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    • 32. 发明公开
    • 유리 기판 반송 장치
    • 玻璃基板运输装置
    • KR1020130106048A
    • 2013-09-27
    • KR1020120027652
    • 2012-03-19
    • 로체 시스템즈(주)
    • 이충걸윤정태고기만김두환
    • B65G49/06B25J19/02B25J21/00H01L21/677
    • B65G49/065B25J19/021B25J21/00H01L21/67742H01L21/68707
    • PURPOSE: A device for transferring a glass substrate is provided to prevent damage to a glass substrate and stably transfer the glass substrate by correcting the deflection of a robot hand. CONSTITUTION: A device for transferring a glass substrate comprises a transfer robot (10) and a robot fence (120). The transfer robot loads a glass substrate on a robot hand and transfers the loaded glass substrate. The transfer robot is arranged inside of the robot fence. When the glass substrate is transferred, a distance measuring unit for measuring the vertical interval between the robot fence and the end of the robot hand is installed in an entrance where the glass substrate is transferred.
    • 目的:提供用于转移玻璃基板的装置,以防止玻璃基板的损坏,并且通过校正机器人手的偏转来稳定地转移玻璃基板。 构成:用于传送玻璃基板的装置包括传送机器人(10)和机器人围栏(120)。 传送机器人将玻璃基板装载在机器人手上并传送装载的玻璃基板。 传送机器人布置在机器人围栏内部。 当玻璃基板被转印时,用于测量机器人围栏与机器人手的端部之间的垂直间隔的距离测量单元安装在玻璃基板被转印的入口处。
    • 33. 发明公开
    • 진공 영역과 대기 영역을 연결하는 다축 커플러
    • 用于真空区域和大气区域的多轴联轴器
    • KR1020110131769A
    • 2011-12-07
    • KR1020100051370
    • 2010-05-31
    • (주)에스더블유피
    • 송재활
    • H01L21/677B25J21/00B25J9/04
    • H01L21/67742B25J9/1035B25J11/0095B25J15/0052H01L21/67754Y10S414/141
    • PURPOSE: A multi-shaft coupler which connects a vacuum region and atmospheric region is provided to install a first rotation plate, a second rotation plate, and a rotation driving part in the atmospheric region, thereby effectively isolating the vacuum region and atmospheric region. CONSTITUTION: A plurality of shafts(110) is combined with a hollow hole on an axis line in order to be able to rotate. A first rotation plate(120) is respectively arranged in a plurality of shaft ends as one body. A first magnetic material(130) is laid under the first rotation plate. A second rotation plate(140) is installed in order to be facing with the first rotation plate. A second magnetic material(150) is laid under the second rotation plate in order to be facing with the first magnetic material.
    • 目的:提供连接真空区域和大气区域的多轴联接器,以在大气区域中安装第一旋转板,第二旋转板和旋转驱动部件,从而有效地隔离真空区域和大气区域。 构成:多个轴(110)与轴线上的中空孔组合以便能够旋转。 第一旋转板(120)分别设置在多个轴端作为一体。 第一磁性材料(130)被放置在第一旋转板下方。 安装第二旋转板(140)以便与第一旋转板相对。 第二磁性材料(150)被放置在第二旋转板下方以便与第一磁性材料相对。