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1. 发明专利

JP5452392B2 Defect observation methods and defect observation equipment 有权
公开(公告)号：JP5452392B2
公开(公告)日：2014-03-26
申请号：JP2010148486
申请日：2010-06-30
申请人：株式会社日立ハイテクノロジーズ
发明人：陽平嶺川 , 亮中垣 , 健治中平 , 大博平井 , 勝弘北橋
IPC分类号： G01N23/225 , G06T1/00 , H01L21/66
CPC分类号： H01J37/26 , G01N23/22 , G01N2223/421 , G01N2223/6116 , G01N2223/6466 , G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148
摘要： A defect observation device including an input-output unit supplied with information of a taught defect, and information of an ideal output of the taught defect, and configured to display a processing result based upon a determined image processing parameter set; and an automatic determination unit configured to: select image processing parameter sets which are less in number than the total number of all image processing parameter sets, out of all image processing parameter sets, calculate image processing results on an input defect image, by using the selected image processing parameter sets, calculate a coincidence degree for each of the selected image processing parameter sets, estimate distribution of an index value in all image processing parameter sets from distribution of the coincidence degree for the selected image processing parameter sets, and determine an image processing parameter set to have a high coincidence degree out of all image processing parameter sets.

2. 发明专利

JP5698577B2 画像処理装置、画像処理方法並びに画像処理プログラム有权
公开(公告)号：JP5698577B2
公开(公告)日：2015-04-08
申请号：JP2011065511
申请日：2011-03-24
申请人：富士フイルム株式会社
发明人：今井睦朗
IPC分类号： G06T5/10 , A61B6/00
CPC分类号： G06T5/50 , A61B6/4216 , A61B6/4291 , A61B6/5252 , A61B6/5258 , A61B6/5282 , G01N23/04 , G06T5/002 , G06T5/10 , G06T7/0012 , G01N2223/421 , G06T2207/10008 , G06T2207/10116 , G06T2207/20056 , G06T2207/30004 , G06T2207/30096

3. 发明专利

JP2012225768A Defect sorting method and defect sorting system 有权
标题翻译：缺陷分类方法和缺陷分类系统
公开(公告)号：JP2012225768A
公开(公告)日：2012-11-15
申请号：JP2011093603
申请日：2011-04-20
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MINEKAWA YOHEI , TAKAGI YUJI , HARADA MINORU , HIRAI TOMOHIRO , NAKAGAKI AKIRA
IPC分类号： G01N23/225 , G01N21/956 , G06T1/00 , H01L21/66
CPC分类号： G06T7/001 , G01N21/9501 , G01N23/225 , G01N2223/421 , G01N2223/611 , G01N2223/646 , G06K9/6267 , G06T5/00 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To prevent a difference from occurring in a sort recipe between sorting classes, in an automatic defect sorting function, even if a suitable processing parameter is different for each device but a plurality of devices are applied in the same process.SOLUTION: A defect sorting system comprises a corresponding defect identification section 209 which identifies the same type of defective images from images obtained from different image pickup devices in the same process, an image conversion section 212 which converts the images obtained from different image pickup devices in the same process into comparable similar images, and a recipe update section 211 which defines the same sorting class for sort recipes in the same process and registers the same type of identified defective images to the sorting class in the corresponding sort recipe.
摘要翻译：要解决的问题为了防止在排序等级之间的分类配方中出现差异，在自动缺陷分类功能中，即使适合的处理参数对于每个设备是不同的，但是多个设备被应用于同一个处理。解决方案：缺陷分类系统包括相应的缺陷识别部分209，其在相同处理中从不同图像拾取装置获得的图像识别相同类型的缺陷图像;图像转换部分212，转换从不同图像获得的图像将相同过程中的拾取设备拾取到可比较的类似图像中，以及配方更新部分211，其在相同的处理中定义用于排序配方的相同排序类，并将相同类型的所识别的缺陷图像注册到相应排序配方中的排序类。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2011145275A Defect observation method and defect observation device 有权
标题翻译：缺陷观察方法和缺陷观察装置
公开(公告)号：JP2011145275A
公开(公告)日：2011-07-28
申请号：JP2010148486
申请日：2010-06-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MINEKAWA YOHEI , NAKAGAKI AKIRA , NAKAHIRA KENJI , HIRAI TOMOHIRO , KITAHASHI KATSUHIRO
IPC分类号： G01N23/225 , G06T1/00 , H01L21/66
CPC分类号： H01J37/26 , G01N23/22 , G01N2223/421 , G01N2223/6116 , G01N2223/6466 , G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148
摘要： PROBLEM TO BE SOLVED: To provide a defect observation device which inputs a training defect and ideal output that is based on image processing of the training defect, and which can readily and rapidly set image processing parameters required for the classification of the defect type. SOLUTION: The defect observation device includes: an input/output unit 123 which inputs training defect information and information about the ideal output of the training defect, and displays a processing result that is based on a determined image processing parameter set; and an automatic determination unit 124 which selects from among all of the image processing parameter sets, a smaller number of image processing parameter sets than the total number of all of the image processing parameter sets, calculates an image processing result that is based on the image processing parameter sets selected for the defect image that has been input, calculates the degree of agreement of the selected image processing parameter sets, estimates the distribution of index values in all of the image processing parameter sets from the distribution of the degree of agreement of the selected image processing parameter sets, and determines the image processing parameter sets having a high degree of agreement from among all of the image processing parameter sets. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种缺陷观察装置，其输入基于训练缺陷的图像处理的训练缺陷和理想输出，并且其可以容易且快速地设置缺陷分类所需的图像处理参数类型。解决方案：缺陷观察装置包括：输入/输出单元123，其输入训练缺陷信息和关于训练缺陷的理想输出的信息，并且显示基于所确定的图像处理参数集合的处理结果; 以及自动判定单元124，其从所有图像处理参数组中选择比所有图像处理参数组的总数少的图像处理参数集合，计算基于图像的图像处理结果对已经输入的缺陷图像选择的处理参数集合，计算所选择的图像处理参数集合的一致程度，从所有图像处理参数集中的一致程度的分布估计所有图像处理参数集中的索引值的分布选择的图像处理参数组，并且从所有图像处理参数组中确定具有高度一致性的图像处理参数集。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2012203504A Image processing device, image processing method, and image processing program 有权
标题翻译：图像处理设备，图像处理方法和图像处理程序
公开(公告)号：JP2012203504A
公开(公告)日：2012-10-22
申请号：JP2011065511
申请日：2011-03-24
申请人： Fujifilm Corp , 富士フイルム株式会社
发明人： IMAI MUTSUO
IPC分类号： G06T5/10 , A61B6/00
CPC分类号： G06T5/50 , A61B6/4216 , A61B6/4291 , A61B6/5252 , A61B6/5258 , A61B6/5282 , G01N23/04 , G01N2223/421 , G06T5/002 , G06T5/10 , G06T7/0012 , G06T2207/10008 , G06T2207/10116 , G06T2207/20056 , G06T2207/30004 , G06T2207/30096
摘要： PROBLEM TO BE SOLVED: To provide an image signal generation method and device for generating image signals by reading an accumulative phosphor sheet upon which radiographs including grid images have been recorded, wherein periodic patterns such as folding distortion components caused by spacial frequency components of the grid images are suppressed to generate high quality images in which subject components have been maintained.SOLUTION: A first processed signal (Sh) is extracted by filtering the image signals to extract the spacial frequency components corresponding to the already input periodic patterns. The subject components (Sc) of an image included in the first processed signal is extracted from the extracted first processed signal. A second processed signal (Sp) is extracted by subtracting the first processed signal (Sh) from the image signals (Sd) while adding the extracted subject components (Sc) to the image signals (Sd).
摘要翻译：要解决的问题：提供一种图像信号生成方法和装置，用于通过读取累积荧光粉片产生图像信号，在其上已经记录了包括网格图像的放射照片，其中周期性图案例如由空间频率分量引起的折叠失真分量的网格图像被抑制以产生其中保持了被摄体成分的高质量图像。解决方案：通过对图像信号进行滤波来提取第一处理信号（Sh），以提取对应于已经输入的周期性图案的空间频率分量。从提取的第一处理信号中提取包含在第一处理信号中的图像的主题分量（Sc）。通过从图像信号（Sd）中减去第一处理信号（Sh），同时将所提取的被摄体成分（Sc）与图像信号（Sd）相加来提取第二处理信号（Sp）。版权所有（C）2013，JPO＆INPIT

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