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    • 3. 发明专利
    • Groove processing method of integrated thin film solar cell
    • 集成薄膜太阳能电池的光栅处理方法
    • JP2013042153A
    • 2013-02-28
    • JP2012214148
    • 2012-09-27
    • Mitsuboshi Diamond Industrial Co Ltd三星ダイヤモンド工業株式会社
    • SOYAMA MASANOBU
    • H01L31/04B23D1/08H01L21/304
    • B23D13/005B28D5/04H01L21/67092H01L31/0463H01L31/18Y02E10/541
    • PROBLEM TO BE SOLVED: To provide a groove processing method using a groove processing tool capable of manufacturing an integrated thin film solar cell at a good yield.SOLUTION: A shape of a bottom face 83 of a blade tip region 82 of a groove processing tool 8 is a rectangle shape extending in a moving direction. Corner parts, at which the bottom face 83 and a front face 84 and a rear face 85 of the blade tip region 82 positioned on an axial line in the moving direction are crossed with each other at a right angle, are formed as blade tips 86, 87. Using a groove processing tool 8 of such a shape that right and left side faces 88, 89 at a blade tip portion are formed in parallel, an angle of the front face 84 or the rear face 85 at the blade tip portion during patterning to an upper face of a substrate W is in a range of 50 to 80 degrees diagonally toward a traveling direction.
    • 要解决的问题:提供一种使用能够以高产率制造集成薄膜太阳能电池的槽加工工具的槽加工方法。 解决方案:槽加工工具8的叶片尖端区域82的底面83的形状是沿着移动方向延伸的矩形形状。 形成刀片尖端86的角部分,底面83和叶片尖端区域82的位于移动方向上的轴线上的后表面85和后表面85彼此交叉。 87.使用这样的形状的槽加工工具8,其在叶片尖端部分处形成左右侧面88,89的平行形状,在刀尖部分处的前表面84或后表面85的角度在 对基板W的上表面进行图案化,朝向行进方向对角地成为50〜80度的范围。 版权所有(C)2013,JPO&INPIT