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    • 1. 发明专利
    • Dielectric layer for electronic device
    • 电子设备用电介质层
    • JP2011018886A
    • 2011-01-27
    • JP2010120304
    • 2010-05-26
    • Xerox Corpゼロックス コーポレイションXerox Corporation
    • WU YILIANGLIU PINGHU NAN-XING
    • H01L21/312H01L29/786H01L51/05H01L51/30
    • H01B3/38H01L21/02123H01L21/3121H01L51/0036H01L51/0043H01L51/052H01L51/0545
    • PROBLEM TO BE SOLVED: To provide a material which can be purified up to an electron grade and is usable to form a dielectric layer reduced in thickness while holding desired electric characteristics.SOLUTION: A dielectric layer is formed by using a liquid composition comprising molecular glass, a crosslinking agent and a catalyst. As the molecular glass being an amorphous molecular material, an ester molecule containing -OH or -NH2, a spiro compound, a bisphenol A compound, a tetrahedral aryl silane compound, an adamantane compound, a cyclic compound, a condensation cyclic compound, a triaryl amine compound, a benzene compound, a hexaphenyl benzene compound, a triphenyl benzene compound, a naphthalene compound, an anthracene compound, a phenanthrene compound and a pyrene compound are used. Further, the molecular glass may contain a compound which is irradiated with light to produce an acid, i.e. inorganic particles such as nanoparticles, metal nanoparticles, metal oxide nanoparticles, and other inorganic nanoparticles.
    • 要解决的问题:提供可纯化至电子等级的材料,并且可以在保持所需电特性的同时形成厚度减小的电介质层。解决方案:通过使用包含分子玻璃的液体组合物形成电介质层 ,交联剂和催化剂。 作为非晶分子材料的分子玻璃,含有-OH或-NH 2的酯分子,螺环化合物,双酚A化合物,四面体芳基硅烷化合物,金刚烷化合物,环状化合物,缩合环状化合物,三芳基 胺化合物,苯化合物,六苯苯化合物,三苯基苯化合物,萘化合物,蒽化合物,菲化合物和芘化合物。 此外,分子玻璃可以含有用光照射以产生酸的化合物,即无机颗粒如纳米颗粒,金属纳米颗粒,金属氧化物纳米颗粒和其它无机纳米颗粒。