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    • 8. 发明专利
    • Mesa bipolar transistor
    • MESA双极晶体管
    • JP2007287782A
    • 2007-11-01
    • JP2006110755
    • 2006-04-13
    • Hitachi Ltd株式会社日立製作所
    • MOCHIZUKI KAZUHIROYOKOYAMA NATSUKI
    • H01L21/331H01L21/8222H01L27/06H01L27/082H01L29/73
    • H01L21/8213H01L21/101H01L27/0647H01L29/1608H01L29/2003H01L29/66068H01L29/6631H01L29/732H01L2224/48091H01L2224/48137H01L2224/49175H01L2924/00014
    • PROBLEM TO BE SOLVED: To provide a bipolar transistor, especially a small power bipolar transistor, in which a practically sufficient current amplification factor can be ensured even under an environmental temperature of 200°C or above.
      SOLUTION: Acceptor concentration gradient of a base is set larger at the emitter layer end as compared with the collector layer end. The distance (L2) between a first mesa structure consisting of an emitter layer and a base layer and a second mesa structure consisting of the base layer and a collector layer is set in the range of 3-9 μm. Furthermore, the base layer is composed of a first p-type base layer having a uniform acceptor concentration, and a second p-type base layer having a concentration gradient in the depth direction. Current amplification factor can be ensured by these means and a high temperature power bipolar transistor suitable for miniaturization can be provided.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供双极晶体管,特别是小功率双极晶体管,即使在200℃以上的环境温度下也能够确保实际上足够的电流放大系数。 解决方案:与集电极层端相比,基极的受体浓度梯度在发射极层端被设定得更大。 由发射极层和基极层构成的第一台面结构与由基极层和集电体层构成的第二台面结构之间的距离(L2)设定在3-9μm的范围内。 此外,基层由具有均匀受主浓度的第一p型基底层和在深度方向上具有浓度梯度的第二p型基底层组成。 可以通过这些方法确保电流放大系数,并且可以提供适合于小型化的高温功率双极晶体管。 版权所有(C)2008,JPO&INPIT