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    • 70. 发明授权
    • 비직사각형 열모듈 및 이것을 이용한 웨이퍼용 냉각장치
    • 비직사각형열모듈및이것을이용한웨이퍼용냉각장장
    • KR100426713B1
    • 2004-04-14
    • KR1020010079244
    • 2001-12-14
    • 에스엠시 가부시키가이샤
    • 사이카마사오
    • H01L21/324
    • H01L23/367H01L23/38H01L2924/0002Y10S257/93H01L2924/00
    • A non-rectangular thermo module is formed by disposing a plurality of Peltier devices between a pair of heat radiating plates, wherein the heat radiating plate has a circular or straight outer peripheral contour portion and inner peripheral contour portion and right/left side edge contour portions connecting the outer peripheral contour portion and the inner peripheral contour portion and the outer peripheral contour portion is formed longer than the inner peripheral contour portion while the right/left side edge contour portions contain first straight lines which are not parallel and inclined toward the inner peripheral contour portion such that they narrow gradually, the first straight lines being provided at least in part of the right/left side edge contour portions.
    • 非矩形热模块是通过在一对散热板之间设置多个珀尔帖装置而形成的,其中散热板具有圆形或平直的外周轮廓部分和内周轮廓部分以及左/右侧边轮廓部分 连接外周轮廓部分和内周轮廓部分和外周轮廓部分形成得比内周轮廓部分长,同时左/右侧边轮廓部分包含不平行且朝向内周边倾斜的第一直线 使得它们逐渐变窄,第一直线至少部分地设置在右/左侧边缘轮廓部分中。