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    • 81. 发明公开
    • 불 휘발성 메모리 소자의 형성 방법
    • 形成非易失性存储器件的方法
    • KR1020080036679A
    • 2008-04-29
    • KR1020060103197
    • 2006-10-24
    • 삼성전자주식회사
    • 정성희최길현이상우차태호박희숙박진호이장희박재화
    • H01L21/8247H01L27/115
    • H01L27/11568H01L21/28282H01L21/76224H01L21/76838H01L29/45
    • A method for fabricating a nonvolatile memory device is provided to implement a gate electrode having low resistance and excellent step coverage by forming a tungsten layer with a pulsed nucleation layer deposition process on a tungsten nitride layer fabricated through a physical vapor deposition process. An isolation pattern(112) is formed to define an active region. A tunnel insulating layer(116), a charge trap layer(118), and a blocking dielectric layer(120) are sequentially formed on the isolation pattern and the active region. A tungsten nitride layer(122) is formed on the blocking dielectric layer. A tungsten layer(124) is formed on the tungsten nitride layer by using a PNL(Pulsed Nucleation Layer) deposition process. The tungsten nitride layer is formed through a physical vapor deposition process. The PNL deposition process is performed under 100 to 400 Torr pressure and at 200 to 400 °C. The tunnel insulating layer includes silicon oxide(SixOy). The charge trap layer includes silicon nitride(SixNy). The blocking dielectric layer includes aluminum oxide(AlxOy).
    • 提供一种制造非易失性存储器件的方法,通过在通过物理气相沉积工艺制造的氮化钨层上形成具有脉冲成核层沉积工艺的钨层,来实现具有低电阻和优异的阶梯覆盖的栅电极。 形成隔离图案(112)以限定有源区域。 隧道绝缘层(116),电荷陷阱层(118)和阻挡介质层(120)依次形成在隔离图案和有源区上。 在阻挡电介质层上形成氮化钨层(122)。 通过使用PNL(脉冲成核层)沉积工艺在氮化钨层上形成钨层(124)。 通过物理气相沉积工艺形成氮化钨层。 PNL沉积工艺在100至400乇压力和200至400℃下进行。 隧道绝缘层包括氧化硅(SixOy)。 电荷陷阱层包括氮化硅(SixNy)。 阻挡介电层包括氧化铝(Al x O y)。
    • 83. 发明公开
    • 액정표시장치 및 그 구동방법
    • 液晶显示及其驱虫甲
    • KR1020080023578A
    • 2008-03-14
    • KR1020060087617
    • 2006-09-11
    • 삼성전자주식회사
    • 조정환조재현박진호이현수
    • G09G3/36G02F1/133G09G3/20
    • G09G3/3688G09G3/3413G09G2310/0235G09G2320/0209G09G2340/06
    • A liquid crystal display device and a driving method thereof are provided to decrease an image blurring at a moving caption by adding a white color to an edge between an image and a caption. A liquid crystal display device includes an LCD(Liquid Crystal Display) panel(100), a light source(400), first and second data driving units(200,210), and a controller(500). The LCD panel includes an image region and a caption region. The light source irradiates light with different colors on the LCD panel. The first data driving unit applies image data to the image region. The second data driving unit applies caption data to the caption region. The controller sequentially supplies 3-color light on the image region for respective frames. The controller sequentially supplies 4-color light on the caption region for respective frames.
    • 提供一种液晶显示装置及其驱动方法,通过向图像和字幕之间的边缘添加白色来减少移动字幕处的图像模糊。 液晶显示装置包括LCD(液晶显示器)面板(100),光源(400),第一和第二数据驱动单元(200,210)和控制器(500)。 LCD面板包括图像区域和字幕区域。 光源在LCD面板上照射不同颜色的光。 第一数据驱动单元将图像数据应用于图像区域。 第二数据驱动单元将字幕数据应用于字幕区域。 控制器在相应帧的图像区域上顺序地提供3色光。 控制器在相应帧的标题区域上顺序地提供四色光。
    • 84. 发明授权
    • 반도체 소자의 배선 구조물 및 이의 형성방법
    • 用于半导体器件的金属接线结构及其形成方法
    • KR100806128B1
    • 2008-02-22
    • KR1020060125310
    • 2006-12-11
    • 삼성전자주식회사
    • 박진호정성희최길현이상우이호기
    • H01L21/28
    • H01L23/53266H01L21/76843H01L21/76856H01L23/53223H01L23/53238H01L2924/0002H01L2924/00
    • An interconnection structure of a semiconductor device is provided to prevent a barrier layer positioned between an insulation layer and a contact plug from being damaged in a planarization process for forming the contact plug and maintain sufficiently low contact resistance of the contact plug by forming a barrier layer in which the upper portion of the barrier layer is made of a metal nitride and the lower portion of the barrier layer is made of a metal layer and a metal nitride. An insulation layer(200) whose upper surface is planarized is formed on a semiconductor substrate(100), filling a space between a plurality of conductive structures. The insulation layer can be formed by a CVD process using as source gas Si(OC2H5)4 gas, oxygen gas or ozone gas. The insulation layer is partially removed to form an opening exposing a part of the substrate. A barrier layer is formed along the inner wall and bottom of the opening and the upper surface of the insulation layer, including a metal layer and a nitride layer under the opening and having a nitride layer on the opening. A conductive layer is formed on the resultant structure, filling the opening. The conductive layer and the barrier layer are partially removed to expose the upper surface of the insulation layer so that the conductive layer is left only in the opening covered with the barrier layer to form a metal plug.
    • 提供半导体器件的互连结构,以防止位于绝缘层和接触插塞之间的阻挡层在用于形成接触插塞的平坦化处理中被损坏,并通过形成阻挡层来保持接触插塞的足够低的接触电阻 其中阻挡层的上部由金属氮化物制成,并且阻挡层的下部由金属层和金属氮化物制成。 上表面被平坦化的绝缘层(200)形成在半导体衬底(100)上,填充多个导电结构之间的空间。 绝缘层可以通过使用作为源气体Si(OC2H5)4气体,氧气或臭氧气体的CVD工艺形成。 绝缘层被部分地去除以形成露出衬底的一部分的开口。 沿着开口的内壁和底部以及绝缘层的上表面形成阻挡层,包括在开口下方的金属层和氮化物层,并且在开口上具有氮化物层。 在所得结构上形成导电层,填充开口。 导电层和阻挡层被部分去除以暴露绝缘层的上表面,使得导电层仅留在被阻挡层覆盖的开口中以形成金属塞。
    • 85. 发明公开
    • 잉크젯 화상형성장치
    • INKJET IMAGE FORMING APPARATUS
    • KR1020070096074A
    • 2007-10-02
    • KR1020050116892
    • 2005-12-02
    • 삼성전자주식회사
    • 하동우박진호정연건
    • B41J11/06B41J11/02
    • B41J11/06B41J2202/20
    • An inkjet image forming device is provided to prevent a contact between a paper and a nozzle by accepting a curl of the paper effectively and to obtain a stable printing quality by keeping a gap between the paper and the nozzle regularly. An inkjet image forming device comprises an inkjet head and a platen(60). The inkjet head is used to discharge ink. The platen is corresponded to the inkjet head and formed with a plurality of supporting units(601) supporting a rear side of a paper, and a plurality of concaved portions(603) inclined and concaved from a side of the plural supporting units. An inclination angle of the concaved portion is 20~80 degrees against a vertical line of the supporting unit. Width and depth of a rear end for the concaved portion are larger and deeper than the width and the depth of a front end thereof. A shape of a section for the concaved portion is curved.
    • 提供一种喷墨图像形成装置,用于通过有效地接受纸张的卷曲来防止纸张与喷嘴之间的接触,并通过定期地保持纸张与喷嘴之间的间隙而获得稳定的打印质量。 喷墨图像形成装置包括喷墨头和压板(60)。 喷墨头用于排出墨水。 压板对应于喷墨头,并且形成有多个支撑纸张后侧的支撑单元(601)和从多个支撑单元的一侧倾斜和凹陷的多个凹部(603)。 凹部的倾斜角相对于支撑单元的垂直线为20〜80度。 凹部的后端的宽度和深度比其前端的宽度和深度大和深。 凹部的截面形状为弯曲状。
    • 86. 发明公开
    • 잉크젯 화상형성장치
    • INKJET IMAGE FORMING APPARATUS
    • KR1020070068336A
    • 2007-06-29
    • KR1020070059522
    • 2007-06-18
    • 삼성전자주식회사
    • 정연건박헌수박진호강승욱하동우
    • B41J2/165B41J2/01
    • An ink jet image forming apparatus is provided to allow an effective capping by decreasing the capacity of an internal space defined by a cap member and a nozzle portion. An ink jet image forming apparatus includes an ink jet head(10), a cap member, a first reference member, and a second reference member. The ink jet head includes a nozzle portion, which has a length corresponding to a width of a paper. The cap member caps the nozzle portion of the ink jet head. The first reference member is provided at the cap member. The second reference member is provided at the ink jet head. The second reference member is engaged with the first reference member in a capping state. The first reference member is a protrusion protruded from the cap member. The second reference member is an insertion portion that the protrusion is inserted.
    • 提供了一种喷墨图像形成装置,通过降低由盖构件和喷嘴部分限定的内部空间的容量来允许有效的封盖。 喷墨图像形成装置包括喷墨头(10),盖构件,第一基准构件和第二参考构件。 喷墨头包括具有对应于纸的宽度的长度的喷嘴部分。 盖构件盖住喷墨头的喷嘴部分。 第一参考构件设置在盖构件上。 第二参考构件设置在喷墨头。 第二参考构件在封盖状态下与第一参考构件接合。 第一参考构件是从盖构件突出的突起。 第二参考构件是插入突起的插入部分。