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    • 10. 发明专利
    • Ultrasensitive gas sensor using oxide semiconductor nano-fiber and method for producing the same
    • 使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
    • JP2010139497A
    • 2010-06-24
    • JP2009172320
    • 2009-07-23
    • Korea Electronics Telecommun韓國電子通信研究院Electronics and Telecommunications Research Institute
    • PARK JIN AHLEE SU JAEMOON JAE HYUNZYUNG TAE HYOUNG
    • G01N27/12B82B1/00C01B13/18C01G1/00C01G1/02C01G9/02C01G19/02
    • G01N27/127
    • PROBLEM TO BE SOLVED: To provide a gas sensor using oxide semiconductor nano-fibers applied with a nano-sized metal oxide or metal catalyst particles which are ultrasensitive to a specific gas. SOLUTION: The gas sensor includes: an insulating substrate; a metal electrode formed on the insulating substrate; and an oxide semiconductor nano-fiber layer formed on the metal electrode and applied with highly sensitive nanoparticles. The gas sensor using oxide semiconductor nano-fibers can be produced by preparing an oxide in a solution for electric radiation, forming oxide semiconductor nano-fibers by subjecting the solution to electric radiation and thermal treatment; and partially applying a nano-sized metal oxide or metal catalyst particles which are highly sensitive to a specific gas, to the surface of the nano-fibers having a large specific surface area. The gas sensor using oxide semiconductor nano-fibers has high sensitivity, high selectivity, high responsiveness, and long term stability. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种使用对特定气体具有超敏感性的纳米尺寸金属氧化物或金属催化剂颗粒的氧化物半导体纳米纤维的气体传感器。 气体传感器包括:绝缘基板; 形成在所述绝缘基板上的金属电极; 以及形成在金属电极上并施加高灵敏度纳米颗粒的氧化物半导体纳米纤维层。 使用氧化物半导体纳米纤维的气体传感器可以通过在电辐射溶液中制备氧化物,通过对溶液进行电辐射和热处理来形成氧化物半导体纳米纤维来制备; 并且将对特定气体高度敏感的纳米尺寸金属氧化物或金属催化剂颗粒部分地施加到具有大比表面积的纳米纤维的表面。 使用氧化物半导体纳米纤维的气体传感器具有高灵敏度,高选择性,高响应性和长期稳定性。 版权所有(C)2010,JPO&INPIT