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    • 6. 发明专利
    • PHOTOELECTRIC SURFACE
    • JPH04275463A
    • 1992-10-01
    • JP3728691
    • 1991-03-04
    • HAMAMATSU PHOTONICS KK
    • SUZUKI SHINJIOKANO KAZUYOSHIOZAWA TSUTOMU
    • G01J1/02H01J1/34H01J19/02H01L31/0264
    • PURPOSE:To improve sensitivity in the ultraviolet range and to reduce in relative sensitivity in the visible light range by sequentially laminating a base film made of a conductive material, an intermediate layer containing alkali metal and halogen and a photoelectric conversion film containing tellurium and alkali metal on a base. CONSTITUTION:When a CsCl intermediate layer 3 is used between a Cs-Te photoelectric conversion film 4 and a base layer 2, a suitable quantity of CsCl is added to a previously cleaned Pt-Mo film. It is set in a bulb having a glass base 1 previously formed with a Cr thin film in vacuum, The CsCl of a suitable quantity is deposited on the base 1. When the bulb is sufficiently heated, alkali metal (Cs) is introduced into the bulb, and the photoelectric surface is irradiated with an ultraviolet light to monitor a photocurrent. The sensitivity is raised by using an alkali salt layer of the CsCl, etc., between the film 4 and the base metal film. The sensitivity in the unnecessary visible light range is suppressed to a low value, and an ultraviolet photoelectric surface having excellent solar blind characteristic is obtained with very high sensitivity.