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1. 发明公开

KR1020100037609A 플라즈마 반응기 有权
标题翻译：等离子体反应器
公开(公告)号：KR1020100037609A
公开(公告)日：2010-04-09
申请号：KR1020107001116
申请日：2008-07-14
申请人： 에드워즈 리미티드
发明人： 나이트게리피터 , 챔버스앤드류
IPC分类号： H05H1/24 , H01J37/32
CPC分类号： H01J37/32844 , H05H2245/1215 , Y02C20/30
摘要： A plasma reactor comprises a reaction chamber and an inlet head connected to the reaction chamber. The inlet head comprises an open end connected to the reaction chamber, a plasma inlet located opposite to the open end, an inner surface tapering from the open end towards the plasma inlet, and first and second gas inlets each located between the plasma inlet and the open end. A plasma torch injects a plasma stream into the reaction chamber through the plasma inlet, which is shaped to cause the plasma stream to spread outwardly towards the first and second gas inlets. This shaping of the inlet head and the plasma inlet can enable the plasma stream to impinge upon gas streams as they exit from the gas inlets and thereby cause a significant proportion of at least one component of the gas streams to be reacted before the gas streams begin to mix within the chamber.
摘要翻译：等离子体反应器包括反应室和连接到反应室的入口头。入口头包括连接到反应室的开口端，与开口端相对的等离子体入口，从开口端朝向等离子体入口渐缩的内表面，以及分别位于等离子体入口和等离子体入口之间的第一和第二气体入口开口端。等离子体焰炬通过等离子体入口将等离子体流注入反应室，等离子体入口成形为使等离子体流向第一和第二气体入口向外扩散。入口头和等离子体入口的这种成形可以使等离子体流在气流从气体入口排出时撞击气流，从而在气体流开始之前使气流中的至少一个组分的重要比例反应在房间内混合

2. 发明公开

KR1020090088339A 플라즈마 반응기 및 플라즈마 반응 장치 无效
标题翻译：等离子体反应器和等离子体反应装置
公开(公告)号：KR1020090088339A
公开(公告)日：2009-08-19
申请号：KR1020090012065
申请日：2009-02-13
申请人： 엔지케이 인슐레이터 엘티디
发明人： 마스다마사아키 , 다카하시미치오 , 미즈노히로시
IPC分类号： B01J19/08 , H01J37/34 , H05H1/00 , B01J23/38
CPC分类号： H05H1/2406 , H05H2001/2418 , H05H2001/2437 , H05H2245/1215
摘要： A plasma reactor and plasma reaction device having the same are provided to decrease the temperature of a reformation action, and to improve thermal efficiency by increasing heat transmission property and heat insulation property. A plasma reactor includes the followings: a ceramic dielectric(4) in which a conductor(3) is built-in; a pair of plane electrodes(2) arranged with a gap; a plasma reaction part(10) reacting first gas flowing in discharge part(11); a gas distribution part(20) facilitating reaction of the first gas by adding heat of second gas in the plasma reaction part. A catalyst is dipped in the surface of the plasma generation part of the plane electrode.
摘要翻译：提供具有这种等离子体反应器和等离子体反应装置以降低重整作用的温度，并且通过增加传热性能和隔热性来提高热效率。等离子体反应器包括以下内容：陶瓷电介质（4），其中内置导体（3）; 一对布置有间隙的平面电极（2）; 等离子体反应部分（10）使在排出部分（11）中流动的第一气体反应; 气体分配部（20），其通过在等离子体反应部中加入第二气体的热量来促进第一气体的反应。将催化剂浸入平面电极的等离子体产生部分的表面。

3. 发明公开

KR1020030072748A 유전체에 돌출부가 형성된 평행 평판형 타입 플라즈마반응기 失效
标题翻译：并联型平板式等离子体反应器，带有投影形成的电介质阻挡层
公开(公告)号：KR1020030072748A
公开(公告)日：2003-09-19
申请号：KR1020020011930
申请日：2002-03-06
申请人： 현대자동차주식회사
发明人： 김연승 , 조형제 , 정치영 , 홍은기
IPC分类号： B01D53/32
CPC分类号： B01D53/32 , B01D2259/818 , H05H1/2406 , H05H2245/1215
摘要： PURPOSE: A parallel flat board type plasma reactor with projection formed dielectric barrier is provided to reduce particulate material and gaseous material of gas flowing inside the plasma reactor by forming projection on dielectric barrier in the plasma reactor, thereby maintaining glow and streamer electric discharges in the coexisting state. CONSTITUTION: In a parallel flat board shaped dielectric barrier type plasma reactor(100) comprising a space part formed by installing spacer(30) between first and second dielectric barriers(10,20), discharge electrode(11) installed at the first dielectric barrier, and grounding pole plate(21) installed at the second dielectric barrier, the parallel flat board type plasma reactor with projection formed dielectric barrier is characterized in that a plurality of projection parts(40) are formed at the inner side oppositely directed to the first and second dielectric barriers forming the space part, wherein the plurality of projection parts are formed with being spaced apart from each other in an equal distance along the longitudinal direction of the first and second dielectric barriers, and wherein projecting position of projection parts formed on the first dielectric barrier and projection parts formed on the second dielectric barrier is formed on a perpendicular line so that the same number of the projection parts of the first and second dielectric barriers is vertically formed.
摘要翻译：目的：提供具有突出形成介电阻挡层的平行平板式等离子体反应器，以通过在等离子体反应器中的电介质阻挡层上形成突起来减少在等离子体反应器内部流动的气体的颗粒物质和气态物质，从而将辉光和流光放电共存状态构造：在平行平板状电介质阻挡型等离子体反应器（100）中，包括通过在第一和第二电介质阻挡层（10,20）之间安装间隔物（30）而形成的空间部分，放电电极（11）安装在第一电介质屏障和安装在第二电介质阻挡层上的接地极板（21），具有突出形成的介质阻挡层的平行平板型等离子体反应器的特征在于，在与第一介质阻挡层相反的内侧形成有多个突起部分（40）以及形成所述空间部分的第二电介质阻挡层，其中，所述多个突出部分形成为沿着所述第一和第二电介质阻挡层的纵向方向以相等的距离彼此间隔开，并且其中形成在所述空间部分上的突出部分的突出位置形成在第二电介质阻挡层上的第一电介质阻挡层和突起部分形成在垂直线上，使得相同的nu 垂直形成第一和第二电介质阻挡层的突起部分的绝缘体。

4. 发明公开

KR1020030065067A 유전체장벽구조를 갖는 유해가스처리용 플라즈마반응기 无效
标题翻译：具有电介质阻挡结构的等离子体反应器，用于危险气体净化
公开(公告)号：KR1020030065067A
公开(公告)日：2003-08-06
申请号：KR1020020005219
申请日：2002-01-29
申请人： 고등기술연구원연구조합
发明人： 최창식 , 이성풍 , 장홍기
IPC分类号： B01D53/32
CPC分类号： B01D53/32 , B01D2259/818 , H05H1/2406 , H05H2245/1215
摘要： PURPOSE: Provided is a plasma reactor inducing dielectric barrier discharge for hazardous gas purification to reduce energy loss. CONSTITUTION: The plasma reactor comprises a plurality of bar or wire shape discharge electrodes(10), a discharge electrode support(30) for arranging and fixing the discharge electrodes(10) at regular intervals, corresponding electrodes(20) arranged between adjacent discharge electrodes(10), respectively, a corresponding electrode support(40) for fixing and supporting the corresponding electrodes(20) so as for the corresponding electrodes(20) to be separated from the corresponding discharge electrodes(10) with the same distance, and an insulating layer coated on at least one side of discharge electrodes(10) or the corresponding electrodes(20), wherein capacitance of the reactor is controlled by adjusting distance and length of the electrodes(10,20).
摘要翻译：目的：提供一种等离子体反应器，用于危险气体净化的介电阻挡放电，以减少能量损失。构成：等离子体反应器包括多个棒状或线状放电电极（10），用于以规则的间隔布置和固定放电电极（10）的放电电极支撑件（30），布置在相邻放电电极（10）分别具有用于固定和支撑相应电极（20）的相应的电极支撑件（40），以使相应的电极（20）以相同的距离与相应的放电电极（10）分离，并且绝缘层涂覆在放电电极（10）的至少一侧或相应的电极（20）上，其中通过调节电极（10,20）的距离和长度来控制反应器的电容。

5. 发明授权

KR101832666B1 반도체 폐가스 처리용 플라즈마 토치 有权
标题翻译：用于半导体废气处理的等离子炬
公开(公告)号：KR101832666B1
公开(公告)日：2018-04-13
申请号：KR1020170088963
申请日：2017-07-13
申请人： 주식회사 다선
发明人： 최동식
IPC分类号： H05H1/34 , H05H1/28
CPC分类号： H05H1/34 , H05H1/28 , H05H2245/1215
摘要： 본발명은반도체폐가스처리용플라즈마토치에관한것으로서, 보다상세하게는플라즈마의고열에너지를이용하여반도체제조시발생하는폐가스인 CF를신속하면서안전하게분해및 무해화처리할수 있도록플라즈마화염을발생시킴과아울러플라즈마와스팀을동시에반응로로제공하는반도체폐가스처리용플라즈마토치에관한것이다.
摘要翻译：并且本发明锡金产生，并且更尤其是在使用半导体制造安全地分解过程中产生的快速CF的废气的等离子体的高的热能量和脱毒的等离子火焰被视为与用于处理半导体废气一个等离子体焰炬以及用于同时向反应炉供应等离子体和蒸汽的半导体废气处理用等离子炬。

6. 发明授权

KR101490540B1 플라즈마 반응기 有权
标题翻译：等离子体反应器
公开(公告)号：KR101490540B1
公开(公告)日：2015-02-05
申请号：KR1020107001116
申请日：2008-07-14
申请人： 에드워즈 리미티드
发明人： 나이트게리피터 , 챔버스앤드류
IPC分类号： H05H1/24 , H01J37/32
CPC分类号： H01J37/32844 , H05H2245/1215 , Y02C20/30
摘要： 플라즈마 반응기는 반응 챔버와 반응 챔버에 연결된 입구 헤드를 포함한다. 입구 헤드는 반응 챔버에 연결된 개방 단부와, 개방 단부에 대향하여 위치된 플라즈마 입구와, 개방 단부로부터 플라즈마 입구를 향해 테이퍼진 내측면과, 플라즈마 입구와 개방 단부 사이에 각각 위치된 제 1 및 제 2 가스 입구를 포함한다. 플라즈마 토치는 플라즈마 입구를 통해 반응 챔버 내로 플라즈마 스트림을 분사하며, 상기 플라즈마 입구는 플라즈마 스트림이 제 1 및 제 2 가스 입구를 향해 외측으로 방사되도록 형상 설정되어 있다. 입구 헤드 및 플라즈마 입구의 이러한 형상은 플라즈마 스트림 및 가스 스트림이 가스 입구로부터 빠져나갈 때 플라즈마 스트림이 가스 스트림 상에 충돌할 수 있도록 함으로써, 가스 스트림이 챔버 내에서 혼합되기 시작하기 전에 가스 스트림의 상당한 비율의 적어도 하나의 성분이 반응되도록 한다.

7. 发明公开

KR1020030022136A 피처리물처리장치 및 그것을 사용한 플라즈마설비 有权
标题翻译： 피처리물처리장치및그것을사용한플라즈마설비
公开(公告)号：KR1020030022136A
公开(公告)日：2003-03-15
申请号：KR1020027016193
申请日：2001-05-28
申请人： 가부시키가이샤 아도테쿠 프라즈마 테쿠노로지
发明人： 이타타니료헤이 , 데구치미키오 , 메바르키벤체르키 , 도다도시히코 , 반헤이타로 , 이시카와도시아키사망
IPC分类号： B01J19/08
CPC分类号： B01D53/70 , B01D53/323 , B01D2257/204 , B01D2257/2062 , B01D2257/2064 , B01D2257/2066 , B01D2257/30 , B01D2257/40 , B01D2259/818 , H05H1/46 , H05H2001/466 , H05H2245/1215 , Y02C20/30
摘要： 본 발명에서의 피처리물처리장치는, 고압전극과 접지전극을 사용하여, 피처리물이 통과하는 반응유로내에 플라즈마를 대기압하에서 발생시키는 것으로, 예를 들면 CF
4 를 포함하는 PFC 등의 불소화합물이더라도, 플라즈마에 좁은 공간에서 충분한 시간동안 접촉시키기 때문에 효과적으로 분해할 수 있고, 소형이고 간단한 구조로 할 수 있기 때문에 개개의 프로세스챔버에 부착설치하는 것이 가능하게 된다.
摘要翻译：本发明的被检体处理装置使用高电压电极和接地电极，在被处理体通过的反应流路中，在大气压下产生等离子体。例如，由于含氟化合物在小空间内与等离子体接触足够的时间，所以即使是包含CF 4的PFC等含氟化合物也能够有效地分解，并且该装置具有小而简单的结构。因此，该设备可以被添加到每个处理室。＆lt;图像＆GT;

8. 发明公开

KR1020010023773A 가스 배출의 처리 失效
标题翻译：处理气体排放物
公开(公告)号：KR1020010023773A
公开(公告)日：2001-03-26
申请号：KR1020007002429
申请日：1998-08-26
申请人： 액센투스 메디컬 리미티드
发明人： 홀스테펜아이보르 , 윈터바틈피오나 , 인만마이클 , 세갈데이비드레슬리 , 레이본데이비드 , 쇼우크로스제임스티모시 , 모르간로스알렉산더 , 마르틴안쇼니로버트
IPC分类号： B01D53/32
CPC分类号： F01N3/035 , B01D53/32 , B01D53/9454 , B01J19/088 , B01J2219/0809 , B01J2219/083 , B01J2219/0835 , B01J2219/0875 , B01J2219/0883 , B01J2219/0894 , F01N3/0224 , F01N3/0275 , F01N3/0807 , F01N3/0842 , F01N3/0892 , F01N3/2066 , F01N3/2086 , F01N3/2832 , F01N13/009 , F01N2240/28 , F01N2240/30 , F01N2330/08 , F01N2570/12 , F01N2570/14 , F01N2610/03 , F02B1/04 , H05H1/2406 , H05H2001/2412 , H05H2245/1215 , Y02T10/22 , Y02T10/24 , Y02T10/26
摘要： A reactor chamber (2) forms part of an exhaust system of an internal combustion engine. Within the chamber (2) are electrodes (3 and 4) between which there is disposed a bed of active material (5) through which, in use, the exhaust gases pass. In the presence of an electrical discharge, driven by an electrical voltage applied across the electrodes (3 and 4), the active material (5) has a catalytic action in the reduction of nitrogenous oxides in the exhaust and also acts to remove hydrocarbons from the exhaust gases.
摘要翻译：反应器室（2）形成内燃机排气系统的一部分。在室（2）内部是电极（3和4），在其间设置有活性材料床（5），废气在使用中通过。在由施加在电极（3和4）上的电压驱动的放电的情况下，活性材料（5）在排气中的氮氧化物还原中具有催化作用，并且还起作用以从废气。

9. 发明公开

KR1020100110267A 배기 가스 처리 장치에 있어서의 자장에 의한 플라즈마의 제어 방법 및 그것을 이용한 배기 가스 처리 장치 有权
标题翻译：使用磁场和排气处理装置进行排气处理的等离子体的控制方法
公开(公告)号：KR1020100110267A
公开(公告)日：2010-10-12
申请号：KR1020100027253
申请日：2010-03-26
申请人： 클린 테크놀로지 가부시키가이샤
发明人： 아와지토시오 , 나카야마타카시 , 타나카토시오
IPC分类号： B01D53/32 , B01D53/70 , B01J19/08
CPC分类号： B01D53/32 , B01D2257/204 , B01D2257/2066 , B01D2258/0216 , B01D2259/818 , H05H1/50 , H05H2245/1215 , B01D53/323 , B01D53/70 , B01D2259/814 , B01J19/08 , B01J19/087 , B01J19/088
摘要： PURPOSE: A waste gas processing device is provided to improve the processing efficiency of waste gas by controlling the state of plasma with the generation of a magnetic field. CONSTITUTION: A coil(71) is arranged in the peripheral part of a reaction pipe(1) and/or a water cooling jacket(11) as a magnetic field generator(7). When a current is supplied to the coil, a magnetic field is generated in a plasma waste unit. A charged particle forms the plasma with the operation of the magnetic field. The lorentz force is applied to the charged particle. The state of the plasma is controlled by the prevention of the scatter of the particle. The processing efficiency of the waste gas is improved by the plasma.
摘要翻译：目的：提供废气处理装置，通过产生磁场来控制等离子体的状态来提高废气的处理效率。构成：在作为磁场发生器（7）的反应管（1）和/或水冷套（11）的周边部分配置有线圈（71）。当向线圈提供电流时，在等离子体废料单元中产生磁场。带电粒子通过磁场的操作形成等离子体。洛伦兹力施加到带电粒子上。通过防止颗粒的散射来控制等离子体的状态。通过等离子体改善废气的处理效率。

10. 发明公开

KR1020090088341A 플라즈마 반응기 및 플라즈마 반응 장치 无效
标题翻译：等离子体反应器和等离子体反应装置
公开(公告)号：KR1020090088341A
公开(公告)日：2009-08-19
申请号：KR1020090012158
申请日：2009-02-13
申请人： 엔지케이 인슐레이터 엘티디
发明人： 마스다마사아키 , 다카하시미치오 , 미즈노히로시
IPC分类号： B01J19/08 , H01J37/32 , H05H1/00
CPC分类号： B01J19/2485 , B01D53/32 , B01D2259/818 , B01J19/088 , B01J2219/0824 , B01J2219/0843 , B28B11/006 , C01B3/38 , C01B2203/0227 , C01B2203/0861 , F01N5/02 , H05H2001/4697 , H05H2245/1215 , Y02P20/52 , Y02T10/16
摘要： A plasma reactor and a plasma reactor device having the same are provided to restrict of deterioration of a catalyst by reducing reaction temperature of the catalyst efficiently. A plasma reactor(1) includes the followings: a first gas ventilation part in which the first gas flows with a cell which becomes a gas channel; a second gas ventilation part facilitating reaction of the first gas by adding heat of the second gas to the first gas ventilation part; a honeycomb electrode(10) functioning as a conductive material; and a discharge electrode(20) for reacting the first gas and discharging between the honeycomb electrodes. The first gas is injected into the first gas ventilation part. The heat of the second gas facilitates reaction of the first gas.
摘要翻译：提供具有这种等离子体反应器和等离子体反应器装置以通过有效地降低催化剂的反应温度来限制催化剂的劣化。等离子体反应器（1）包括：第一气体通气部，其中第一气体与成为气体通道的电池一起流动; 第二气体通风部，其通过将第二气体的热量加热到第一气体通气部来促进第一气体的反应; 用作导电材料的蜂窝状电极（10）以及用于使第一气体反应并在蜂窝电极之间排出的放电电极（20）。将第一气体注入第一气体通气部。第二气体的热促进第一气体的反应。

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