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    • 34. 发明公开
    • 케미컬의 재생 방법
    • 循环化学方法
    • KR1020090085247A
    • 2009-08-07
    • KR1020080011048
    • 2008-02-04
    • 주식회사 동진쎄미켐
    • 윤석일김성배신성건이성현장두영
    • H01L21/02
    • B01D11/0407B01D11/0403B01D11/0488B01D11/0492
    • A method of recycling chemical is provided to reduce the amount of chemical waste and prevent environmental contamination by removing the foreign material contained in the chemical. In a method of recycling chemical, the chemical containing the foreign material is precipitated by being reacted with a supercritical fluid(S110). The precipitated foreign material is separated from the chemical and the supercritical fluid(S120), and the supercritical fluid is separated from chemical and chemical is collected(S130). A chemical manufacturing process includes one of a semiconductor device manufacturing process and a flat panel display apparatus manufacturing process.
    • 提供一种回收化学品的方法,以减少化学废物的量,并通过去除化学品中所含的异物来防止环境污染。 在回收化学品的方法中,含有异物的化学物质通过与超临界流体反应而沉淀(S110)。 将析出的异物与化学物质和超临界流体分离(S120),并将超临界流体与化学物质分离,收集(S130)。 化学制造方法包括半导体器件制造工艺和平板显示器件制造工艺中的一个。