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    • 23. 发明公开
    • 가마를 이용한 용기 고진공 처리장치 및 처리방법
    • 使用真空装置的真空装置和相同的真空装置
    • KR1020090092460A
    • 2009-09-01
    • KR1020080017712
    • 2008-02-27
    • 이철호
    • 이철호
    • F27B7/06
    • F27B3/10F27B3/20F27D7/02F27D7/06F27D2007/066
    • A vacuum device using a kiln and a vacuum method for the same are provided to prevent damage to a vacuum pump and other equipment by cooling exhaust gas of high temperature. A vacuum device using a kiln comprises a heating unit, a vacuum pump assembly line(170) and a nitrogen supply assembly line(270). The heating unit heats a container. The container is arranged inside the kiln. The heating unit is installed around the container. The vacuum pump assembly line is connected to the container. The nitrogen supply assembly line is connected to the container and supplies the nitrogen and replaces the residual gas inside the container. The kiln is composed of a main kiln(310) and a plurality of secondary kilns(320). The main kiln is exposed to the outside. The supplementary kiln is equipped inside the main kiln. In the supplementary kiln, the container is placed to be vacuumized.
    • 提供一种使用窑的真空装置和用于其的真空方法,以通过冷却高温废气来防止真空泵和其他设备的损坏。 使用窑的真空装置包括加热单元,真空泵组装线(170)和氮气供给装配线(270)。 加热单元加热容器。 容器布置在窑内。 加热单元安装在容器周围。 真空泵组装线连接到容器。 氮气供应装配线连接到容器并供应氮气并且将残留气体替换在容器内。 窑由主窑(310)和多个次窑(320)组成。 主窑暴露在外面。 主窑内装有补充窑。 在补充窑中,将容器置于真空中。