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    • 3. 发明专利
    • Shaft seal dust-proof structure of turbo molecular pump
    • 涡轮分子泵的SHAFT密封防尘结构
    • JP2006138216A
    • 2006-06-01
    • JP2004326453
    • 2004-11-10
    • Osaka Vacuum Ltd株式会社大阪真空機器製作所
    • IGUCHI MASASHIOBAYASHI TETSUO
    • F04D19/04
    • F04D29/104F04D19/04
    • PROBLEM TO BE SOLVED: To provide a shaft seal dust-proof structure of a turbo molecular pump, preventing penetration of corrosive gas and fine particles into the motor housing of the turbo molecular pump in the turbo molecular pump performing vacuum exhaustion of corrosive gas and gas containing fine particles such as dust.
      SOLUTION: In the turbo molecular pump provided with a purge gas feed port 5a arranged in the motor housing 5, a shaft seal part comprising a clearance seal part 3a arranged on the peripheral part of a boss 1b projected in the center part of the disk 1a of a rotor 1 and a centrifugal blade dust-proof part 3b having a centrifugal blade 1c arranged on the surface of the disk 1a is provided in a purge gas route leading from the motor housing 5 to a pump chamber 8.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供涡轮分子泵的轴密封防尘结构,防止在涡轮分子泵中的腐蚀性气体和细颗粒渗透到涡轮分子泵的马达壳体中,从而执行腐蚀性的真空耗尽 气体和气体含有细颗粒如灰尘。 解决方案:在涡轮分子泵中,设置有布置在电动机壳体5中的吹扫气体供给口5a,轴密封部分包括间隙密封部分3a,该间隙密封部分3a布置在凸起1b的周边部分上, 转子1的盘1a和布置在盘1a表面上的具有离心叶片1c的离心叶片防尘部3b设置在从马达壳体5引导到泵室8的吹扫气体路径中。

      版权所有(C)2006,JPO&NCIPI