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    • 16. 发明公开
    • 빛의 위치 제어 장치 및 그 제조 방법
    • 用于光的位置控制的装置及其制造方法
    • KR1020130039126A
    • 2013-04-19
    • KR1020110103603
    • 2011-10-11
    • 삼성전자주식회사조지아 테크 리서치 코오포레이션
    • 차승남박영준왕종린이민백
    • G02B6/122G02B26/08
    • H01L41/082G02B26/103H01L41/31Y10T29/42
    • PURPOSE: A position controlling apparatus of light and a manufacturing method thereof are provided to possessively control the direction of light by using a piezoelectricity nanowire, and apply to an optical system of a micro/nano scale. CONSTITUTION: A piezoelectricity nanowire(20) comprises a first part(21) fixed to a substrate(10), and a second part(25) which is extended from the first part and prepared to enable the movement. The piezoelectricity nanowire serves as a luminance furnace wave, the second part capable of moving along the external electric field is bent thereby comprising to change the light progressive direction. In order to enable the movement of the second part of the piezoelectricity nanowire, a trench(40) is formed in a substrate part corresponding to the second part. A first electrode(31) and a second electrode(35) are separated from each other so that a part of the length of the piezoelectricity nanowire is positioned at an interval of at least one direction among a horizontal direction and thickness direction of the substrate and are prepared in order to apply the external electric field in the piezoelectricity nanowire.
    • 目的:提供一种光的位置控制装置及其制造方法,其通过使用压电纳米线来有效地控制光的方向,并适用于微/纳米尺度的光学系统。 构成:压电纳米线(20)包括固定到基板(10)的第一部分(21)和从第一部分延伸并准备能够移动的第二部分(25)。 压电纳米线用作辉光炉波,能够沿着外部电场移动的第二部分被弯曲,从而包括改变光渐进方向。 为了实现压电纳米线的第二部分的移动,在对应于第二部分的基板部分中形成沟槽(40)。 第一电极(31)和第二电极(35)彼此分离,使得压电纳米线的长度的一部分位于基板的水平方向和厚度方向之间的至少一个方向的间隔处,以及 为了在压电纳米线中施加外部电场而制备。