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    • 4. 发明专利
    • Contour shape measurement method
    • 轮廓形状测量方法
    • JP2014132264A
    • 2014-07-17
    • JP2013250902
    • 2013-12-04
    • Canon Incキヤノン株式会社
    • MIYATA AKINORIMIYASATO KENICHI
    • G01B5/20
    • G01B5/20G01B5/0021G01B5/245G01B5/25G01B5/252G01B21/04G01B21/20G01B21/24G01M11/30Y10T29/49764
    • PROBLEM TO BE SOLVED: To provide a contour shape measurement method which allows for positioning an object under measurement at a predetermined position more accurately to make highly accurate evaluation even when a probe measurement axis and a table rotation axis are not being aligned with sufficient accuracy.SOLUTION: A spatial position of a table rotation axis relative to a probe measurement axis is acquired as a rotation axis vector, and alignment data acquired in two or more orientations is coordinate-transformed about the rotation axis vector to produce synthetic alignment data. An object under measurement is aligned based on the synthetic alignment data. Since three-dimensional shape data of a measurement surface of the object under measurement can be computed, the object under measurement can be directly aligned to the probe measurement axis.
    • 要解决的问题:为了提供一种轮廓形状测量方法,其允许在预定位置处更准确地将测量对象定位,以便即使当探针测量轴和台面旋转轴没有以足够的精度对准时也能进行高度准确的评估。 解决方案:获取表旋转轴相对于探针测量轴的空间位置作为旋转轴向量,并且以两个或更多个取向获取的对准数据围绕旋转轴向量进行坐标变换,以产生合成对准数据。 测量对象基于合成对准数据进行对齐。 由于可以计算被测物体的测量面的三维形状数据,所以测量对象可以直接对准探针测量轴。