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    • 46. 发明公开
    • 포토 마스크의 형성 방법 및 그에 의해 형성된 포토 마스크
    • 用于形成与其相似的光致发光体和光致发光体的方法
    • KR1020130067331A
    • 2013-06-24
    • KR1020110118648
    • 2011-11-15
    • 삼성전자주식회사
    • 박종주김상현이동근
    • G03F1/50G03F1/80
    • G03F1/24G03F1/76
    • PURPOSE: A formation method of a photomask and a photomask formed thereby are provided to simplify processes for manufacturing the photomask by reducing the widths of patterns to be transferred on a semiconductor substrate. CONSTITUTION: A formation method of a photomask includes the following steps of: preparing a substrate with a transferring area(A); forming a multilayer film(110) and a blank film on the substrate; patterning the blank film; forming openings(125c) through which a part of the multilayer film is exposed; and irradiating a part of the multilayer film with pulse laser. The pulse width of the pulse laser is greater than 0.001 seconds. In the multilayer film, a first thin film and a second thin film are alternately stacked. The thin films have first and second refractive indexes. The second refractive index is smaller than the first refractive index.
    • 目的:提供光掩模和由此形成的光掩模的形成方法,以简化通过减小要在半导体衬底上转印的图案的宽度来制造光掩模的工艺。 构成:光掩模的形成方法包括以下步骤:制备具有转印区域(A)的基板; 在基板上形成多层膜(110)和空白膜; 图案化空白膜; 形成所述多层膜的一部分露出的开口部(125c) 并用脉冲激光照射多层膜的一部分。 脉冲激光的脉冲宽度大于0.001秒。 在多层膜中,交替层叠第一薄膜和第二薄膜。 薄膜具有第一和第二折射率。 第二折射率小于第一折射率。
    • 47. 发明公开
    • 센서 융합 기반으로 3차원 위치와 방향을 추정하는 장치 및 방법
    • 通过传感器融合方法估算3D位置和方位的方法和装置
    • KR1020130013015A
    • 2013-02-06
    • KR1020110074389
    • 2011-07-27
    • 삼성전자주식회사
    • 이형욱김상현최창규
    • H04N13/00G06T15/00
    • G06T7/0042G06T7/73G06T2207/10028G06T2207/30204H04N13/00G06T15/00H04N13/279
    • PURPOSE: An apparatus and a method for measuring three-dimensional position and direction based on a sensor fusion are provided to implement miniaturization by fusing a small sensor. CONSTITUTION: A marker confirmation unit(151) confirms a position of a marker in a two-dimensional image. A depth confirmation unit(152) confirms the same position as the position of the marker in a depth image taking a picture of the same domain as the two-dimensional image. The depth confirmation unit confirms a depth corresponding to the same position as the depth of the marker. A marker-based estimation unit(153) estimates the marker based position indicating the three-dimensional position of the marker. [Reference numerals] (110) Remote device; (120) Transmitting device; (122) Marker generating unit; (130) Inertial sensor unit; (140) Receiving device; (141,121) Control unit; (142) Image sensor; (143) Depth sensor; (151) Marker confirmation unit; (152) Depth confirmation unit; (153) Marker-based estimation unit; (154) Inertia-based estimation unit; (155) Fusion estimation unit; (AA) Estimation device; (BB) Position, direction
    • 目的:提供一种基于传感器融合测量三维位置和方向的装置和方法,通过融合小型传感器实现小型化。 构成:标记确认单元(151)确认标记在二维图像中的位置。 深度确认单元152确定与拍摄与二维图像相同的图像的深度图像中的标记的位置相同的位置。 深度确认单元确认与标记的深度相同的位置的深度。 基于标记的估计单元(153)估计指示标记的三维位置的基于标记的位置。 (附图标记)(110)远程装置; (120)发射装置; (122)标记生成单元; (130)惯性传感器单元; (140)接收装置; (141,121)控制单元; (142)图像传感器; (143)深度传感器; (151)标记确认单位; (152)深度确认单位; (153)基于标记的估计单元; (154)基于惯量的估计单元; (155)融合估计单元; (AA)估计装置; (BB)位置,方向