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    • 9. 发明专利
    • Optical position measuring instrument
    • 光学位置测量仪器
    • JP2012242395A
    • 2012-12-10
    • JP2012113454
    • 2012-05-17
    • Dr Johannes Heidenhain Gmbhドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung
    • HERMANN MICHAEL
    • G01D5/347G01D5/38
    • G01D5/366G01D5/38
    • PROBLEM TO BE SOLVED: To properly generate a reference signal in an optical position measuring instrument for measuring the positions of two objects which can perform relative displacement.SOLUTION: A scale body connected to one object includes a reference mark including two partial sections arranged mirror symmetrically at a reference position, and the sections are respectively formed in a lattice structure pattern in which a scale cycle changes and aligned in a movement direction. A scanning unit is connected to the other object, and the unit includes a light source, one or a plurality of lattices, and a reference signal detection device. The reference signal detection device has detector arrays 22.1 to 22.4, scans the reference mark to detect the reference mark with the detector arrays, and forms a partial reference signal being in reverse phase relation to a first set and a partial reference signal being in reverse phase relation to a second set offset from the partial reference signal. In a processing circuit of a subsequent stage connected to the detector arrays, the partial reference signals of the first and second sets are processed to generate a reference signal.
    • 要解决的问题:在用于测量可执行相对位移的两个物体的位置的光学位置测量仪器中适当地产生参考信号。 < P>解决方案:连接到一个物体的标尺体包括参考标记,该参考标记包括在参考位置对称地布置的两个部分部分,并且这些部分分别形成为格子结构图案,其中标尺周期改变并且在运动中对齐 方向。 扫描单元连接到另一个对象,并且该单元包括光源,一个或多个格子以及参考信号检测装置。 参考信号检测装置具有检测器阵列22.1至22.4,扫描参考标记以用检测器阵列检测参考标记,并形成与第一组反向相关的部分参考信号和处于相反相位的部分参考信号 与第二组偏离部分参考信号的关系。 在与检测器阵列连接的后级的处理电路中,处理第一和第二组的部分参考信号以产生参考信号。 版权所有(C)2013,JPO&INPIT