49/0004 , Y10T436/143333 , Y10T436/24
摘要： A method for evaluating bond between materials through imaging of time-of-flight secondary ion mass spectrometry(TOF-SIMS) is provided to evaluate the bond between organic, inorganic or bio material with nanoparticle and perform quantitative and qualitative analysis. A method for evaluating bond between materials using time-of-flight secondary ion mass spectrometry(TOF-SIMS) comprises: a step of forming the pattern of nanoparticle which is bonded with bio, organic or inorganic material on a substrate; a step of measuring the ion detection pattern of bond between nanoparticle and bond material on the substrate using the TOF-SIMS; and a step of comparing detection pattern of bio, organic or inorganic material and nanoparticle and determining the bond between bio, organic or inorganic material with nanoparticle.
摘要翻译：提供了通过飞行时间二次离子质谱（TOF-SIMS）成像来评估材料之间的结合的方法，以评估有机，无机或生物材料与纳米颗粒之间的键，并进行定量和定性分析。使用飞行时间二次离子质谱法（TOF-SIMS）评估材料之间的结合的方法包括：在基材上形成与生物，有机或无机材料结合的纳米颗粒图案的步骤; 使用TOF-SIMS测量衬底上的纳米颗粒和键合材料之间的键的离子检测图案的步骤; 以及比较生物，有机或无机材料和纳米颗粒的检测模式并确定生物，有机或无机材料与纳米颗粒之间的键的步骤。

5. 发明公开

KR20090049847A MEASURING APPARATUS AND METHOD OF NANO-WIRE PHYSICAL PROPERTIES 无效
标题翻译：测量装置和纳米线性质的方法
公开(公告)号：KR20090049847A
公开(公告)日：2009-05-19
申请号：KR20070116170
申请日：2007-11-14
申请人： KOREA RES INST OF STANDARDS
发明人： NAHM SEUNG HOON , JANG HOON SIK , LEE YOON HEE , KIM AM KEE
IPC分类号： G01N3/08 , G01N3/00
CPC分类号： G01N3/08 , B82Y35/00 , G01N27/04 , G01N2203/0017 , G01N2203/028
摘要： 본 발명은 나노와이어의 물성측정장치에 관한 것이다.
본 발명의 나노와이어의 물성측정장치는 나노와이어(10)의 일측 단부가 그리핑(gripping)되는 금속판(20); 나노와이어(10)의 타측 단부를 그리핑(gripping)하는 팁(30); 금속판(20) 또는 팁(30)을 이송시켜 나노와이어(10)를 인장시키는 매니퓰레이터; 금속판(20)과 상기 팁(30)이 어느 하나의 저항과 대체되어 연결되는 휘스톤 브리지 회로(40); 나노와이어(10)에 부착되어 인장 변형률을 측정하는 변형률 측정 게이지; 및 상기 휘스톤 브리지 회로(40)와 연결되어 나노와이어(10)의 저항, 전압 또는 전류의 변화를 측정하는 멀티미터(50); 를 포함하여 이루어진다.
본 발명의 반도체 나노와이어의 물성측정장치는, 나노와이어의 시편제작이 용이하며, 역학적 물성과 전기적 물성의 측정이 용이하고, 나노와이어의 기계적 및 전기적 물성 측정의 신뢰도를 향상시킬 수 있는 장점이 있다. 또한, 측정시에 필요한 제한적 조건에서도 쉽고 간단하게 나노와이어에 대해서 역학적 및 전기적 물성의 측정이 가능한 장점이 있다. 아울러, 시편에 전극을 형성하지 않고 전기적 물성 측정이 가능하므로 측정시간을 단축할 수 있는 장점이 있다.
나노와이어, 물성측정장치, 전자빔, 휘스톤 브리지

6. 发明授权

KR100762258B1 PROCESS FOR PREPARING NANOGAP ELECTRODE AND NANOGAP DEVICE USING THE SAME 无效
标题翻译：用于制备纳米微粒电极的方法和使用其的纳米粒子装置
公开(公告)号：KR100762258B1
公开(公告)日：2007-10-01
申请号：KR20060039528
申请日：2006-05-02
申请人： KOREA RES INST OF STANDARDS
发明人： AH CHIL SEONG , YUN YONG JU , LEE JUN SUNG , PARK HYUNG JU , HA DONG HAN , YUN WAN SOO
IPC分类号： H01L29/40
CPC分类号： G01R33/1269 , Y10T428/12389
摘要： A method for manufacturing a nano gap electrode and a nano gap device manufactured by using the same are provided to manufacture uniform and reproductive nano gap electrodes by controlling the density and the reactive time of a reaction material. A method for manufacturing a nano gap electrode is characterized by dipping a substrate(1) having metal patterns(2) into a solution containing metal ions. And a reduced metal is grown on a surface of the metal pattern by a reducing agent included in the solution.
摘要翻译：提供一种制造纳米间隙电极的方法和使用该方法制造的纳米间隙装置，以通过控制反应材料的密度和反应时间来制造均匀的和生殖的纳米间隙电极。纳米间隙电极的制造方法的特征在于，将具有金属图案（2）的基板（1）浸渍在含有金属离子的溶液中。并且还原金属通过溶液中包含的还原剂在金属图案的表面上生长。

7. 发明授权

KR100745158B1 AN AUTOMATIC MEASUREMENT DEVICE FOR THE AC-DC CURRENT TRANSFER DIFFERENCE OF THE THERMAL CURRENT CONVERTER AND METHOD THEREOF 无效
标题翻译：用于电流转换器的AC-DC电流传输的自动测量装置及其方法
公开(公告)号：KR100745158B1
公开(公告)日：2007-07-26
申请号：KR20060020375
申请日：2006-03-03
申请人： KOREA RES INST OF STANDARDS
发明人： KWON SUNG WON , JO YONG MYEONG
IPC分类号： G01R19/03
CPC分类号： G01R19/03 , G05F1/561
摘要： A device and a method for automatically measuring AC-DC(Alternating Current-Direct Current) current transfer difference of a TCC(Thermal Current Converter) are provided to prevent the leaking current generated due to stray capacity from flowing and to minimize influence of a drift of a current generator by measuring the output of two TCCs at the same time. A device(100) for automatically measuring AC-DC current transfer difference of a TCC is composed of a current generating unit(120) generating forward and reverse DC and AC current and supplying the generated current to a standard TCC(20) and a TCC(30) to be measured; a scan unit(140) changing the polarities of each output of the TCCs receiving the forward and reverse DC and AC current; a first voltmeter(150a) measuring the output of the standard TCC induced through the scan unit; a second voltmeter(150b) measuring the output of the TCC to be measured, induced through the scan unit; and a calculating unit computing a relative value of AC-DC current transfer difference of the TCC to be measured for the AC-DC current transfer difference of the standard TCC on the basis of a value measured by the first and second voltmeters if the forward and reverse DC and AC current is supplied. The standard TCC and the TCC to be measured are connected in series.
摘要翻译：提供了一种用于自动测量TCC（热电转换器）的AC-DC（交流 - 直流）电流传递差异的装置和方法，以防止由杂散电容引起的泄漏电流流动并最小化漂移的影响的电流发生器，同时测量两个TCC的输出。用于自动测量TCC的AC-DC电流转移差的装置（100）由产生正向和反向DC和AC电流的电流产生单元（120）组成，并将产生的电流提供给标准TCC（20）和TCC （30）待测量; 扫描单元（140），改变接收正向和反向DC和AC电流的TCC的每个输出的极性; 测量通过扫描单元感应的标准TCC的输出的第一电压表（150a）; 第二电压表（150b），测量通过扫描单元感测的要测量的TCC的输出; 以及计算单元，基于由所述第一和第二电压计测量的值来计算所述标准TCC的AC-DC电流转移差异所要测量的TCC的AC-DC电流转移差的相对值，如果前进和提供反向直流和交流电流。要测量的标准TCC和TCC串联。

8. 发明授权

KR101148082B1 Plasma generation apparatus and generation method of the same 无效
标题翻译：等离子体生成装置及其生成方法
公开(公告)号：KR101148082B1
公开(公告)日：2012-05-24
申请号：KR20100113220
申请日：2010-11-15
申请人： KOREA RES INST OF STANDARDS
发明人： YOU SHIN JAE , KIM JUNG HYUNG , KIM DAE WOONG , SEONG DAE JIN , SHIN YONG HYEON
IPC分类号： H05H1/24 , H05H1/32
CPC分类号： H01J37/32825 , A61L2/14 , H05H1/24 , H05H3/04 , H05H7/14
摘要： PURPOSE: An apparatus for generating plasma and a method thereof are provided to supply a small vacuum chamber using atmospheric pressure plasma by using metal tunneling of an electronic beam. CONSTITUTION: An apparatus for generating plasma includes a vacuum container(110) and an electron emission unit(120) generating electronics inside the vacuum container. The apparatus for generating plasma includes an acceleration part(130) accelerating an emitted electronics in the electron emission unit inside the vacuum container and a metal foil(140) tunneling accelerated electronics. The electronics tunneling the metal foil forms plasma outside the vacuum container. The vacuum container is able to be formed into metal or a dielectric.
摘要翻译：目的：提供一种用于产生等离子体的装置及其方法，以通过使用电子束的金属隧道来提供使用大气压等离子体的小型真空室。构成：用于产生等离子体的装置包括在真空容器内产生电子装置的真空容器（110）和电子发射单元（120）。用于产生等离子体的装置包括加速部分（130），其加速真空容器内部的电子发射单元中的发射电子元件，以及金属箔（140），其加速电路。穿过金属箔的电子器件在真空容器外部形成等离子体。真空容器能够形成金属或电介质。

9. 发明公开

KR20120042121A Measurement device and measuring method for ac signal and recording medium therof 有权
标题翻译：用于交流信号和记录介质的测量装置和测量方法
公开(公告)号：KR20120042121A
公开(公告)日：2012-05-03
申请号：KR20100103634
申请日：2010-10-22
申请人： KOREA RES INST OF STANDARDS
发明人： KIM MUN SEOG , KIM KYU TAE , KIM WAN SEOP
IPC分类号： G01R19/04
摘要： PURPOSE: A device and a method for measuring an alternating current signal and a recording medium thereof are provided to obtain direct current value by accurately measuring the waveform of an alternating current signal. CONSTITUTION: An alternating current generating source(100) generates an alternating current signal to measured. A reference direct current generating source(200) is electrically connected to the alternating current generating source and generates a reference direct current signal. A direct current converter(300) generates a synchronizing signal and a trigger signal. A digital-analog converter varies the reference location of the reference direct current signal. A control unit(400) produces effective value of an obtained alternating current signal waveform.
摘要翻译：目的：提供一种用于测量交流信号的装置和方法及其记录介质，以通过精确测量交流信号的波形来获得直流电流值。构成：交流发电源（100）产生要测量的交流信号。参考直流发生源（200）电连接到交流发电源并产生参考直流信号。直流电流转换器（300）产生同步信号和触发信号。数模转换器改变参考直流信号的参考位置。控制单元（400）产生获得的交流信号波形的有效值。

10. 发明公开

KR20120038058A Photodetector included microchannelplate, method for detecting photo, analysis system for analyzing sample and method thereof 无效
标题翻译：照相机包括微光栅，检测照片的方法，分析样品的分析系统及其方法
公开(公告)号：KR20120038058A
公开(公告)日：2012-04-23
申请号：KR20100099582
申请日：2010-10-13
申请人： KOREA RES INST OF STANDARDS
发明人： KIM JEONG WON
IPC分类号： H01J37/147 , G01N21/62
摘要： PURPOSE: An optical detector, and a sample analysis system and method using the same are provided to expand a solid angle by including a window and a micro-channel plate as a wafer shape. CONSTITUTION: A window(60) is composed of SrF2 which transmits light and emits transmission light. The transmission light is entered on a micro-channel plate. The micro-channel plate emits a secondary electron of a pulse shape. A detection means(90) detects the secondary electron of the pulse shape emitted from the micro-channel plate. A voltage applying part(80) applies voltage to the micro-channel plate and accelerates the secondary electron. A coating layer is included in one side of the micro-channel plate and induces the emission of the secondary electron.
摘要翻译：目的：提供一种光学检测器以及使用其的样品分析系统和方法，通过将窗口和微通道板作为晶片形状来扩展立体角度。构成：窗口（60）由透射光并发射透射光的SrF2组成。透射光进入微通道板。微通道板发射脉冲形状的二次电子。检测装置（90）检测从微通道板发射的脉冲形状的二次电子。电压施加部件（80）向微通道板施加电压并加速二次电子。在微通道板的一侧包含涂层，并引起二次电子的发射。

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