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    • 2. 发明专利
    • SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
    • JPH05175144A
    • 1993-07-13
    • JP34455591
    • 1991-12-26
    • FUJITSU LTD
    • HIROSE TATSUYA
    • H01L21/203H01L21/20H01L21/205H01L29/38
    • PURPOSE:To suppress the mutual diffusion of elements constituting adjacent semiconductor layers in a semiconductor device having a structure, in which III-V compound semiconductor layer or IIVI compound semiconductor layer and group TV elements semiconductor layer are laminated by crystal growth techniques such as MBE, MOCVD and MOVPE, and the manufacture of the semiconductor device. CONSTITUTION:Atom diffusion suppression layers 3, 5 of Si, etc., for suppressing the mutual diffusion of atoms constituting III-V compound semiconductor layer of GaAs, GaSb, ZnSe, etc., and II-VI compound semiconductor layer 2, 6 and group IV elements semiconductor layer 4 of Ge, Sn, etc., are inserted into the interface between the compound semiconductor layer 2 or 6 and the elements semiconductor layer 4 and the crystal structure and electrical property of adjacent semiconductor layers are smoothly connected by the atom diffusion suppression layers 3, 5 so that the characteristics of the title semiconductor device are improved.
    • 4. 发明专利
    • SCHOTTKY BARRIER DIODE
    • JPS59220976A
    • 1984-12-12
    • JP9766183
    • 1983-05-31
    • NIPPON DENKI HOME ELECTRONICS
    • ISHIKURA OSAMU
    • H01L29/38H01L29/47H01L29/872H01L29/91
    • PURPOSE:To avoid the deterioration of characteristics by eliminating mechanical stress influencing the Schottky junction by a method wherein a p-n junction is generated by providing a p type region in the surface layer part of an n type Si layer, the entire surface is covered with an insulation film, an ohmic metallic layer is adhered on the p type region by opening a window, and a Schottky barrier metal surrounding it is adhered, leading to the short-circuit of the p-n junction exposing to the surface with the barrier metallic layer. CONSTITUTION:An n type layer 2 is epitaxially grown on an n type Si substrate 1 having a back electrode 10, and the p type region 4 is diffusion-formed in its surface layer part, thus generating the p-n junction 5 between the layer 2. Next, an SiO2 film 3 is adhered over the entire surface, a window being opened. The ohmic metallic layer 6 made of Ti.Ag is adhered on the exposed region 4, and the Schottky forming metallic layer 7 made of Mo on the exposed surface of the layer 2 surrounding it, respectively. The exposed end surface of the junction 5 is thus short-circuited with the layer 7, and a Pt layer and an Ag layer 9 are adhered by lamination thereon. At the time of reverse bias, a high reverse withstand voltage is obtained by generating a depletion layer 12 around the region 4.