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    • 1. 发明公开
    • 플라즈마 세정장치 및 이를 이용한 연속적 플라즈마세정방법
    • 等离子体清洗装置和等离子体清洗方法
    • KR1020040073777A
    • 2004-08-21
    • KR1020030009484
    • 2003-02-14
    • 주식회사 세실플라즈마
    • 유부엽차세웅
    • H01L21/3065
    • PURPOSE: A plasma cleaning apparatus and a plasma cleaning method in sequence using the same are provided to reduce the production cost by performing a cleaning process using oxygen and nitrogen. CONSTITUTION: A container(10) including a processing object is loaded into a loading chamber(40) by using a conveyer belt. The loading chamber is connected to a vacuum pump through a valve in order to form a vacuum state. A plasma generation electrode(44) is installed at a center of a lower part of a cleaning chamber(42). The cleaning chamber is installed between the loading chamber and a door in order to clean the surface of the processing object. The cleaning chamber is connected to the vacuum pump through the valve in order to form the vacuum state. A heat-sink chamber(50) is installed between the cleaning chamber and the door. A cooling water supply tube is installed at a center of the heat-sink chamber. The heat-sink chamber is connected to the vacuum pump through the valve in order to form the vacuum state.
    • 目的:提供使用其的等离子体清洁装置和等离子体清洁方法,以通过使用氧气和氮气进行清洁处理来降低生产成本。 构成:通过使用输送带将包括处理对象的容器(10)装载到装载室(40)中。 装载室通过阀连接到真空泵以形成真空状态。 等离子体产生电极(44)安装在清洁室(42)的下部的中心处。 清洁室安装在装载室和门之间,以便清洁加工对象的表面。 清洁室通过阀连接到真空泵,以形成真空状态。 散热室(50)安装在清洁室和门之间。 冷却水供应管安装在散热室的中心。 散热室通过阀连接到真空泵,以形成真空状态。
    • 3. 发明公开
    • 간이 공기재호흡기
    • 手持式呼吸器允许用户重新呼吸空气袋中含有的空气
    • KR1020040084195A
    • 2004-10-06
    • KR1020030019086
    • 2003-03-27
    • 주식회사 세실플라즈마
    • 남균이의용길이훈이무용차세웅유부엽
    • A62B7/02
    • PURPOSE: A handy re-breather is provided which allows a user to re-breath a limited amount of air contained in an air bag, thereby taking refuge safely even when a considerable escape time is required. CONSTITUTION: The handy re-breather comprises: a sealed air bag(20) having an inhaling hole(10), an exhaling hole(12), and an inhaling/exhaling pipe(18) connected with a mask(14); a small-sized compressed oxygen tank(22) which fills the air bag(20) with air; and a carbon dioxide removing tank(24) for removing carbon dioxide contained in the exhaled air supplied to the air bag(20) through the exhaling hole(12), the carbon dioxide removing tank(24) having an inlet(46) connected to the exhaling hole(12) and an outlet(48) led to the air bag(20), and containing a carbon dioxide absorbent(50) provided between the inlet(46) and the outlet(48).
    • 目的:提供方便的呼吸器,允许用户重新呼吸气囊中的有限量的空气,从而即使在需要相当的逃生时间的情况下也能安全避难。 构成:便利的呼吸器包括:具有吸入孔(10)的密封气囊(20),呼出孔(12)和与面罩(14)连接的吸入/呼出管(18); 用空气填充气囊(20)的小型压缩氧气罐(22); 和二氧化碳去除罐(24),其用于通过所述排气孔(12)除去供给到所述气囊(20)的所述呼出空气中所含的二氧化碳,所述二氧化碳去除罐(24)具有与 呼出孔(12)和引导到气囊(20)的出口(48),并且包含设置在入口(46)和出口(48)之间的二氧化碳吸收剂(50)。
    • 5. 发明公开
    • 저온 플라즈마에 의한 배기가스 정화장치 및 정화방법
    • 用于通过低温等离子体净化排气的装置和方法
    • KR1020040006402A
    • 2004-01-24
    • KR1020020040676
    • 2002-07-12
    • 주식회사 세실플라즈마
    • 남균이의용
    • B01D53/32
    • B01D53/32B01D53/30B01D2259/818H05H1/24H05H2245/1215
    • PURPOSE: An apparatus and a method for purifying exhaust gas by low temperature plasma are provided to reduce environmental pollution by producing plasma effectively, thereby improving exhaust gas treatment efficiency. CONSTITUTION: The apparatus comprises a gas treatment pipe(10) installed at an exhaust system; a plural electrodes fixed to the gas treatment pipe(10) to generate plasma; a low voltage power supply part(24) for supplying power supply to the respective electrodes; a temperature sensor(30) for detecting temperature of exhaust gas flown in the gas treatment pipe(10); a heater(40) for selectively heating the exhaust gas flown in the gas treatment pipe(10); a heater driving part(42) for supplying driving current to the heater(40); and a control part(50) for controlling the heater driving part(42) and the low voltage power supply part(24) at the same time by detection values of the temperature sensor(30), wherein the gas treatment pipe(10) has a rectangular cross section and comprises a plural cells(18) separated by a plural partitions(16) so that a pair of electrodes are arranged in each cell, wherein connection holes(16a) are formed on the respective partitions(16) so that adjacent cells(18) are connected to each other, and wherein the electrodes are a pair of bimetal electrodes(20,22) which are apart from each other according to increase of temperature inside the gas treatment pipe(10).
    • 目的:提供一种通过低温等离子体净化废气的装置和方法,以通过有效地产生等离子体来减少环境污染,从而提高废气处理效率。 构成:该装置包括安装在排气系统处的气体处理管(10) 固定在所述气体处理管(10)上以产生等离子体的多个电极; 用于向各个电极供电的低压电源部分(24); 用于检测在气体处理管道(10)中流动的废气的温度的温度传感器(30); 用于选择性地加热在气体处理管道(10)中流动的废气的加热器(40); 加热器驱动部分(42),用于向加热器(40)提供驱动电流; 以及用于通过温度传感器(30)的检测值同时控制加热器驱动部(42)和低压电源部(24)的控制部(50),其中,所述气体处理管(10)具有 矩形横截面,并且包括由多个分隔件(16)分开的多个单元(18),使得在每个单元中布置一对电极,其中在各个隔板(16)上形成连接孔(16a),使得相邻 电池(18)彼此连接,并且其中电极是根据气体处理管道(10)内的温度升高而彼此分开的一对双金属电极(20,22)。