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    • 8. 发明专利
    • Photoinduction carrier lifetime measurement device, and photoinduction carrier lifetime measurement method
    • 光电载体寿命测量装置和光电载体寿命测量方法
    • JP2013145868A
    • 2013-07-25
    • JP2012253129
    • 2012-11-19
    • Tokyo Univ Of Agriculture & Technology国立大学法人東京農工大学
    • SAMEJIMA TOSHIYUKI
    • H01L21/66
    • G01N22/00G01N21/63G01N27/00G01N33/00G01N2033/0095G01R31/2642G01R31/2656H01L22/12
    • PROBLEM TO BE SOLVED: To provide a photoinduction carrier lifetime measurement device capable of measuring a bulk carrier lifetime and a surface recombination speed of a semiconductor base substance with accuracy, and to provide a photoinduction carrier lifetime measurement method.SOLUTION: A photoinduction carrier lifetime measurement device includes: light sources 20 and 22 emitting light with different wavelengths for generating photoinduction carriers to a semiconductor base substance S; a microwave generator 10 generating a microwave to be radiated on the semiconductor base substance S; a detector 30 detecting intensity of the microwave that transmitted thorough the semiconductor base substance; and a calculation part 50 calculating an effective carrier lifetime for each wavelength of light on the basis of the microwave intensity detected when at least two kinds of light are emitted, and calculating a bulk carrier lifetime and a surface recombination rate of the semiconductor base substance S on the basis of the calculated effective carrier lifetime for each wavelength.
    • 要解决的问题:提供一种能够精确地测量半导体基体的体积载流子寿命和表面复合速度的光诱导载流子寿命测量装置,并提供光诱导载流子寿命测量方法。解决方案:光感应载流子寿命测量 装置包括:光源20和22,发射具有不同波长的光,以产生对半导体基体S的光感应载流子; 微波发生器10,产生要辐射在半导体基体S上的微波; 检测器30,检测透过半导体基体的微波的强度; 以及计算部50,基于当发出至少两种光时检测到的微波强度来计算每个波长的光的有效载流子寿命,并计算半导体基体S的体积载流子寿命和表面复合速率 在每个波长的计算有效载流子寿命的基础上。
    • 10. 发明专利
    • Method of storing test result, method of displaying test result, and test result display device
    • 存储测试结果的方法,显示测试结果的方法和测试结果显示设备
    • JP2011145202A
    • 2011-07-28
    • JP2010006957
    • 2010-01-15
    • Oki Semiconductor Co LtdOkiセミコンダクタ株式会社
    • KATO KAZUSUKE
    • G01R31/26H01L21/66
    • G01R31/2642
    • PROBLEM TO BE SOLVED: To obtain a method of storing a test result, a method of displaying a test result, and a test result display device, capable of facilitating verifying whether reliability of a designed semiconductor integrated circuit with time can be guaranteed.
      SOLUTION: Test result information is read from an HDD 50 for storing, in advance, the test result information indicating the amount of decreases in reliability of a transistor according to the value of physical quantity with time obtained by performing a reliability test on a decrease in reliability of the transistor with time when changing the level of a predetermined physical quantity relating to the transistor for constituting a semiconductor integrated circuit. The amount of decreases shown by the read test result information is divided into a plurality of continuous regions with an amount within a preset range between the minimum amount of decreases to the maximum amount of decreases, and the divided amount of decreases that has been divided is associated with a region where the value of the first physical quantity is divided and a region where the level of the second physical quantity is divided and is displayed on a monitor 52 as a table indicating a different state for each divided amount of decrease.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了获得能够保证设计的半导体集成电路随时间的可靠性得到保证的方法,可以获得存储测试结果的方法,显示测试结果的方法和测试结果显示装置 。 解决方案:从HDD50读取测试结果信息,用于预先存储指示晶体管的可靠性降低量的测试结果信息,该测试结果信息根据通过对 当改变与用于构成半导体集成电路的晶体管相关的预定物理量的电平时,晶体管的可靠性降低。 读取的测试结果信息所示的减少量被划分为多个连续区域,其数量在最小减少量与最大减少量之间的预设范围内,并且被划分的下降量的分割量为 与划分第一物理量的值的区域和将第二物理量的水平分割并显示在监视器52上的区域相关联,作为表示每个分割的减少量的不同状态的表。 版权所有(C)2011,JPO&INPIT