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    • 9. 发明专利
    • Pellicle
    • 薄皮
    • JP2004085713A
    • 2004-03-18
    • JP2002243867
    • 2002-08-23
    • Asahi Glass Co Ltd旭硝子株式会社
    • MATSUKURA IKUOSHIROTA NAOKOTSUSHIMA NANAYAMAMOTO KIYOSHIKAKITA REIKO
    • B32B3/02B32B27/00B44F1/00G02B1/04G02F1/13G03F1/62H01L21/027G03F1/14
    • G03F1/62Y10T428/161Y10T428/3154
    • PROBLEM TO BE SOLVED: To provide a pellicle which uses a fluorine-containing polymer having high transmittance for light with 100 to 200 nm wavelength and high durability as a film material or an adhesive material. SOLUTION: The pellicle is used for exposure to light with 100 to 200 nm wavelength. The pellicle film or the adhesive (adhesive for bonding the pellicle film and a frame) comprises a fluorine-containing polymer (A). The fluorine-containing polymer (A) is a substantially linear fluorine-containing polymer featuring that: the main chain has an aliphatic cyclic structure and consists of a continuous chain of carbon atoms; the carbon atoms in the main chain are composed of carbon atoms coupled with hydrogen atoms and carbon atoms having no hydrogen atom coupled; and in the measurement of high resolution proton nuclear magnetic resonance spectrum, the number of hydrogen atoms based on the signal appearing in a magnetic field region over 2.8 ppm is ≤6 mol% with respect to the whole hydrogen atoms. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种使用具有高透射率的含氟聚合物的防护薄膜组件,其具有100至200nm波长的光和作为薄膜材料或粘合材料的高耐久性。

      解决方案:防护薄膜组件用于暴露于100至200nm波长的光。 防护薄膜或粘合剂(用于粘合防护薄膜和框架的粘合剂)包含含氟聚合物(A)。 含氟聚合物(A)是基本上为直链的含氟聚合物,其特征在于:主链具有脂族环状结构并由连续的碳原子链组成; 主链中的碳原子由与氢原子和不具有氢原子的碳原子偶联的碳原子组成; 并且在高分辨率质子核磁共振谱的测量中,基于在2.8ppm以上的磁场区域中出现的信号的氢原子数相对于整个氢原子为≤6mol%。 版权所有(C)2004,JPO